FabGuard is designed for in situ process monitoring and real-time data analysis. FabGuard collects data from both the tool and advanced sensors; performs endpoint detection, fault detection and classification, and metrology prediction; and finally, sends alarms and results to the tool or the host for process interdiction. FabGuard provides a single, integrated environment for advanced process control (APC).
Software Components
The FabGuard system can provide experimental, tool level, and factory level APC functionality. The following software components can be combined to meet specific factory requirements:
Process Monitor (IPM)
FabGuard IPM is the all-inclusive FDC application. The IPM provides the features of all of the FabGuard products in a single application. The IPM performs all of the data acquisition, analysis (real-time and run-by-run), sensor control, and advanced reporting required of a fully functional FDC system. Each IPM operates in stand-alone or Enterprise mode to provide the end user the greatest flexibility.
Facilities Monitor (FM)
Compared to the FabGuard IPM, FabGuard FM has a modified feature set that is specifically configured for continuous facilities control and monitoring applications. While both software applications can connect to the process equipment and facilities systems, the FabGuard FM is not designed to perform run-by-run process monitoring.
Connect (CON)
FabGuard CON supports low automation factory environments and provides high fidelity data collection for FPS WiP Scheduling.
Sensor Controller (SC)
INFICON provides a number of sensor and application-based solutions that require real-time analysis. The FabGuard SC provides real-time process control and monitoring with interdiction capability. FabGuard SC combines data collection and sensor control with the ability to perform process endpoint detection and critical fault detection such as: Photoresist detection, Real-time leak detection, and Arc detection. Results from any real-time analysis performed by FabGuard SC are used to perform interdiction and can be sent to any connected host.
Analysis Server (AS)
The FabGuard Analysis Server provides run-by-run multivariate analysis and prediction capabilities to any existing FDC system. INFICON's simple FabGuard AS interface enables factory hosts and FDC systems to gain access to advanced multivariate fault detection, classification and metrology prediction algorithms by submitting raw or summarized data to the FabGuard Analysis Server. Custom interfaces to support in-house or other 3rd party FDC systems are available as required.
Analysis Node (AN)
The FabGuard Analysis Node provides run-by-run multivariate analysis and prediction capabilities to any existing FDC system. INFICON's simple FabGuard AN interface enables factory hosts and FDC systems to gain access to advanced multivariate fault detection, classification and metrology prediction algorithms by submitting raw or summarized data to the FabGuard Analysis Node. Custom interfaces to support in-house or other 3rd party FDC systems are available as required.
Data Server (DS)
The FabGuard Data Server performs data serving functions for a factory that already possesses a fab-wide server-based FDC system. In the case where sensor, Analog/Digital I/O, or tool data must be forwarded to another system, the FabGuard DS can be used to serve data. The DS provides capabilities to control sensors and perform data acquisition from process equipment. Any data collected by the DS is sent to another system to perform analysis. This product is similar to other 3rd party systems that provide only collection capabilities without local analysis.
Explorer (EX)
There are many cases where sensors, particularly Residual Gas Analysis (RGA) mass spectrometers, are not required to operate continually such as when an RGA is only used to perform leak detection after a chamber preventative maintenance. To accomplish these types of tasks, the FabGuard EX provides the capabilities to control, operate, tune and configure installed sensors. The software is designed to allow the user complete control of INFICON and 3rd party sensors. Additionally, the data that is collected is stored for later retrieval and viewing.
Executive
FabGuard Executive supervises multiple FabGuard Nodes, each monitoring one of the tools in the fab. It gathers status information from all FabGuard Nodes, creating dynamic content for the web that allows for centralized configuration of the FabGuard system. Additionally, FabGuard Executive provides enterprise services such as email, file archiving, and scheduled Report generation.
Web
FabGuard Web is a web site and a collection of web components that allow user access to FabGuard functions over the web. FabGuard Web displays expandable views of activity and status for Tools, Chambers, and Sensors. FabGuard Web also provides access to Alarms, Reports, Models, Real-time and historical data.
Database
The FabGuard Database serves as a repository for all summary information acquired by one or more FabGuard Nodes. This includes logistical information about wafers and the results of all analyses applied to the data. The FabGuard Database also stores all centrally managed information such as Reports and Models. Raw data, because of its high volume, is stored in files; the locations of the files, and summary statistics, are stored in the database.
Enterprise Capabilities
The Enterprise capabilities of the FabGuard data acquisition and analysis system provide central management of the FabGuard Nodes located at each manufacturing tool. While each FabGuard Node acts independently in its interaction with the tool, centralized features allow users to manage the whole bay, line, or fab with minimum effort and little repetition of setup.
The table below lists some of the available enterprise capabilities:
FabGuard Capabilities
AS
AN
IPM
SC
FM
CON
EX
Connectivity
SECS Tool Connection
SECS Host Connection
SECS Multiplexer Connectivity
Tool Data Collection
Sensor Data Collection (INFICON & Third Party)
Digital and Analog I/O Collection (1Hz to 20Hz)
High Speed Analog Data Collection (20Hz to 1MHz)
Serve data to 3rd Party FDC
Sensor Support
Sensor and Analog Integration
Tool Maintenance (leak checking)
Sensor Maintenance
Acquisition
Manual and Automated Sensor Acquisition Control
Recipe Acquisition Control (tool Synchronization)
SECS
OPC for Programmable Logic Controllers
RV
Data
Data Conditioning and Framing
Mathematical Analysis Toolbox (Signal Bins)
Data Summarization (Bin Statistics)
Analysis
Real Time Process Control
Real Time Expert System
SPC Analysis
Equipment Performance Indicators
Advanced Modeling (Predictive, Classification, etc.)
Notification
Direct Tool Interdiction (SECS, DIO/AIO)
Indirect Tool Interdiction (Host notification)
Alarm Email Notification
Reports
System Alarms Tracking (Comm and Sensor Errors)
Save data History
Historical Data Viewer
Analysis Alarms Tracking
Database
Advanced Reporting (fab-wide tool performance)
Tool Alarms Tracking
Infrastructure and Automation
Web services (remote monitoring outside the fab)
Central System Management
Tool Operator Interface
Tool Recipe Management