FabGuard v22.03.00

We are pleased to announce the release of FabGuard v22.03.00. The FabGuard Team has provided significant enhancements to configuration management and data visualization with Control Summary and other improvements.

Key Features

Automated Acquisition Manager summary as a Control Summary – initial version

View a summary of the data collection and analyses implemented by FabGuard Node to ensure quality control for product.

• Control Summary shows every Bin, its source (Acquisition Trigger, Sensor, FG Recipe), created FOMs, and analysis for each FOM

• Row per Use is a detailed view that lists every unique combination of Bin/Acquisition/Recipe/FOM/Analysis. This allows for lots of detail about the Bin and the analysis

• Row per Recipe is a summary view that counts the types of analysis configured for each Bin/Recipe combination. This cannot show all the detail but can quickly show where bin is used per Recipe

• Row per Bin is a summary view that counts the types of analysis configured for each Bin. This cannot show all the detail, but can quickly show where Bin is used

Functional Enhancements

Display

• Active Analysis view now has a “Refresh” button to update the table data

• Alerts view on FabGuard Web is now able to be filtered by Severity

• Analysis Category has been added as an attribute stemming from Report Category in SPC Reports. You can use it to filter and color data by category

Configuration

• KPI calculations have a Global Preference to filter MES state, Tool Recipe ID, and Lot ID prior to their calculation

Analysis

• History Split information is added to the plot title area in Report views for visibility

• Maintenance Indicators can be reset automatically after any attached Report generated a Critical Fault using the function “Maintenance Indicator (MI) Time Accumulator Reset while Fault”

• Filter Control of Tool Alert Reports by Alert Class

• Metrics based on the number of interdicting analyses and faults based on fault severity and Report category are tracked and able to be added to Metric Summary Reports

• SmartFDC algorithm improvements for "Actuator Relative" vs. "Uncontrolled Relative" Bins

Integration

• I/O Output Channel has an added ability to restrict when output is communicated. One alternative is to only send once per user-defined time interval, and the other is only after a specified number of occurrences

• TRM has an option to select which SECS message to use, including S7F5, S7F25 or Both

• ECID Verification Failure and TRM Verification Failure may now have Fault Codes defined in Global Preferences

• FabGuard Web Launcher facilities easy access to one among several available Executives through a unified URL / location. Note that authentication is needed only after selection

Connections/Sensor Support

See SECS DLL list for tools with amended connection support

New/Modified Tool Types and SECS DLLs

The following Tool Types and SECS DLLS are now available or have been modified for better performance:

• AMAT Verity 2

• Applied NAR Dual Track

• Applied NAR Rotation

• Canon FPA-3030i5

• CUON Detaper

• DNS WS820C

• Evatec BAK SAW Evaporator

• KLA ASET-F5x

• KLA ASET-F5x Pro

• KLA Surfscan

• KLA Surfscan SP1-TBI

• Lam Alliance

• Lam Sabre 3D

• Lam SP203L

• Longhill LH8362

• Longhill LH8382

• Longhill LH8383

• Longhill LH8600

• Mattson Aspen II v2

• Sapphire DCR 2.2.5

• Siconnex BATCHSPRAY

• Siconnex BATCHSPRAY Acid 2.0

• SKv1 TXT

• TEL Clean Track ACT-8 Dual Block

• TEL Clean Track ACT-8 Single Block

• Tianma Wuhan

• TianMa XiaMen

• Ulvac Enviro-1Xa 2C

• Varian M2000/8

• Varian m2

Full Release Notes

FabGuard Release History 22.06.00-a

FabGuard Release History 22.03.00-h