FabGuard Enterprise

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  • Computer System Requirements

    All the things required by the software to run properly.

  • Computer System Requirements
  • Computer System Requirements
  • Computer System Requirements
  • Computer System Requirements

    All the things required by the software to run properly.

  • Computer System Requirements

    All the things required by the software to run properly.

  • FabGuard Concepts

    FabGuard is designed for in situ process monitoring and real-time data analysis. FabGuard collects data from both the tool and advanced sensors; performs endpoint detection, fault detection and classification, and metrology prediction; and finally, sends alarms and results to the tool or the host for process interdiction. FabGuard provides a single, integrated environment for advanced process control (APC).

  • FabGuard Concepts

    FabGuard is designed for in situ process monitoring and real-time data analysis. FabGuard collects data from both the tool and advanced sensors; performs endpoint detection, fault detection and classification, and metrology prediction; and finally, sends alarms and results to the tool or the host for process interdiction. FabGuard provides a single, integrated environment for advanced process control (APC).

  • FabGuard Concepts

    FabGuard is designed for in situ process monitoring and real-time data analysis. FabGuard collects data from both the tool and advanced sensors; performs endpoint detection, fault detection and classification, and metrology prediction; and finally, sends alarms and results to the tool or the host for process interdiction. FabGuard provides a single, integrated environment for advanced process control (APC).

  • Computer System Requirements

    All the things required by the software to run properly.

  • FabGuard Concepts

    FabGuard is designed for in situ process monitoring and real-time data analysis. FabGuard collects data from both the tool and advanced sensors; performs endpoint detection, fault detection and classification, and metrology prediction; and finally, sends alarms and results to the tool or the host for process interdiction. FabGuard provides a single, integrated environment for advanced process control (APC).

Test 2, Bayron’s workaround using excerpts…

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    Test 2, Bayron’s workaround using excerpts with children display

      Release Notes

        Code Snippet (Code Block)

        SQL
                    select c.*,
                    -- Perform the ct for target WIP calculation using the process time, sample rate, usage rate, utilization factor from the queueing model, and multiplier
                    -- TCT_sec is based on several input factors (e.g. average lot size) whereas proc_sec is just a historical average of what ran
                    -- MPU starts with the historical throughput, but then adds on cascading factors
                    -- Proc_sec (not available by eqp_type) is not available from the capacity model tables so if you use the queueing model method you must use tct_sec,
                    --  which is reasonable given that the queueing model relies on many capacity model inputs anyway
                    (case when lb_target_basis = 'MPU' then mpu*avg_qty_per_carr_for_uph when lb_target_basis = 'TCT' then tct_sec_eqp_type / 60 else proc_sec_comp_full_wavg / 60 end )
                  * least(lb_qmodel_max_xfactor, (est_smp_pct/100) * (est_use_pct/100) * decode(lb_target_method, 'QUEUEING MODEL', est_utilization_factor * variation_factor, 1) * target_wip_multiplier) as ct_mins_for_target_wip_final
                    from
                    -- Still one row per facility, route, step, eqp_type
                    (
                        select b.*,
                        -- Calculate the queueing model utilization factor, add 1 to always include process time
                        round(power(est_utilization_ratio_capped, sqrt(2 * (num_cap_ents + 1)) - 1) / (num_cap_ents * (1 - est_utilization_ratio_capped)), 4) as est_utilization_factor
                        from
                        -- This subquery results in one row per facility, route, step, eqp_type
                        -- Eff mins can be summed since est_use_pct is already factored in
                        (
                            select a.*,
                            eqp_type_eff_mins_per_day/eqp_type_avail_mins_per_days as est_utilization_ratio,
                            -- Capping the est_utilization_ratio avoids cases where demand exceeds capacity which leads to > exponential increases in the target wip
                            least(eqp_type_eff_mins_per_day/eqp_type_avail_mins_per_days, 0.95) as est_utilization_ratio_capped
                            from
                            (
                                select base.*, cm_rse.eqp_type, nvl(est_use_pct, 100) as est_use_pct, nvl(tct_sec, tct_sec_rrsp) as tct_sec_eqp_type,
                                nvl(mpu, 0) as mpu, nvl(num_cap_ents, 1) as num_cap_ents, cap_entity_list, nvl(variation_factor, 1) as variation_factor,
                                round(sum(nvl(eff_mpw, 0)) over (partition by base.facility, cm_rse.eqp_type), 4) as eqp_type_eff_mpw,
                                round(sum(nvl(eff_mpw, 0) * wip_qty_rt_rsec / greatest(rt_rsec_ct_days, 0.1)) over (partition by base.facility, cm_rse.eqp_type), 4) as eqp_type_eff_mins_per_day,
                                nvl(num_cap_ents, 1) * 24 * 60 * nvl(plan_util, 100) / 100 as eqp_type_avail_mins_per_days
                                from base
                                -- This join introduces a row per eqp_type used at each facility, route, step
                                left join cm_p_route_step_eqp cm_rse
                                on base.facility = cm_rse.facility and base.route = cm_rse.route and base.step = cm_rse.step
                                left join cm_p_eqp_types cm_et
                                on base.facility = cm_et.facility and cm_rse.eqp_type = cm_et.eqp_type
                                where is_staging_step = 'N'
                            ) a
                        ) b
                    ) c
                    join gp_c_facility f
                    on c.facility = f.facility
                    join gen_facilities gf
                    on f.facility = gf.facility
        

        Table

        Route

        Route_Section

        Common_Step

        Cycle_Time_to_EOL

        Process_Time

        Current_WIP

        Target_WIP

        (Calculated) 

        WIP_Delta

        (Calculated)

        Flow_90_nm

        Trench_1

        PreOx_Clean

        60

        40

        100

        41

        59

        Flow_90_nm

        Trench_1

        Diff_Ox

        59

        240

        150

        243

        -93

        Flow_90_nm

        Trench_1

        Photo_Iline

        58

        40

        75

        41

        34

        Flow_90_nm

        Trench_1

        Etch 

        57

        30

        50

        30

        20

        Flow_90_nm

        Trench_1

        Strip

        56

        20

        0

        20

        -20

        Flow_90_nm

        Trench_2

        Imp_MC

        55

        10

        100

        22

        78

        Flow_90_nm

        Trench_2

        PreNit_Clean

        54

        60

        300

        132

        168

        Flow_90_nm

        Trench_2

        Diff_Nit

        53

        180

        150

        396

        -246

        Table Full Width

        Route

        Route_Section

        Common_Step

        Cycle_Time_to_EOL

        Process_Time

        Current_WIP

        Target_WIP

        (Calculated) 

        WIP_Delta

        (Calculated)

        Flow_90_nm

        Trench_1

        PreOx_Clean

        60

        40

        100

        41

        59

        Flow_90_nm

        Trench_1

        Diff_Ox

        59

        240

        150

        243

        -93

        Flow_90_nm

        Trench_1

        Photo_Iline

        58

        40

        75

        41

        34

        Flow_90_nm

        Trench_1

        Etch 

        57

        30

        50

        30

        20

        Flow_90_nm

        Trench_1

        Strip

        56

        20

        0

        20

        -20

        Flow_90_nm

        Trench_2

        Imp_MC

        55

        10

        100

        22

        78

        Flow_90_nm

        Trench_2

        PreNit_Clean

        54

        60

        300

        132

        168

        Flow_90_nm

        Trench_2

        Diff_Nit

        53

        180

        150

        396

        -246

        LaTex Equations

        Reliability

        Mean Time Between Failure - Uptime (MTBFu) 

        Unknown Attachment

        Mean uptime between failures: the average equipment system uptime that the equipment was capable of performing its intended function between failures; uptime divided by the number of failures during that time. Only uptime is included in this calculation. Failures that occur coincident with an attempt to change from NST or SDT to an uptime state are included in this calculation. -SEMI E10

        Level

        Equation

        Entity

        We don't have a way to export this macro.

        Tool / Cluster

        We don't have a way to export this macro.

        Where:

        • We don't have a way to export this macro. - Represents the time that the entity or tool spent in the Equipment Uptime states including ENG, SBY or PRD state

        • We don't have a way to export this macro. - The count of UDT Episodes (E.G. Entity level failures) 

        • We don't have a way to export this macro. - Start of the time period of observation

        • We don't have a way to export this macro. - End of the time period of observation

        • We don't have a way to export this macro. - Entity level logging

        • We don't have a way to export this macro. - Tool level including the contribution-factor* for the entities for each state.

        • We don't have a way to export this macro. - Episodes when the entire tool is in a failure state considering the contribution-factor* of the tools entities.