Thank you for purchasing FabGuard!
FabGuard FDC combines on-line Fault Detection and Classification (FDC) capabilities with powerful tools for fab engineers to readily analyze virtually any aspect of process and equipment behavior. No other system provides greater capability to guard against wafer loss, reduce unscheduled tool downtime and improve yield.
Observe the operating instructions for the product
Getting Started will assist you in basic software navigation and data view operations.
To obtain complete information about any sensor product, you must always observe the sensor operating instructions, particularly the safety instructions and warnings.
How to Contact Customer Support
Worldwide customer support information is available under Contact > Support Worldwide at http://www.inficon.com :
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Sales and Customer Service
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Technical Support
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Repair Service
When contacting INFICON regarding a problem with FabGuard please have the following information readily available:
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FabGuard version number (click Help > About the Program)
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Computer type and its specifications
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Microsoft Windows type and version number
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A description of the problem
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An explanation of any corrective action already attempted
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The exact wording of any error messages received