data-dictionary

FPSADMIN.CHK_ECT_HIST

Data Dictionary

>

FPSADMIN Views

> FPSADMIN.WIP_WAFER_HIST_LOOP

View FPSBASE.CHK_ECT_HIST

View to check the integrity of the ECT_HIST table

Column

Comment

PROBLEM

LOT

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

IN_WL

HIST_INSERTED_TIME

Unlike just about every other history table, ETP_HIST does not have a single column that represents the inst associated with the record. For example, WIP_EVENT_HIST has inst, WIP_END_SHIFT_HIST has start_shift, THP_EQPTYPE_WEEK_HIST has start_week, and so on. These columns are consistent with the data in the entire table and sorting by them gives you a consistent order of the records in the table. When a record is inserted into ETP_HIST, it might be because of an EQP state change in which case eqp_to_inst would be the inst of the event that triggered the state change. But etp_to_inst would still be the old value. And vice versa for ETP state changes. Furthermore while usually either eqp_to_inst or etp_to_inst is relevant, we also insert records when the standby state changes without a EQP/ETP state change and in these cases sby_inst is relevant but both eqp_to_inst and etp_to_inst are old values. And the worst case is when the only change is a standby state of any entity on the tool which actually has no relevant inst. The only column which is always relevant is hist_inserted_time so we have no choice but to use this column as the purge_column_name in CFG_TABLES. By the nature of the logic, hist_inserted_time is always newer than all of the other inst values so we will never purge too many records. If the data is behind or loaded for a past period then we will purge too little but that is acceptable. (* inherited from FPSBASE.ETP_HIST)

STEP_ENT_INST

Time when the lot entered the step. (* inherited from FPSBASE.WIP_LOT_HIST)

QTY

Quantity of units in the lot according the qty_unit defined for the facility. It is required for all lots in each facility to have their qty defined in the same units therefore the change in the unit is critical to defining the facility. For example, a pretest facility might have a sort step in the middle where we learn the qty of die. Prior to this step we know only the wafer qty but after this step we know both wafer and die. Since wafer is the only qty we know throughput the flow then wafer must be defined as the qty unit for this facility. Die can then be populated as sec_qty when it is known. Similarly the wafer saw facility might have a step in the middle where we cut the wafers into die. After this step we no longer know the number of wafers which means that die must be the qty unit for this facility and wafers can be the sec_qty prior to the saw step. Please note that a lot with qty of 0 is allowed but only if the sec_qty is greater than 0. This is unusual but one case is where we know the wafers will be scrapped but cannot be scrapped quite yet. (* inherited from FPSINPUT.WIP_EVENT_HIST)

IS_CURR_RECORD

ECT_FROM_INST

ECT_TO_INST

See comments on WIP_LOT_HIST.NEXT_INST. (* inherited from FPSBASE.ECT_HIST)

ECT_TO_INST_NOT_NULL

See column comments for WIP_LOT_HIST.NEXT_INST. (* inherited from FPSBASE.ECT_HIST)

NEXT_ECT_FROM_INST

ECT_STATE

ECT state is the lowest level state of our Enhanced Cycle Time hierarchy and the value which is stored in WIP_LOTS_REALTIME and ECT_HIST. We can lookup all information about the ECT state including process state in ECT_STATE_DIAGRAM. (* inherited from FPSADMIN.WIP_ECT_STATES)

ECT_UPDATED_BY

ECT_UPDATED_COMMENT

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

PRD

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* inherited from FPSINPUT.RTG_PRDS)

STEP

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

BANK

Lots which are not on a route are considered in a bank and the bank name indicates why the lot is off route. Bank must be NA for lots which are on a route. Our standard filter for active lots is bank = NA. (* inherited from FPSINPUT.RTG_BANKS)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

PROCESS_MODULE

WIP_MODULE is used to credit moves and set goals. See comments on the module column in GEN_MODULES for info on this column and how it relates to eqp_module and mnt_module. (* inherited from FPSBASE.RTG_ROUTE_STEPS_PLUS)