FPSBASE Tables

LOT, SINGLE_OR_ALL, FACILITY, ROUTE, STEP

See comments in CHK_REF_WSF_LOTS_TO_FIX view.

INST, FACILITY, LOT, IS_IN_SAME_FAC_SEQ

A record for each finished lot showing the total cycle time spent in the facility broken down by queue, hold, bank, and other categories. The primary key of this table should be lot+facility but it is actually lot+facility+inst and there are two reasons for this. The first reason is that some sites allow a lot to be shipped and then unshipped and then shipped again. When this happens only the first record will be valid so this will not impact CTR views. The second reason is that some sites reuse the same lot_id values in their MES for new lots. So one particular physical lot can only finish once per facility. However two different physical lots with the same lot_id value can finish at different times. This will impact CTR views but it is extremely rare so we accept that CTR will not work properly if a site does this with production lots.

FINISHED_PERIOD

See comments in CTM_REF_FINISHED_PERIODS view.

INST, FACILITY, LOT, BANK, PROCESS_FAMILY, PROCESS_MODULE, IS_IN_SAME_FAC_SEQ

A record for each bank or process_family of each finished lot showing the total cycle time spent in the facility broken down by queue, hold, bank, and other categories.

FACILITY, ROUTE, STEP

See comments in CTM_REF_FOR_ROUTE_STEPS view.

LOT, FACILITY, ROUTE, INST

See comments in CTM_APD_START_LOT_HIST view.

See comments in CTM_REF_SUMMARY view.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

Temporary table to store records of CTM_SUMMARY during ADM_TABLE_LOOP load.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in CTM_REF_SUMMARY_P1_MEDIANS view.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in CTM_REF_SUMMARY_P2_BASE view.

FACILITY, ROUTE_FAMILY_IF_USED_IN_G1, STEP_OR_COMMON_STEP, BANK, LOT_GROUP_IF_USED_IN_G1, IS_NONSTD

See comments in CTM_REF_SUMMARY_P3_FILLIN_G1 view.

FACILITY, ROUTE_FAMILY, PROCESS, BANK

See comments in CTM_REF_SUMMARY_P3_FILLIN_G2 view.

FACILITY, ROUTE_FAMILY, PROCESS, BANK, LOT_GROUP, PRTY_CTM_GROUP, IS_NONSTD

See comments in CTM_REF_SUMMARY_P3_FILLIN_G3 view.

FACILITY, ROUTE_FAMILY, PROCESS_FAMILY, BANK, LOT_GROUP, PRTY_CTM_GROUP, IS_NONSTD

See comments in CTM_REF_SUMMARY_P3_FILLIN_G4 view.

FACILITY, ROUTE_FAMILY, PROCESS_FAMILY, BANK, LOT_GROUP, IS_NONSTD

See comments in CTM_REF_SUMMARY_P3_FILLIN_G5 view.

FACILITY, PROCESS_FAMILY, BANK, LOT_GROUP, PRTY_CTM_GROUP, IS_NONSTD

See comments in CTM_REF_SUMMARY_P3_FILLIN_G6 view.

FACILITY, PROCESS, BANK

See comments in CTM_REF_SUMMARY_P3_FILLIN_G7 view.

FACILITY, PROCESS_FAMILY, BANK, LOT_GROUP

See comments in CTM_REF_SUMMARY_P3_FILLIN_G8 view.

FACILITY, PROCESS_FAMILY, BANK

See comments in CTM_REF_SUMMARY_P3_FILLIN_G9 view.

FACILITY, PRD, PLANPRD, ROUTE, STEP, BANK, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in CTM_REF_SUMMARY_P4_VALUES view.

FACILITY, PRD, BANK, ROUTE, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in CTM_REF_SUMMARY_TOTALS view.

FACILITY, ROUTE, STEP, BANK, LOT_GROUP, PRTY_CTM_GROUP, IS_NONSTD

See comments in CTM_REF_SUMMARY_VALUES_L1 view.

FACILITY, ROUTE_FAMILY, PROCESS, BANK, LOT_GROUP, PRTY_CTM_GROUP, IS_NONSTD

See comments in CTM_REF_SUMMARY_VALUES_L2 view.

FACILITY, PROCESS, BANK, LOT_GROUP

See comments in CTM_REF_SUMMARY_VALUES_L3 view.

FACILITY, PROCESS_FAMILY, BANK, LOT_GROUP

See comments in CTM_REF_SUMMARY_VALUES_L4 view.

FACILITY, PROCESS_FAMILY, BANK

See comments in CTM_REF_SUMMARY_VALUES_L5 view.

START_PLAN_WEEK, FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in CTM_APD_SUMMARY_WEEK_HIST view.

See comments in CTM_APD_WEEK_HIST view.

INST, FACILITY, LOT, IS_IN_SAME_FAC_SEQ

A record for each finished lot showing the total cycle time spent in the facility broken down by queue, hold, bank, and other categories. The primary key of this table should be lot+facility but it is actually lot+facility+inst and there are two reasons for this. The first reason is that some sites allow a lot to be shipped and then unshipped and then shipped again. When this happens only the first record will be valid so this will not impact CTR views. The second reason is that some sites reuse the same lot_id values in their MES for new lots. So one particular physical lot can only finish once per facility. However two different physical lots with the same lot_id value can finish at different times. This will impact CTR views but it is extremely rare so we accept that CTR will not work properly if a site does this with production lots.

INST, FACILITY, LOT, BANK, PROCESS_FAMILY, PROCESS_MODULE, IS_IN_SAME_FAC_SEQ

A record for each bank or process_family of each finished lot showing the total cycle time spent in the facility broken down by queue, hold, bank, and other categories.

FACILITY, ROUTE, STEP

See comments in ECT_REF_FOR_ROUTE_STEPS view.

Summary of every change in the ECT state used as the base for our Enhanced Cycle Time calculations.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in ECT_REF_MOVES_7D_2D_CW view.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD, START_WEEK

See comments in ECT_APD_MOVES_WEEK_HIST view.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD, ECT_STATE

See comments in ECT_REF_STATE_7D_2D_CW view.

ECT_STATE

See comments in ECT_REF_STATE_DIAGRAM view.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD, ECT_STATE, START_WEEK

See comments in ECT_APD_STATE_WEEK_HIST view.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in ECT_REF_SUMMARY view.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

Temporary table to store records of ECT_SUMMARY during ADM_TABLE_LOOP load.

START_WEEK, FACILITY

See comments in ECT_REF_SUMMARY_P1_WEEKS view.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in ECT_REF_SUMMARY_P2_STATE view.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in ECT_REF_SUMMARY_P3_MOVES view.

ZERO_IF_NO_ERRORS

See comments in ECT_REF_SUMMARY_P4_PERIODS view.

FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in ECT_REF_SUMMARY_P5_BASE view.

START_PLAN_WEEK, FACILITY, ROUTE, STEP, BANK, PRD, PLANPRD, PRTY_CTM_GROUP, LOT_GROUP, IS_NONSTD

See comments in ECT_APD_SUMMARY_WEEK_HIST view.

FACILITY, TOOL, RQD_SETUP_OR_NA

See comments in EQP_REF_ALL_SETUPS_BY_TOOL view.

FACILITY, CAP_ENTITY

See comments in EQP_REF_CAP_ENTITIES view.

FACILITY, TOOL, CH_ALLOWED, RQD_SETUP_OR_NA

See comments in EQP_REF_CH_ALLOWED_STATUS view.

FACILITY, TOOL, CH_PATH

See comments in EQP_REF_CH_PATH_STATUS view.

RECIPE_CHG_INST, FACILITY, TOOL, ENTITY

Current recipe(est_machine_recipe) for those entities where recipe is applicable. The CURR_RECIPE needs to match the EST_MACHINE_RECIPE in order for the recipe to be able to run on the entity.

START_PLAN_DAY, END_PLAN_DAY, FACILITY, TOOL, ROUTE, PRD, STEP, LOT_TYPE, PLAN_PRIORITY, IS_NONSTD

Base table for tool completes by plan day used by Dashboard spotlight and Historical Performance. Only entries in WIP_STEP_HIST with move_type of COMP and tool populated are included as tool completes.

Base table for tool completes by shift used by Dashboard spotlight and Historical Performance. Only entries in WIP_STEP_HIST with move_type of COMP and tool populated are included as tool completes.

FACILITY, TOOL, ENTITY, START_PLAN_DAY

See comments in EQP_APD_ENTITY_E10_PD_HIST view.

FACILITY, TOOL, ENTITY, START_PLAN_WEEK

See comments in EQP_APD_ENTITY_E10_PW_HIST view.

FACILITY, TOOL, ENTITY, START_SHIFT

See comments in EQP_APD_ENTITY_E10_SHIFT_HIST view.

FACILITY, TOOL, ENTITY, START_WEEK

See comments in EQP_APD_ENTITY_E10_WEEK_HIST view.

FACILITY, ENTITY, EQP_STATE, START_SHIFT

Summary of EQP_HIST by ENTITY for each shift.

FACILITY, ENTITY, EQP_STATE, START_WEEK

See comments in EQP_APD_ENTITY_WEEK_HIST view.

INST, FACILITY, LOGGED_ENTITY, TOOL, EVENT, EVENT_TYPE, SEQ_WITHIN_SEC, SOURCE_TABLE

See comments in EQP_LAST_EV_OLDER_1HR_CUSTOM procedure.

FACILITY, LOGGED_ENTITY

See comments in EQP_REF_LOGGED_ENTITIES view.

FACILITY, ENTITY

This table stores the current values of the chamber health being tracked by an FDC system and is populated by a trigger with the newest value from EQP_MNT_CHAMBER_HEALTH_HIST.

FACILITY, EVENT_ID

Current information on counter-based PMs based on information from EQP_MNT_COUNTER_HIST.

INST, FACILITY, LOGGED_ENTITY, EVENT_ID

Events from FPSINPUT.EQP_MNT_FUTURE or EQP_MNT_COUNTER_CURR. Contains events that we think may note the completion of a mnt event.

FACILITY, ENTITY, INDICATOR_NAME

This table stores the current values of the maintenance indicators being tracked by an FDC system.

START_WEEK, FACILITY, TOOL, FROM_RQD_SETUP, TO_RQD_SETUP

See comments in EQP_APD_SETUP_CHG_TOOL_WEEK_HI view.

START_WEEK, FACILITY, EQP_TYPE, FROM_RQD_SETUP, TO_RQD_SETUP

See comments in EQP_APD_SETUP_CHG_WEEK_HIST view.

EQP_STATE

See comments in EQP_REF_STATE_DIAGRAM view.

FACILITY, TOOL

See comments in EQP_REF_TOOLS_MPCT_STATE view.

FACILITY, TOOL

See comments in EQP_REF_TOOLS_PLUS view.

FACILITY, TOOL, START_PLAN_DAY

See comments in EQP_APD_TOOL_E10_PD_HIST view.

FACILITY, TOOL, START_PLAN_WEEK

See comments in EQP_APD_TOOL_E10_PW_HIST view.

FACILITY, TOOL, START_SHIFT

See comments in EQP_APD_TOOL_E10_SHIFT_HIST view.

FACILITY, TOOL, START_WEEK

See comments in EQP_APD_TOOL_E10_WEEK_HIST view.

FACILITY, TOOL, EQP_STATE, START_PLAN_DAY

Summary of ETP_HIST by tool for each plan day.

FACILITY, TOOL, PROCESS_FAMILY, PROCESS_SUBFAMILY

See comments in EQP_REF_TOOL_PROCESSFAMS view.

FACILITY, TOOL, EQP_STATE, START_SHIFT

Summary of eqp_state data in ETP_HIST by tool for each shift.

FACILITY, TOOL, EQP_STATE, START_WEEK

See comments in EQP_APD_TOOL_WEEK_HIST view.

FACILITY, EQP_TYPE, CH_TYPE_CNT_INPUT, CH_TYPE_CNT_THP

See comments in EQP_REF_TYPE_CTC_MULTIPLIERS view.

See comments in EQP_REF_TYPE_MPU_MULTIPLIERS view.

START_PLAN_DAY, FACILITY, TOOL, ENTITY, PRD

See comments in EQP_APD_UNITS_PLAN_DAY_HIST view.

START_SHIFT, FACILITY, TOOL, ENTITY, PRD

See comments in EQP_APD_UNITS_SHIFT_HIST view.

FACILITY, TOOL, ENTITY, START_PLAN_DAY

See comments in ETP_APD_ENTITY_E10_PD_HIST view.

FACILITY, TOOL, ENTITY, START_PLAN_WEEK

See comments in ETP_APD_ENTITY_E10_PW_HIST view.

FACILITY, TOOL, ENTITY, START_SHIFT

See comments in ETP_APD_ENTITY_E10_SHIFT_HIST view.

FACILITY, TOOL, ENTITY, START_WEEK

See comments in ETP_APD_ENTITY_E10_WEEK_HIST view.

FACILITY, ENTITY, ETP_STATE, START_SHIFT

Summary of EPT_HIST by ENTITY for each shift.

FACILITY, ENTITY, ETP_STATE, START_WEEK

See comments in ETP_APD_ENTITY_WEEK_HIST view.

Full state history for each entity including Enhanced Tool Performance. Built by a simple history trigger on ETP_STATUS.

FACILITY, TOOL, ENTITY, EPISODE_FROM_INST

This table is populated by a trigger when a tool changes ETP State. An episode is a period of time when a tool is not processing during which maintenance may occur. Technically the episode starts when the previous lot processed misses its cascade and the episode ends when the next non-qual lot starts processing (NEXT_BEG_PROC_INST). Also an episode can include only one E10 state (UDT, SDT, ENG, NST) so we split the period into separate episodes if there are multiple E10 states within this period. Example 1 is where the tool goes down to SDT and does a daily qual and then comes up. This is one SDT episode containing one event which is the daily qual. Example 2 is where the tool goes down to SDT and does a daily qual and a weekly PM and then comes up. This is one SDT episode containing two events which are the daily qual and the weekly PM. Example 3 is where the tool goes down to UDT and switches to SDT to do the weekly PM and then it comes up. This is two episodes with the end of the first UDT episode and the start of the second SDT episode at the time the tool is logged to SDT. Note that it might go from UDT directly to SDT or it might go from UDT to SBY and then to SDT but this does not matter.

ETP_STATE

See comments in ETP_REF_STATE_DIAGRAM view.

All information about the current state of each entity including Enhanced Tool Performance.

FACILITY, TOOL, START_PLAN_DAY

See comments in ETP_APD_TOOL_E10_PD_HIST view.

FACILITY, TOOL, START_PLAN_WEEK

See comments in ETP_APD_TOOL_E10_PW_HIST view.

FACILITY, TOOL, START_SHIFT

See comments in ETP_APD_TOOL_E10_SHIFT_HIST view.

FACILITY, TOOL, START_WEEK

See comments in ETP_APD_TOOL_E10_WEEK_HIST view.

FACILITY, TOOL, ETP_STATE, START_PLAN_DAY

Summary of ETP_HIST by tool for each plan day.

FACILITY, TOOL, ETP_STATE, START_SHIFT

Summary of EPT_HIST by tool for each shift.

FACILITY, TOOL, ETP_STATE, START_WEEK

See comments in ETP_APD_TOOL_WEEK_HIST view.

See comments in GEN_REF_DATA_DATE view.

FROM_INST, TO_INST

See comments in GEN_REF_UPCOMING_SHUTDOWNS view.

CHG_TIMESTAMP, CARRIER

Log of all non-location changes to MHS_CARRIERS populated by simple history trigger.

CARRIER, FACILITY

Future schedule information for the carrier

CHG_TIMESTAMP, CARRIER

Log of all location-related changes to MHS_CARRIERS populated by simple history trigger. You can query the state of the table at any time in the past by using t >= chg_timestamp and t < next_chg_timestamp.

LOCATION

See comments in MHS_REF_LOCATIONS view.

This table contains the lots that are currently tagged. Once they finish metrology and pass the to_mso_process they will be removed.

This table contains the current sample rate and relevant counter and counter info for each rule and its configured parameters.

FACILITY, LOT, TO_MSO_PROCESS

Table that contains the sampling decisions by lot and the to MSO process. A decision of 1 is a means to take the lot. A decision of 0 means to skip the lot.

PARAMETER_NAME

This table contains a predifined list of parameters that the MES will accept when the MSO system makes a decision to skip or measure at metrology.

RULE_CONDITION, RULE_TYPE

This is an unusual FPSBASE table in that all sites will have the same 100 rows with percent values from 1 to 100. Furthermore all sites will have the same values for the three base columns. This makes it similar to an FPSADMIN table where the data is the same for all sites. But the values of the three default columns are set manually and can be different at each site. The default values are what is actually used in the MSO decision calculation but the common base values exist to help calculate the default values.

TRANSACTION_ID

Table contains the change history for all tag condition rule exclusions that have been created or modified in MSO_DISASSOCIATED_TAG_COND.

FACILITY, SMP_RULE_ID, TAG_CONDITION_ID

This table allows for global level tag conditions to be disassociated from specific rules. This gives users the ability to override any global tag condition setting if desired for a particular rule.

INST, FACILITY, LOGGED_ENTITY, EVENT, DATA_SOURCE

History of all events logged to tools or entities related to MSO rules. Events can be sent from FPSINPUT tables EQP_EVENT_HIST, MSO_EQP_EVENT_HIST, EQP_MNT_COUNTER_HIST, or EQP_MNT_FUTURE.

FACILITY, SMP_RULE_ID, TOOL, CHAMBER

This table contains the number of lots tagged for measure after a given event. This is populated only while the counter is less than the sampling condition value specified for the event rule.

FACILITY, FILTER

All Metrology Sampling Optimizer filters to limit what is in scope for each rule

TRANSACTION_ID

Table contains the change history for all mso filters that have been created or modified in MSO_FILTERS.

All Metrology Sampling Optimizer filters to limit what is in scope for each rule

TRANSACTION_ID

Table contains the change history for all mso filters parameter values that have been created or modified in MSO_FILTER_PARM_VALUES.

FACILITY, LOT, TO_MSO_PROCESS_NA

This tag conditions table allows users to place lot specific tag conditions. This allows for setting if a lot can be tagged or not to a given metrology step.

TRANSACTION_ID

Table contains the change history for all sampling rule and tag condition associations that have been created or modified in MSO_LOT_TAG_CONDITIONS.

Detailed history of all MES Interaction. This stores the parameter names and values that will be sent, along with the exact mes interaction procedure call string.

FROM_MSO_INST, FACILITY, LOT, FROM_MSO_PROCESS, SMP_RULE_ID, CHAMBER

All the history for any active rule that had a lot that ran at the to or from MSO process with the corresponding rule parameters. This table will be used to calculate the lots, wafer to detect and time to detect metrics.

FACILITY, PROCESS_LINK_GROUP

List of all process link groups created by the MSOUI.

FACILITY, PROCESS_SUB_GROUP

List of all process link subs created by the ETL.

FACILITY, PROCESS_LINK_GROUP, FROM_MSO_PROCESS_NA, TO_MSO_PROCESS_NA

List of all process links that are created through the MSOUI and grouped by the process link group.

TRANSACTION_ID

Table contains the change history for all mso filters parameter values that have been created or modified in MSO_PROCESS_LINK_GROUPS.

TRANSACTION_ID

Table contains the change history for all mso filters parameter values that have been created or modified in MSO_PROC_LINK_GROUP_LINKS.

List of all additional MSO processes in the process sub group populated through MSOUI. Group can be assigned to a rule through the MSOUI.

TRANSACTION_ID

Table contains the change history for all mso filters parameter values that have been created or modified in MSO_PROCESS_SUB_GROUPS.

TRANSACTION_ID

Table contains the change history for all mso filters parameter values that have been created or modified in MSO_PROC_SUB_GROUP_LINKS.

FACILITY, LOT, MSO_PROCESS, INST

Table contains information about the measurement step for a given lot and its corresponding MSO process. This table will be used to get the scan grade and also in some cases validate if a scan actually did occur regardless of a event being logged in WIP_EVENT_HIST.

FROM_MSO_INST, FACILITY, SMP_RULE_ID, FROM_MSO_TOOL, CHAMBER, LOT

Gives the maximum wafers at risk and lots at risk between each measurement to be used for calculations in the Dashboard.

All Metrology Sampling Optimizer sampling rules.

TRANSACTION_ID

Table contains the change history for all sampling rules that have been created or modified in MSO_RULES.

FACILITY, RULE_CLASS

This table has list of rule class for the Metrology Sampling Optimizer rules. Rule groups are assigned to a rule class. The rule class is generally the metrology type.

UPDATED_INST, FACILITY, LOT, FROM_MSO_PROCESS_INST, FROM_ROUTE, FROM_PROCESS, FROM_STEP, FROM_MSO_TOOL, SMP_RULE_ID, TO_MSO_PROCESS, CHAMBER

This table contains the historical sampling decisions made by the Sampling Optimazation System. It retains one counter for each configured parameter and the the last n records for a rule defined in the mso_rules.

FACILITY, SMP_RULE_ID, PARENT_TO_MSO_PROCESS, CHILD_TO_MSO_PROCESS

List of all linked to_mso_processes. The child_to_mso_process will take the same decision as the parent_to_mso_process for all links.

TRANSACTION_ID

Table contains the change history for all decision linkages that have been created or modified in MSO_RULE_DECISION_LINKS.

FACILITY, SMP_RULE_ID, EVENT

This table lists the equipment events that are mapped to a sample rule when the EVENT rule type is configured.

TRANSACTION_ID

Table contains the change history for all events linked to a sampling rule that have been created or modified in MSO_RULE_EQP_EVENTS.

This table has list of rule groups for the Metrology Sampling Optimizer rules. Each rule must be assigned to a rule group. The rule group is used for display on the dashboard only. This allows users to group similar rules.

TRANSACTION_ID

Table contains the change history for all sampling rule groups that have been created or modified in MSO_RULE_GROUPS.

TRANSACTION_ID

Table contains the change history for all mso filters parameter values that have been created or modified in MSO_RULE_PROCESS_LINK_GROUPS.

TRANSACTION_ID

Table contains the change history for all mso filters parameter values that have been created or modified in MSO_RULE_PROCESS_SUB_GROUPS.

FACILITY, SMP_RULE_ID, FROM_MSO_PROCESS_NA, TO_MSO_PROCESS_NA

List of all additional MSO processes that will clear a given MSO rule.

FACILITY, SMP_RULE_ID, PROCESS_LINK_GROUP

This table is populated by the MSOUI and links smp_rule_ids to the mso_process_link_groups, which contains groups of process links created by the MSOUI.

List of all additional MSO processes that will clear a given MSO rule. Lots will never be tagged for these processes for a given rule but are allowed to clear it.

FACILITY, SMP_RULE_ID, PROCESS_SUB_GROUP

This table is populated by the MSOUI and links smp_rule_ids to the mso_process_sub_groups, which contains groups of process subs created by the msoui.

FACILITY, SMP_RULE_ID, PROCESS_LINK_GROUP

This table is populated by the MSOUI and links smp_rule_ids to the mso_extl_process_link_groups, which contains groups of process links created by the ETL.

TRANSACTION_ID

Table contains the change history for all process linkages that have been created or modified in MSO_RULE_PROCESS_LINKS.

TRANSACTION_ID

Table contains the change history for all process subs that have been created or modified in MSO_RULE_PROCESS_SUBS.

FACILITY, SMP_RULE_ID, PROCESS_SUB_GROUP

This table is populated by the MSOUI and links smp_rule_ids to the mso_extl_process_sub_groups, which contains groups of process subs created by the etl.

TRANSACTION_ID

Table contains the change history for all mso filters parameter values that have been created or modified in MSO_RULE_PROC_LINK_GROUPS_EXTL.

TRANSACTION_ID

Table contains the change history for all mso filters parameter values that have been created or modified in MSO_RULE_PROC_SUB_GROUPS_EXTL.

FACILITY, SMP_RULE_ID_NA, TAG_CONDITION_ID, TO_MSO_PROCESS_NA

Assignment of MSO tag conditions for each sampling rule.

TRANSACTION_ID

Table contains the change history for all sampling rule and tag condition associations that have been created or modified in MSO_RULE_TAG_CONDITIONS.

Metrology Sampling Optimizer waivers by rule and tool. This waiver table allows engineers to set temporary waiver to skip limits. Once the waivers expire they are delete from this table by the MSO_MANAGER.

TRANSACTION_ID

Table contains the change history for all sampling rule tool waivers that have been created or modified in MSO_RULE_TOOL_SKIP_WAIVERS.

Table contains records for lots that need the MSO decision to be sent to the MES broker. This table should only contain records while the MSO_MANAGER is evaluating a main process step. The column values are used for inputs into the FPSINPUT.SEND_MSO_ACTION_TO_MES_EXTL procedure.

All Metrology Sampling Optimizer tag conditions which define which lots are allowed to be tagged to clear a sampling rule. One or more tag conditions can be assigned to each sampling rule.

TRANSACTION_ID

Table contains the change history for all tag conditions that have been created or modified in MSO_TAG_CONDITIONS.

This table has the user defined context of the tag condition. A single tag condition can have multiple conditions defined. Each row for a single tag_condition_id, one case needs to match. For a single row all the defined column values must be true for that context row to be true, where NA means we ignore that column value.

TRANSACTION_ID

Table contains the change history for all tag condition contexts that have been created or modified in MSO_TAG_CONDITION_CONTEXT.

INSERTED_TIME

This table stores the clob output of a new package created to be tested.

FACILITY, SMP_RULE_ID, INST, LOT, ROUTE, FROM_STEP, MSO_RULE_COUNTER_TYPE

History table for actions triggered by MSO to the MES. Typically thes are triggers to shut down tools if certain rule counters have exceed the defined limits.

FROM_MSO_INST, FACILITY, SMP_RULE_ID, FROM_MSO_TOOL, CHAMBER, LOT

Gives the maximum time to detect between each measurement to be used for calculations in the Dashboard.

Table used for running old wip event hist data through the MSO manager to simulate events being logged. Used for re-populating data and testing.

FACILITY, PRD, PLANPRD, ROUTE

See comments in RTG_REF_ACTIVE_PRD_ROUTES_BASE view.

FACILITY, LOT, ROUTE, STEP, THREAD_TOOL

This table contains the list of lots that have run through a threading start step and contains the future linked steps with the corresponding thread tool and non thread tool rank. This table should only have rows for lots that have not completed the linked steps.

SOURCE_FACILITY, SOURCE_PRD, SOURCE_BANK, DEST_FACILITY, DEST_PRD, DEST_BANK

See comments in RTG_REF_ALL_PRD_SPLIT_30DAY view.

FACILITY, COMMON_STEP

See comments in RTG_REF_COMMON_STEPS_PLUS view.

DURABLE, FACILITY

Future schedule information for the durable

LOT, STEP, ROUTE, FACILITY, TOOL

See comments in RTG_REF_MISSING_LOT_TOOL_ASGN view.

START_FACILITY, START_PRD, CURRENT_FACILITY, CURRENT_PRD, DEST_FACILITY, DEST_PRD

See comments in RTG_REF_PATH_PRDS view.

FACILITY, PRD

See comments in RTG_REF_PRDS_PLUS view.

FACILITY, PRD, BANK, FUTURE_FACILITY, FUTURE_PRD, FUTURE_BANK

See comments in RTG_REF_PRD_FACILITY_FLUSH view.

SOURCE_FACILITY, SOURCE_PRD, FACILITY, PRD, FLUSH_PATH

See comments in RTG_REF_PRD_FACILITY_REVERSE view.

See comments in RTG_REF_PRD_FAC_NEXT_W_BANK view.

FACILITY, PRD, ROUTE, STEP, PROCESS, EQP_TYPE

See comments in RTG_REF_PRD_STEP_EQPTYPES view.

FACILITY, PROCESS_FAMILY

See comments in RTG_REF_PROCESS_FAMILIES_PLUS view.

FACILITY, PROCESS, EST_MACHINE_RECIPE, EQP_TYPE

See comments in RTG_REF_PROCESS_RCP_EQPTYPES view.

FACILITY, PROCESS, EST_MACHINE_RECIPE, TOOL

See comments in RTG_REF_PROCESS_RCP_TOOL_7D view.

See comments in RTG_REF_PROCESS_RCP_TOOL_BASE view.

FACILITY, PROCESS, EST_MACHINE_RECIPE, TOOL

See comments in RTG_REF_PROCESS_RCP_T_UNIONS view.

FACILITY, PROCESS_FAMILY

See comments in RTG_REF_PROCFAM_FAST_FROM_RRSP view.

LOT, TIMER_ID

See comments in RTG_REF_QUEUE_MULTI_AREA_BASE view.

LOT, FACILITY, ROUTE, START_STEP

See comments in RTG_REF_QUEUE_MULTI_AREA_PATH view.

LOT

See comments in RTG_REF_QUEUE_MULTI_AREA_PRTY view.

LOT, TIMER_ID, FACILITY, ROUTE, STEP

See comments in RTG_REF_QUEUE_MULTI_AREA_STEPS view.

LOT, FACILITY, ROUTE, START_STEP, RN_FOR_LOT_ROUTE_STEP

See comments in RTG_REF_QUEUE_MULTI_AREA_WIP view.

LOT, TIMER_ID

Table stores the time when each lot started a queue sequence for faster querying. Records are inserted and deleted by a trigger on WIP_STEP_HIST. This table is ignored if FPSINPUT.RTG_QUEUE_TIMERS_LOT_MANUAL is populated.

LOT, TIMER_SORT_BY_EXP_WITHIN_LOT

See comments in RTG_REF_QUEUE_TIMERS_LOT_CURR view.

History table recording information about queue timers as they are deleted from RTG_QUEUE_TIMERS_LOT_AUTO, presumably because the timer either reached the end event or it was reset when the lot entered rework.

FACILITY, ROUTE, STEP

See comments in RTG_REF_QUEUE_TIMERS_RT_STEP view.

FACILITY, TIMER_ID, ROUTE, STEP

See comments in RTG_REF_QUEUE_TIMER_STEP_PCT view.

RANK

See comments in RTG_REF_RANKS view.

FACILITY, ROUTE

See comments in RTG_REF_ROUTES_PLUS view.

FACILITY, ROUTE, STEP

This table stores inactive steps and its records are combined with those in RTG_ROUTE_STEPS to make up RTG_ROUTE_STEPS_PLUS. An inactive step is no longer is on the active route definition so new lots will not visit an inactive step. But existing lots may be at the step or have visited the step in the last seven days so we want to keep the information about this step in our DWH.

FACILITY, ROUTE, STEP

See comments in RTG_REF_ROUTE_STEPS_PLUS view.

FACILITY, ROUTE, STEP

Temporary table to store records of RTG_ROUTE_STEPS_PLUS_LOOP during ADM_TABLE_LOOP load.

FACILITY, ROUTE, STEP

See comments in RTG_REF_RS_MODE_BY_BUILDING view.

See comments in RTG_REF_START_PRDS view.

FACILITY, ROUTE, LOT

Table contains list of lots that have are in the tool balance window for a given route and step or common step.

FACILITY, ROUTE, LOT

This table contains lots that within a segment of the flow that has limits to the amount of WIP. This prevents future loading to the start steps of that segment.

FACILITY, ROUTE, STEP, TOOL, LOT

See comments in RTG_REF_TOOL_ASGN_RATIOS view.

See comments in THP_REF_EQPTYPE_AUTO view.

FACILITY, EQP_TYPE, PROCESS, EST_MACHINE_RECIPE, CH_TYPE_CNT, IS_PARALLEL_OTHER_CH, DURABLE_THP_VARIATION

See comments in THP_REF_EQPTYPE_SUMMARY view.

See comments in THP_APD_EQPTYPE_WEEK_HIST view.

See comments in THP_REF_TOOL_AUTO view.

See comments in THP_APD_TOOL_WEEK_HIST view.

FACILITY, PROCESS, INPUTS_TO_GET_THP_LOGIC

See comments in THP_REF_VALUES_LOOKUP view.

FACILITY, SCHED_GROUP, LOT, ROUTE, STEP, UPDATED_INST

This table records schedule conformance information captured by the WIP_LOTS_REALTIME_BEF_CONF trigger when tool is populated..

FACILITY, JOB_ID

Store current and max information about each active job which is updated by WIP_EVENT_HIST_INSERT_BEF trigger. Current columns qty_in_job and carriers_in_job are used by WIP_LOTS_PLUS while max_qty_in_job and max_carriers_in_job are used to populate WIP_STEP_HIST. This is necessary because the current values count up and down. A simple example of a two lot batch will have qty_in_job of 25 after first lot is dispatched, 50 after second lot is dispatched, stay at 50 while processing, 25 after first lot moves out, and then record is deleted from this table after second lot moves out.

FACILITY, LOT, TOOL

See comments in WIP_REF_CURR_LOTS_TOOLS view.

INST, FACILITY, PLANPRD, DEMAND_INST

See comments in WIP_APD_DEMAND_HIST view.

Base table for all WIP, activity, goal, and cycle time calculations. It is likely that the last few columns used for goals will be populated separately from the rest of the table using more complex logic. WAVG is the weighted avg by wafer so if a 6 wafer lot waits 5 hrs and a 2 wafer lot waits 3 hours then our avg cycle time is 4.5 hours ((6*5 + 2*3)/6+2). WIP status at the end of each shift includes how long it has been waiting at the step. Only time during the shift is calculated so if a lot entered the step before the start of the shift we only count from the start. Definitions here are important. Complete is when the lot exits the step after processing on a tool. Skip is when the lot automatically skips the step immediately upon entry. Note that we do count the step_sec although it will be near 0. Adjust is when the lot exits the step without processing after it has been waiting at the step for a while. All three of these are types of activities so activities = completes + skips + adjusts. Moves is the metric which we use to directly compare to goals and we only want to count one move per step per shift. To do this, a repeat is any activity which is not the first activity for the step on the shift. Now we can calculate moves = activities - repeats. Please note that the repeat does not have to be the same type of activity as the move. We could skip the step on the first time for the shift and then complete the second time and then adjust the third time. Then we would have 1 COMP, 1 SKIP, 1 ADJUST, 3 ACTV, 2 REPEAT, and 1 MOVE. Arrival is any arrival to the step regardless whether it is the first time for the shift or not. We divide arrivals into before goal planner cutoff (GPC) or after GPC since we do not want to penalize if lots arrived after GPC. ENDWIP should be equal to STARTWIP + ARRV_BEF + ARRV_AFT - COMP - SKIP - ADJUST. Using our above example, let say the lot is waiting at the start of the shift, returns the first two times before GPC, and then returns again after GPC and does not exit the step. Then we would have 1 STARTWIP, 2 ARRV_BEF, 1 ARRV_AFT, 1 COMP, 1 SKIP, 1 ADJUST, 3 ACTV, 2 REPEAT, 1 MOVE, and 1 ENDWIP. Sure enough 1+2+1-1-1-1=1.

Events at the current step of the lot. Trigger on WIP_EVENT_HIST inserts nonmove events and then deletes all and inserts an enter event for move events. Events in this table are used to build WIP_STEP_HIST and to calculate STEP_ENT_INST.

LOT, FACILITY, PRD, BANK

See comments in WIP_REF_FLUSH view.

LOT, FACILITY, PRD, BANK

See comments in WIP_REF_FLUSH_ADD_SHUTD view.

LOT, FACILITY, PRD, BANK

See comments in WIP_REF_FLUSH_BASE view.

LOT

See comments in WIP_REF_FLUSH_CURR_FAC view.

FACILITY, PRD, PLANPRD, ROUTE, STEP, LOT_TYPE, PLAN_PRIORITY, IS_NONSTD

See comments in WIP_GOALS_CURR_PLAN_DAY_CUSTOM procedure.

FACILITY, PRD, PLANPRD, ROUTE, STEP, LOT_TYPE, PLAN_PRIORITY, IS_NONSTD

See comments in WIP_REF_GOALS_CURR_SHIFT view.

START_SHIFT, FACILITY, PRD, PLANPRD, ROUTE, STEP, LOT_TYPE, PLAN_PRIORITY, IS_NONSTD

See comments in WIP_APD_GOALS_PER_SHIFT_HIST view.

LOT, ROUTE, STEP

Goal Planner information about each lot for current and future route-steps. Shift is the shift in which the data was loaded but lot schedules can also include future shifts as indicated by the earliest and goal shift columns. This table only has current and futute shift information whereas the hist version includes data loaded from prior shifts.

START_SHIFT, LOT, ROUTE, STEP

Goal Planner information about each lot for current and future route-steps. Shift is the shift in which the data was loaded but lot schedules can also include future shifts as indicated by the earliest and goal shift columns.

FACILITY, HOLD_TYPE, PROCESS_FAMILY, LOT_GROUP

See comments in WIP_REF_HOLD_ESTIMATES view.

LOT, HOLD_INST, HOLD_SEQ_WITHIN_SEC

WIP_HOLD_HIST lists each lot on hold with the hold_inst, release_inst, and full information for each record. Queries to this table are fast even when querying all holds in a certain time range. A record is inserted into the table when a lot goes on hold. Upon insert, the record has a value of null for release_inst. When the lot is released, the record is updated with the release_inst. If the lot changes hold_type or step or qty while on hold then we update the release_inst to close out the old record and then insert a new record.

LOT, INST, LOT_SEQ_WITHIN_SEC, STEP

A complete record of jumps written by the WIP_LOTS_REALTIME_UPDATE_BEF trigger when lot moves to a future step on the route which is not the next step. For example, when a lot moves from step 3 to 6 then we log jumps for step 4 and 5 to record that the lot skipped these steps. These jumps are critical for calculating sampling percentage but are not used for much else.

LOT

See comments in WIP_REF_LOTS_COLS_NO_DD_PRTN view.

LOT

See comments in WIP_REF_LOTS_COLS_W_DD_PRTN view.

Our main WIP status table updated by every event logged to WIP_EVENT_HIST via the WIP_EVENT_HIST_INSERT_AFT trigger and then the WIP_LOTS_REALTIME_UPDATE_BEF trigger.

A complete record of all events and all ECT updates for every lot populated by a simple history section inside the huge trigger which is called on every update to WIP_LOTS_REALTIME. This is the complete lot history, however, we more frequently use WIP_STEP_HIST or ECT_HIST in our applications than this huge complete table.

FACILITY, PERIOD_TYPE, HOUR_NUM

See comments in WIP_REF_PACE_ADJ_RATIO view.

Base table for all WIP, activity, goal, and cycle time calculations for each plan day. This table is almost exactly the same as WIP_END_SHIFT_HIST but without the goal columns.

FACILITY, PROCESS_FAMILY, BANK

See comments in WIP_REF_PROCFAM_BANK_ENDWIP view.

Stores all recent reservation history. This table should be purged frequently.

LOCATION_INST, LOT, CARRIER, STAGE_TOOL

When a lot is placed on a staging location, records the scheduled tool at the time of relocation. Staging location status is defined by MHS_STATION_ASSIGNMENTS. If one location is a staging location for multiple tools, one row per each tool will be inserted

INST, LOT_OR_ALT_ID

See comments in WIP_APD_STARTS_HIST view.

Future steps for all lots including time to arrival and the goal on when to complete that step. See comment in UPDATE_WIP_STEP_FUTURE procedure for info on the logic. This also includes the current step since we need the goal for the current step. Please note facility is part of the primary key because the future step could be in a different facility than where the lot is currently.

Future schedule information for lots, tools, and durables

LOT, TOOL, FACILITY, STEP, ROUTE, DURABLE_FAMILY

See comments in WIP_REF_STEP_FUT_DURABLE_ASGN view.

Summary of every completed step used as the base for all cycle time, throughput, and activity calculations. This table is populated by a trigger on WIP_EVENT_HIST. This table has same columns as WIP_LOTS plus additional information about the move.

LOT, INST, LOT_SEQ_WITHIN_SEC

This is an archive of WIP_STEP_HIST older than the purge_days of WIP_STEP_HIST. Records from WIP_STEP_HIST are inserted here as part of special logic in ADM_PURGE_TABLE_AUTO. Please note that records for all active lots remain in WIP_STEP_HIST even when older than the purge_days and those records will be in both tables until the lot finishes and these records will be deleted from WIP_STEP_HIST.

INST, LOT, WAFER, LOT_SEQ_WITHIN_SEC

Wafer events only at the current step of the lot. Trigger on WIP_EVENT_HIST inserts each wafer event and then deletes all of them after move events. Events in this table are used to build WIP_STEP_HIST.