Data Dictionary
>
FPSAPP Views
> FPSAPP.WIP_WAFER_HIST_LOOP
View FPSAPP.DASH_P_CHAMBER_ALARM_HIST
This view will allow dashboard to fetch the chamber alarm history for tools and chambers.
|
Column |
Comment |
|---|---|
|
FACILITY |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES) |
|
ENTITY |
The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY) |
|
ANALYSIS_NAME |
The name of the analysis being sent. (* inherited from FPSINPUT.EQP_MNT_CHAMBER_ALARM_HIST) |
|
ANALYSIS_DETAIL |
The detail of the analysis being sent. (* inherited from FPSINPUT.EQP_MNT_CHAMBER_ALARM_HIST) |
|
ALARM_TEXT |
The actual alarm text for the fault. (* inherited from FPSINPUT.EQP_MNT_CHAMBER_ALARM_HIST) |
|
INST |
Time when the event occurred. (* inherited from FPSINPUT.WIP_EVENT_HIST) |
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SOURCE_SYSTEM |