FPSINPUT.SCH_W_H_S_LOTS

CARRIER

VARCHAR2(32)

RFID of the cassette or FOUP the lot is currently in. (* from FPSINPUT.MHS_CARRIERS)

COULD_CHANGE_SETUP

CHAR(1)

CREATE_INST

DATE

CRITICAL_RATIO

NUMBER(5,3)

The critical ratio (days until due / days of CT left) for the lot

CURR_DISPATCH_INST

DATE

CURR_LOCATION

VARCHAR2(32)

store the curr location of the lot

CURR_PRIORITY

VARCHAR2(7)

The priority at the current step. As the lot moves along the route after LAST_STEP_CURR_PRTY it will revert to PLAN_PRIORITY. For example, timelink or sendahead priority is only temporary. (* from FPSINPUT.WIP_LOTS_STATIC)

CURR_PRIORITY_DISPLAY

VARCHAR2(20)

N

CURR_PROCESS

VARCHAR2(50)

CURR_PROCESS_STATE_DETAILS

VARCHAR2(600)

CURR_PROC_BEG_INST

DATE

CURR_PROC_END_INST

DATE

CURR_RECIPE

VARCHAR2(100)

The current/last used recipe for the scheduler, incorporating the ignore capability from EQP_PROCESS_CHG_TO_IGNORE (* from FPSBASE.ETP_STATUS)

CURR_SETUP

VARCHAR2(100)

The current setup of the entity. This can be set by a lot processing event from WIP_EVENT_HIST or by an event on the entity from EQP_EVENT_HIST. For example if an Implant tool processes a Boron lot then the curr_setup will be Boron. Or if an event is logged to the tool that says the setup changed to Boron then the curr_setup will be Boron. Please note that the curr_setup value populated in EQP_EVENT_HIST must match exactly with the rqd_setup value in RTG_TOOL_ASSIGNMENTS in order for the setup penalty logic to apply correctly. (* from FPSINPUT.EQP_EVENT_HIST)

CURR_STATION

VARCHAR2(32)

See column comment on STATION in FPSINPUT.MHS_STATION_ALTERNATES for more information. (* from FPSINPUT.MHS_DELIVERY_NEXT)

CURR_TOOL

VARCHAR2(16)

CUSTOM_TARGET

NUMBER

DISPATCH_ENABLED

CHAR(1)

DRUM_CRITERIA

VARCHAR2(513)

This is the level of counting that will be multiplied by within the scheduler to dynamically score the drum rate as lots are placed on a schedule run (* from FPSAPP.GP_P_PRIORITY_DRUM)

DRUM_MV_FACTOR

NUMBER

This is the per move factor in which the drum rate will adjust for use in the scheduler to dynamically score the drum rate as lots are placed on a schedule run (* from FPSAPP.GP_P_PRIORITY_DRUM)

DRUM_RATE

NUMBER

EARLIEST_STEP_BEG_INST

DATE

EST_CURR_PROC_END_INST

DATE

EST_SMP_PCT

NUMBER

Smp_pct tells you what percentage of the lots complete on a tool. Some sites skip steps by jumping over them so we see the lot move from step 3 to step 5 and we only know that it jumped step 4 because step 4 is on the route between 3 and 5. Other sites skip steps by moving lots into them and then moving them out a second later so we see a move from 3 to 4 at 11:11:11 and a move from 4 to 5 at 11:11:12. We do not care how it is done but just that the lot did not process at step 4 -- and to be more specific that no tool capacity is required to process this lot at step 4 and no cycle time is accumulated at step 4. (* from FPSBASE.WIP_GOAL_LOT_SHIFT)

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

IS_CURR

CHAR(1)

Boolean flag where Y indicates this row is for the current main route or product. Same as flush_seq_num = 1. (* from FPSBASE.WIP_FLUSH)

IS_HIGHLIGHTED_PRTY

CHAR(1)

This flag indicates if this priority should be highlighted on the dashboard. When we sort all priorities by priority_sort all Y should be first followed by all N. (* from FPSINPUT.WIP_PRIORITIES)

IS_HOLD

CHAR(1)

This field indicates the lot is on hold after the event is logged. In other words, this will always be Y if is_hold_start is Y and always N if is_hold_end is Y. (* from FPSINPUT.WIP_EVENT_HIST)

IS_SCHED

CHAR(1)

This flag indicates that lots in this group should be scheduled. This flag additionally causes TW groups to be included in WIP_STEP_FUTURE which they are normally not. (* from FPSINPUT.WIP_LOT_GROUPS)

IS_SCHED_BLOCKED

CHAR(1)

to indicate if there is any preceding steps UNSCHED

IS_STAGING_STEP

CHAR(1)

We expect large amounts of WIP and long cycle times at staging steps. We still calculate cycle time like any other step but the important difference is that lots currently at a staging step are not counted as normal coming lots to future steps. Instead we show them in a special column labeled From Staging. (* from FPSINPUT.RTG_ROUTE_STEPS)

IS_START

CHAR(1)

Boolean flag where Y indicates the lot is an upcoming start and not an existing lot. (* from FPSBASE.WIP_FLUSH)

IS_WIP_STOPPED

CHAR(1)

LATE_DAYS_LOGISTIC_SLOPE

NUMBER(4,2)

The steepness of the S-curve function for lot days late. Larger numbers mean steeper curves - i.e. closer to a step function change. (* from FPSAPP.SCH_C_GROUP_LOT_PRIORITIES)

LINE_BALANCE_RATIO

NUMBER

LOT

VARCHAR2(32)

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

LOT_DAYS_LATE

NUMBER

LOT_DUE_INST

DATE

the due date of the lot

LOT_GROUP

VARCHAR2(8)

Lot_group is a grouping of lot_family and is the highest grouping in the lot type hierarchy. There should be only a few values for lot_group, i.e. Prod, Dev, TW. We group WIP and moves by lot_group on the dashboard and we group cycle time calculations by lot_group so this is an important field. (* from FPSINPUT.WIP_LOT_GROUPS)

LOT_RANK

NUMBER

LOT_TYPE

VARCHAR2(24)

This Column stores the lot type.

MAIN_ROUTE_GROUP

VARCHAR2(36)

Route group of main route. Often referred to as technology. (* from FPSBASE.WIP_FLUSH)

MIN_STEP_SEC

NUMBER(7)

the minimum step cycle time

MIN_STEP_SEC_TO_EOL

NUMBER(11)

Total minimum step cycle time to the end of line

NUM_STEPS_AWAY

NUMBER(4)

Number of steps away not including steps which we know will be skipped nor those which we estimate will be skipped at least x pct of the time. This x value is configurable in GEN_FACILITIES using the smp_pct_for_num_steps_away column. (* from FPSBASE.WIP_STEP_FUTURE)

NWSCH_BACKLOAD_INST

DATE

This Column indicates that the lot has been backloaded (Scheduled to Track In Early), This column should only have a value when the track in

NWSCH_BATCH_CRITERIA

VARCHAR2(140)

NWSCH_CARRIER

VARCHAR2(64)

NWSCH_CH_TO_USE

VARCHAR2(24)

NWSCH_COMMENT

VARCHAR2(4000)

NWSCH_DISP_INST

DATE

NWSCH_DURABLE

VARCHAR2(64)

NWSCH_EARLY_START

DATE

This Column stores the estimated earliest sched start for a lot. To be used for NextMove or dispatching

NWSCH_END

DATE

NWSCH_EXTL_MODEL_ID

VARCHAR2(128)

NWSCH_EXTL_MODEL_STATE

VARCHAR2(128)

NWSCH_FIND_SCHED_FOR_LOT_COUNT

NUMBER(7)

NWSCH_IS_EXCLUSIVE_CHAMBER

CHAR(1)

NWSCH_IS_RESERVED

CHAR(1)

NWSCH_JOB_ID

VARCHAR2(64)

NWSCH_JOB_SEQ

VARCHAR2(64)

The sequence of sched job on the lot step level

NWSCH_LOT_TRANSIT_SEC

NUMBER(6)

NWSCH_MATCHED_PATTERN

VARCHAR2(2000)

This Column stores the pattern that was matched by placing this lot on the schedule

NWSCH_MAX_HIST_PATTERN

VARCHAR2(2000)

This Column stores the total history required to check on the tool. The scheduler calculation only looks back as far as the longest allowed pattern configured

NWSCH_MIN_HIST_PATTERN

VARCHAR2(2000)

This Column stores the history including this lot that matched the pattern in nwsch_matched_pattern column

NWSCH_PATTERN_UNIT_TYPE

VARCHAR2(8)

This Column stores the unit type used for pattern matching. For now, value can be either LOT or JOB.

NWSCH_POD_FIRST_DISP_INST

DATE

NWSCH_POD_KIT_READY_INST

DATE

NWSCH_POD_KIT_START_INST

DATE

NWSCH_PREV_SCHED_ORDER

NUMBER(5)

NWSCH_PRE_BATCH_ID

VARCHAR2(64)

NWSCH_PROCESS_CHANGE_SEC

NUMBER(6)

NWSCH_QUEUE_START_DELAY_INST

DATE

NWSCH_RECIPE

VARCHAR2(100)

NWSCH_RQD_PORT_GROUP

VARCHAR2(12)

NWSCH_SCORE

NUMBER(20,4)

NWSCH_SCORE_DETAILS

VARCHAR2(4000)

NWSCH_SETUP

VARCHAR2(64)

NWSCH_SORT_ON_TOOL

NUMBER(4)

NWSCH_START

DATE

NWSCH_STEP_BEG_INST

DATE

NWSCH_TOOL

VARCHAR2(16)

NWSCH_UPDATED_INST

DATE

NWSCH_ZONE_TO_USE

VARCHAR2(1)

The assigned tool zone for this lot

OPERATION

VARCHAR2(50)

Operation for each step

OPERATION_ENT_INST

DATE

Enter time for this operation

ORIG_LOT_DUE_INST

DATE

the original due date of the lot

PRD

VARCHAR2(64)

N

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PRDS)

PROCESS

VARCHAR2(50)

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

PROCESS_GROUP

VARCHAR2(36)

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* from FPSINPUT.RTG_PROCESS_GROUPS)

PRODUCT_SCORE

NUMBER(2)

Scheduler Evaluation slider value for product priority slider (* from FPSINPUT.RTG_PRDS)

QTY

NUMBER(6)

Quantity of units in the lot according the qty_unit defined for the facility. It is required for all lots in each facility to have their qty defined in the same units therefore the change in the unit is critical to defining the facility. For example, a pretest facility might have a sort step in the middle where we learn the qty of die. Prior to this step we know only the wafer qty but after this step we know both wafer and die. Since wafer is the only qty we know throughput the flow then wafer must be defined as the qty unit for this facility. Die can then be populated as sec_qty when it is known. Similarly the wafer saw facility might have a step in the middle where we cut the wafers into die. After this step we no longer know the number of wafers which means that die must be the qty unit for this facility and wafers can be the sec_qty prior to the saw step. Please note that a lot with qty of 0 is allowed but only if the sec_qty is greater than 0. This is unusual but one case is where we know the wafers will be scrapped but cannot be scrapped quite yet. (* from FPSINPUT.WIP_EVENT_HIST)

RESERVE_JOB_ID

VARCHAR2(64)

RESERVE_TOOL

VARCHAR2(16)

ROUTE

VARCHAR2(256)

N

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

ROUTE_FAMILY_SCORE

NUMBER(2)

Scheduler Evaluation slider value for route family priority slider (* from FPSINPUT.RTG_ROUTE_FAMILIES)

ROUTE_SCORE

NUMBER(2)

Scheduler Evaluation slider value for route priority slider (* from FPSINPUT.RTG_ROUTES)

RUN_ID

VARCHAR2(50)

N

the run id from the last successful scheduler (* from FPSAPP.SCH_W_SCHED_GROUP_STATUS)

SCHED_CARRIER

VARCHAR2(32)

SCHED_CH_TO_USE

VARCHAR2(24)

Please note that the Scheduler often populates this with M which indicates the main tool therefore we often should filter out a value of M when using this value since that it not a valid chamber combination. When this is populated with any value other than M then we use this as est_ch_used rather than calculating with GET_CH_ALLOWED_STATUS or GET_CH_PATH_STATUS. (* from FPSBASE.WIP_STEP_FUTURE_SCHED)

SCHED_COMMENT

VARCHAR2(4000)

SCHED_DISP_INST

DATE

SCHED_DURABLE

VARCHAR2(129)

SCHED_END

DATE

SCHED_EXTL_MODEL_ID

VARCHAR2(128)

to indicate the external model id of the tool that this lot is scheduled to (* from FPSBASE.WIP_STEP_FUTURE_SCHED)

SCHED_EXTL_MODEL_STATE

VARCHAR2(128)

to indicate the external model state of the tool that this lot is scheduled to (* from FPSBASE.WIP_STEP_FUTURE_SCHED)

SCHED_GROUP

VARCHAR2(36)

N

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* from FPSINPUT.RTG_PROCESS_GROUPS)

SCHED_IS_EXCLUSIVE_CHAMBER

CHAR(1)

to indicate if the chamber is exclusive on the tool where this lot scheduled to (* from FPSBASE.WIP_STEP_FUTURE_SCHED)

SCHED_IS_RESERVED

CHAR(1)

SCHED_JOB_ID

VARCHAR2(64)

SCHED_LOT_TRANSIT_SEC

NUMBER(6)

to indicate the transit time needed to move the lot to the scheduled tool (* from FPSBASE.WIP_STEP_FUTURE_SCHED)

SCHED_NOTES

VARCHAR2(128)

The notes will be used to be displayed in scheduler in lot list report on the lot level (* from FPSINPUT.WIP_STEP_FUTURE_OVR)

SCHED_POD_FIRST_DISP_INST

DATE

SCHED_POD_KIT_READY_INST

DATE

SCHED_POD_KIT_START_INST

DATE

SCHED_PRE_BATCH_ID

VARCHAR2(64)

SCHED_PROCESS_CHANGE_SEC

NUMBER(6)

to indicate the process change time needed to run this lot (* from FPSBASE.WIP_STEP_FUTURE_SCHED)

SCHED_QUEUE_START_DELAY_INST

DATE

to indicate the earliest time that to start to process the queue-start-step (* from FPSBASE.WIP_STEP_FUTURE_SCHED)

SCHED_RANK

NUMBER

SCHED_RANK_DISPLAY

VARCHAR2(500)

SCHED_RQD_PORT_GROUP

VARCHAR2(12)

to indicate the required port group information of the tool that this lot scheduled to (* from FPSBASE.WIP_STEP_FUTURE_SCHED)

SCHED_SCORE

NUMBER(20,4)

SCHED_SCORE_DETAILS

VARCHAR2(4000)

SCHED_SORT_ON_TOOL

NUMBER(4)

SCHED_START

DATE

The first start time for the durable to be used (* from FPSBASE.RTG_DURABLE_FUTURE_SCHED)

SCHED_STATE

VARCHAR2(7)

SCHED_TOOL

VARCHAR2(16)

the tool from the first lot that scheduled (* from FPSAPP.SCH_W_SCHED_DURABLE_INSPECT)

SCHED_ZONE_TO_USE

VARCHAR2(1)

While zone restricted batch scheduling is enabled, this column will be populated with the zone assignment corresponding to the ZONE in EQP_ZONES for the scheduled tool. (* from FPSBASE.WIP_STEP_FUTURE_SCHED)

SEQ_NUM

NUMBER(7,2)

Sequence number of step in route (* from FPSINPUT.RTG_ROUTE_STEPS)

SHOULD_SCHEDULE

CHAR(1)

Indicates if it should force scheduler to schedule this step or not. Setting this value to Y also forces a TAKE decision for this step in WIP_STEP_FUTURE. (* from FPSINPUT.WIP_STEP_FUTURE_OVR)

SHOULD_USE

CHAR(1)

This flag determines if the scheduler should use this data or not

STAGING_SEC

NUMBER(7)

STEP

VARCHAR2(256)

N

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

STEP_BEG_BAY

VARCHAR2(12)

STEP_BEG_INST

DATE

STEP_BEG_LOCATION

VARCHAR2(32)

STEP_BEG_STATION

VARCHAR2(32)

STEP_DUE_INST

DATE

STEP_GOAL_INST

DATE

STEP_PRIORITY

VARCHAR2(7)

this will allow to override the priority at this step (* from FPSINPUT.WIP_STEP_FUTURE_OVR)

STEP_QTY

NUMBER(7)

this will allow to override the qty at this step. we placed this here for future development first (* from FPSINPUT.WIP_STEP_FUTURE_OVR)

STEP_SEC

NUMBER(7)

Step Sec

STEP_SEC_TO_EOL

NUMBER(11)

Total Step sec to the end of line

WAIT_SEC_TO_SCHED

NUMBER(7)

The lot may be scheduled but must not be allowed to dispatch or start until this number of seconds has elapsed. (* from FPSINPUT.WIP_LOTS_STATIC)