FPSBASE.DASH_P_MNT_FUTURE

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

LOGGED_ENTITY

Entity to which event is logged in the MES. This could be a main tool, subtool, entity, or port. In MNT tables this could be a vehicle or durable as well which is why the column width is wider. If main tool or port, we apply the event to all entities. If subtool we apply to all within the subtool. If entity we apply only to the entity. (* inherited from FPSINPUT.EQP_EVENT_HIST)

CH_SHORT_DISPLAY

Short display for the chamber displayed on Dashboard and reports as part of a list of chambers used. This should not include the tool name but only the chamber on the tool so if the chambers on ET11 are ET11CHA and ET11CHB1 and ET11CHB2 then this field should be A, B1, and B2. (* inherited from FPSINPUT.EQP_CHAMBERS)

EQP_TYPE

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

MNT_FAMILY

MNT_FAMILY is assigned to each EQP_TYPE. Tools in the same MNT_FAMILY are similar and share the same maintenance schedule. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

MNT_MODULE

MNT_MODULE is the module responsible for maintaining the tool and is a property of MNT_FAMILY. See comments on the module column in GEN_MODULES for how it relates to eqp_module and mnt_module. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

EQP_MODULE

EQP_MODULE is the module responsible for operating the tool. See comments on the module column in GEN_MODULES for info on this column and how it relates to eqp_module and mnt_module. (* inherited from FPSBASE.EQP_TOOLS_PLUS)

MODULE_DISPLAY

The name of the module displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the module. (* inherited from FPSINPUT.GEN_MODULES)

EVENT_ID

Field that uniquely identifies the maintenance task definition in the facility. `Event_id` is usually a number or code from the maintenance system, but it could also be defined as `logged_entity` concatenated with `mnt_name`, since that combination also uniquely represents an event. It is important to ensure that our definition of `event_id` represents repeated instances of the same maintenance event with the same `event_id`. For example, if we have a monthly PM on tool T1, there will be instances of this event each month. The field used as `event_id` could be something like T1 monthly PM; it should *not* be something like T1 monthly PM Jan, T1 monthly PM Feb, etc., since this would cause the `event_id` to change every month. (* inherited from FPSINPUT.EQP_MNT_FUTURE)

MNT_NAME

Name identifying the scheduled maintenance event which is unique for the `logged_entity`. For example, daily qual or weekly PM. (* inherited from FPSINPUT.EQP_MNT_FUTURE)

EQP_STATE

Client equipment state taken directly from their MES or from their existing tool state model. For EQP_MNT_FUTURE, this is the state that we estimate the entity will be in during the maintenance which is often set to a generic PM state if we do not have detailed information. (* inherited from FPSINPUT.EQP_L6_DETAILED_STATES)

MNT_GROUP

Grouping field for upcoming maintenance on Dashboard and Mnt Viewer. This can be any value and should be formatted for display. (* inherited from FPSINPUT.EQP_L5_TRANSITION_STATES)

DUE_INST

To indicate the due date for this futuer start lot (* inherited from FPSINPUT.WIP_STARTS)

EST_DURATION_SEC

Estimate of the duration of the future hold if known. If blank we use the estimate for the hold_type. (* inherited from FPSINPUT.WIP_HOLD_FUTURE)

DURATION_DISPLAY

MODULE

Modules are departments of people who manage certain areas of the fab. The modules are assigned ownership of a set of tools to operate and maintain as well as steps on the route that they are responsible for executing. Since many of our tables include tool and step information together, we must distinguish between the owner of the step (WIP_MODULE), the owner of the operation of the tool (EQP_MODULE), and the owner of the maintenance of the tool (MNT_MODULE). WIP_MODULE is used to credit moves and set goals. Each route-step is assigned to a process family and then its wip_module is defined by the process family. EQP_MODULE is used to group tools particularly for tool performance reporting. Similar to WIP, each tool is dynamically assigned to a process family based on its assignments and then its eqp_module is defined by the process family. MNT_MODULE is usually the same as EQP_MODULE but unlike EQP_MODULE is not dependent on assignments but only on the EQP hierarchy. Each tool is assigned to an eqp_type and each eqp_type is assigned to a mnt_family and each mnt_family is assigned to a mnt_module. (* inherited from FPSINPUT.GEN_MODULES)

INCLUDE_IN_DASH_DOWN

This column will hide tools from the Down tools section of the Equipment Dashboard if set to N for this opportunity state (* inherited from FPSADMIN.ETP_L4_OPPORTUNITY_STATES)