FPSBASE.MSO_RULES

SMP_RULE_ID

NUMBER(9)

Unique ID for the sample rule.

CHAMBER_EACH_NA

VARCHAR2(19)

N

Define what chambers will be tracked in the MSO_RULE_COUNTER_HIST tables.

CHAMBER_MSO_GROUP_EACH_NA

VARCHAR2(64)

Define what chambers mso groups will be tracked in the MSO_RULE_COUNTER_HIST tables.

DECISIONS_TO_SEND

VARCHAR2(12)

Define what decisions are sent to the MES. Possible values are SKIP, TAG, or ALL. If you only want the rule to send TAG decision, then setting this to TAG would keep SKIP decisions from being sent to the MES.

EXPIRY_DEACTIVATE_INST

DATE

Time when the rule is no longer valid.

EXPIRY_WARN_INST

DATE

Time to warn the creator of the rule that the rule is about to expire.

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

FILTER

VARCHAR2(64)

The name of the filter to be defined in the UI. The filter can be used by multiple rules. (* from FPSBASE.MSO_FILTER_PARAM_VALUES)

IS_ACTIVE

CHAR(1)

Flag to set if the rule is active or not.

IS_QUEUE_SKIP_ENABLED

CHAR(1)

Flag set to allow lots to be automatically skipped if a lot that was run later on the main processing tool is already at metrology or has already run through metrology.

LOT_GROUP_EACH_NA

VARCHAR2(8)

N

Define what lot groups will be tracked in the MSO_RULE_COUNTER_HIST tables.

LOT_MSO_GROUP_EACH_NA

VARCHAR2(8)

N

Define what lot mso groups will be tracked in the MSO_RULE_COUNTER_HIST tables.

LOT_PARM_NAME

VARCHAR2(32)

Lots with the specified lot parameter and the corresponding value will be tagged. If null than we do not check.

LOT_PARM_VALUE

VARCHAR2(32)

Lots with the specified lot parameter and the corresponding value will be tagged. If null than we do not check.

MAX_CONSECUTIVE_SKIP_WARN

NUMBER(5)

Value to be used in reporting and for alerts when the maximum number of skips is getting high for the rule. This value does not impact actual sampling decisions.

MAX_CONSEC_SKIP_MES_PARAMETER

VARCHAR2(100)

Configurable parameter that will be sent to the MES if the maximum consecutive skip trigger mes action limit is exceeded.

MAX_CONSEC_SKIP_TRG_MES_ACTION

NUMBER(5)

Maximum number of consecutive skip decisions that are allowed for a PERCENT/TIME rule before MES action is triggered by MSO. This limit will not automatically set lots to tag, rather tell the MSO system to initiate a message to the MES (i.e. log tools down)

MAX_CON_SKIP_TAG_NEXT_LOT_OVR

NUMBER(5)

Maximum number of consecutive skip decisions that are allowed for a PERCENT/TIME rule before the next lot that process will be tagged to measure, regardless of the sample rate. In cases where rule interaction may tag multiple lots we do not want to skip many lots until the sample rate drops.

MAX_LAR_MES_PARAMETER

VARCHAR2(100)

Configurable parameter that will be sent to the MES if the maximum lots at risk trigger mes action limit is exceeded.

MAX_LAR_TRIGGER_MES_ACTION

NUMBER(9)

Maximum number of consecutive lots at risk for a PERCENT/TIME rule before MES action is triggerd by MSO. This limit will not automatically set lots to tag, rather tell the MSO system to initiate a message to the MES (i.e. log tools down)

MAX_LAR_WARN

NUMBER(9)

Value to be used in reporting and for alerts when the maximum number of lots at risk is getting high for the rule. This value does not impact actual sampling decisions.

MES_ACTION_COMMENT

VARCHAR2(256)

User can store a comment value by rule that can be sent to the MES when logging a tool down.

MIN_CON_SKIP_ALLOW_TAG_OVR

NUMBER(5)

Minumum number of consecutive skip decisions that must occur for a PERCENT/TIME rule before the next lot that process will be tagged to measure, regardless of the sample rate. In certain cases we do not want lots that run back to back at the main process step be selected to measure at Metrology.

MSO_PROCESS_EACH_NA

VARCHAR2(100)

Defines how mso process will be included in the MSO_RULE_COUNTER_HIST tables.

NUM_LOTS_HIST_CUTOFF_OVR

NUMBER(5)

Number of lots to keep in the sampling decision history. Based on the history is how the MSO makes a decision to sample, calculate the sample rate and counters. This only applies for a PERCENT rule.

OPERATION_EACH_NA

VARCHAR2(50)

Defines how opertion will be included in the MSO_RULE_COUNTER_HIST tables.

PLAN_PRIORITY_NA

VARCHAR2(7)

N

Define what plan priorities will be tracked in the MSO_RULE_COUNTER_HIST tables.

PRD_EACH_NA

VARCHAR2(64)

N

Define what Prds will be tracked in the MSO_RULE_COUNTER_HIST tables.

PRD_MSO_GROUP_EACH_NA

VARCHAR2(64)

N

Define what PRD_MSO_GROUPS will be tracked in the MSO_RULE_COUNTER_HIST tables.

ROUTE_EACH_NA

VARCHAR2(256)

N

Define what routes will be tracked in the MSO_RULE_COUNTER_HIST tables.

ROUTE_MSO_GROUP_EACH_NA

VARCHAR2(64)

N

Define what ROUTE_MSO_GROUPS will be tracked in the MSO_RULE_COUNTER_HIST tables.

RULE_CONDITION_MAX

NUMBER(8)

Allows user to define a recommended max value for the rule condition. When user is updating a rule, this will give them values to keep the condition within. It will not actually restrict the value though.

RULE_CONDITION_MIN

NUMBER(8)

Allows user to define a recommended min value for the rule condition. When user is updating a rule, this will give them values to keep the condition within. It will not actually restrict the value though.

RULE_DESCRIPTION

VARCHAR2(256)

Allows the user to give the rule a description that is more detailed than the rule name.

RULE_GROUP

VARCHAR2(36)

N

Group name the Rule Id is associated with. This is used for reporting in the Dashboard.

RULE_GROUP_MIN_CONDITION_OVR

NUMBER(8)

Minimum value allowed for rule group to override the sample condition. If toolstatus condition dynamically moves the sample condition below this value, then this will cap it. Rule Group dynamic sampling will not be allowed to go lower than this threshold.

RULE_OWNER

VARCHAR2(50)

Configurable text field to assign a rule owner.

RULE_OWNER_EMAIL

VARCHAR2(128)

Configurable text field to assign a rule owner email.

SMP_RULE_CONDITION

NUMBER(8)

N

Number indicating when to tag lots for the rule based on the type selected.

SMP_RULE_NAME

VARCHAR2(32)

N

User friendly name of the sample rule. Always tied to the Rule ID but can be modified if the user wants to change the name.

SMP_RULE_TYPE

VARCHAR2(32)

N

Set what type of sample rule this is (Percent, Time or Event).

TOOL_EACH_NA

VARCHAR2(16)

N

Define what tools will be tracked in the MSO_RULE_COUNTER_HIST tables. Note this value can and TOOL_MSO_GROUP_EACH_NA can not both be NA when setting up an EVENT type rule.

TOOL_MSO_GROUP_EACH_NA

VARCHAR2(64)

N

Define what TOOL_MSO_GROUPS will be tracked in the MSO_RULE_COUNTER_HIST tables. Note this value can and TOOL_EACH_NA can not both be NA when setting up an EVENT type rule.

UPDATED_INST

DATE

Time when the record was updated according to the source data. Note this is not the time when the record was actually updated in this table - it will almost always be earlier. (* from FPSINPUT.GEN_FACILITIES)

USER_ID

VARCHAR2(50)

N

The user making the changes to the MSO_RULES table. If not defined it will default to the session OS user.