FPSBASE.SCH_B_WSF_SCHEDULED

UPDATED_INST

Time when the record was updated according to the source data. Note this is not the time when the record was actually updated in this table - it will almost always be earlier. (* inherited from FPSINPUT.GEN_FACILITIES)

IS_SCHED_UPDATING

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_GROUP

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

LOT

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

CARRIER

RFID of the cassette or FOUP the lot is currently in. (* inherited from FPSINPUT.MHS_CARRIERS)

LOT_CURR_STATION

QTY

Quantity of units in the lot according the qty_unit defined for the facility. It is required for all lots in each facility to have their qty defined in the same units therefore the change in the unit is critical to defining the facility. For example, a pretest facility might have a sort step in the middle where we learn the qty of die. Prior to this step we know only the wafer qty but after this step we know both wafer and die. Since wafer is the only qty we know throughput the flow then wafer must be defined as the qty unit for this facility. Die can then be populated as sec_qty when it is known. Similarly the wafer saw facility might have a step in the middle where we cut the wafers into die. After this step we no longer know the number of wafers which means that die must be the qty unit for this facility and wafers can be the sec_qty prior to the saw step. Please note that a lot with qty of 0 is allowed but only if the sec_qty is greater than 0. This is unusual but one case is where we know the wafers will be scrapped but cannot be scrapped quite yet. (* inherited from FPSINPUT.WIP_EVENT_HIST)

ROUTE

Route that has threading requirements (* inherited from FPSINPUT.RTG_STEP_THREADING)

STEP

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

NUM_STEPS_AWAY

Number of steps away not including steps which we know will be skipped nor those which we estimate will be skipped at least x pct of the time. This x value is configurable in GEN_FACILITIES using the smp_pct_for_num_steps_away column. (* inherited from FPSBASE.WIP_STEP_FUTURE)

SCHED_STATE

CURR_PRIORITY

The priority at the current step. As the lot moves along the route after LAST_STEP_CURR_PRTY it will revert to PLAN_PRIORITY. For example, timelink or sendahead priority is only temporary. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

CURR_PRIORITY_DISPLAY

IS_HIGHLIGHTED_PRTY

This flag indicates if this priority should be highlighted on the dashboard. When we sort all priorities by priority_sort all Y should be first followed by all N. (* inherited from FPSINPUT.WIP_PRIORITIES)

GBL_SORT

Sorting used for dispatching or allocation systems to sort future start lots based on priority, critical ratio, etc. (* inherited from FPSINPUT.WIP_STARTS)

STEP_BEG_INST

SCHED_POD_KIT_START_INST

SCHED_POD_KIT_READY_INST

SCHED_POD_FIRST_DISP_INST

ACT_DISP_INST

ORGNL_SCHED_DISP_INST

SCHED_EARLY_DISP_INST

SCHED_LATE_DISP_INST

SCHED_START

The first start time for the durable to be used (* inherited from FPSBASE.RTG_DURABLE_FUTURE_SCHED)

SCHED_END

SCHED_SORT_ON_SCHED_START

SCHED_END_ADJUSTED

SCHED_IS_RESERVED

DISPATCH_READY

CURR_TOOL

SCHED_TOOL

the tool from the first lot that scheduled (* inherited from FPSAPP.SCH_W_SCHED_DURABLE_INSPECT)

SCHED_CH_TO_USE

Please note that the Scheduler often populates this with M which indicates the main tool therefore we often should filter out a value of M when using this value since that it not a valid chamber combination. When this is populated with any value other than M then we use this as est_ch_used rather than calculating with GET_CH_ALLOWED_STATUS or GET_CH_PATH_STATUS. (* inherited from FPSBASE.WIP_STEP_FUTURE_SCHED)

SCHED_DURABLE

SCHED_CARRIER

DURABLE_CURR_LOCATION

DURABLE_CURR_STATION

SCHED_SORT_ON_TOOL

DURABLE_LAST_SCHED_END

DURABLE_LAST_SCHED_TOOL

SCHED_SORT_ON_DURABLE

SCHED_SCORE_BEST

SCHED_COMMENT

IS_HOLD

This field indicates the lot is on hold after the event is logged. In other words, this will always be Y if is_hold_start is Y and always N if is_hold_end is Y. (* inherited from FPSINPUT.WIP_EVENT_HIST)

SCHED_JOB_ID

SCHED_JOB_ORDER