FPSINPUT.WIP_SMP_FUTURE

LOT

VARCHAR2(32)

N

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

STEP

VARCHAR2(256)

N

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

ROUTE

VARCHAR2(256)

N

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

BANK

VARCHAR2(36)

N

Lots which are not on a route are considered in a bank and the bank name indicates why the lot is off route. Bank must be NA for lots which are on a route. Our standard filter for active lots is bank = NA. (* from FPSINPUT.RTG_BANKS)

EVENT_COMMENT

VARCHAR2(512)

Comment associated with the event. (* from FPSINPUT.WIP_HOLD_FUTURE)

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

NEXT_STEP

VARCHAR2(256)

Event moved the lot to this new step (* from FPSINPUT.WIP_EVENT_HIST)

OPERATOR

VARCHAR2(64)

N

In history tables, this is the username of the person or system who logged the event. In EQP_MNT_FUTURE, this is the username of the person who input the information about the maintenance event. Usernames can be looked up in GEN_USERS to get full names, email address, etc. Please note that the existence of each username in GEN_USERS is optional, meaning that it is never required for the username logged in the operator column to be in GEN_USERS. (* from FPSINPUT.WIP_EVENT_HIST)

QTY_MEAS

NUMBER(7)

Quantity of units measured at this metrology step. This is less than or equal to the qty_in_job. The standard case is where we have a 25 wafer lot so the qty_in_job is 25 but we only measure 3 wafers on the metrology tool so qty_meas is 3. (* from FPSINPUT.WIP_EVENT_HIST)

SMP_REASON

VARCHAR2(256)

N

Reason for sampling

SMP_RESULT

VARCHAR2(4)

N

Either TAKE or SKIP