Data Dictionary
>
FPSAPP Tables
> FPSAPP.EQP_PROCESS_USAGES
Table FPSAPP.EQP_PROCESS_USAGES"
is the configuration table to store the process max usages costs/time. it needs to be able to specify max number of consecutive change type on the tool
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Schema: FPSAPP
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Tablespace: FPSDATA
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Primary key: EQP_TYPE, TOOL, ENTITY_TYPE, UNIT_TYPE, CHANGE_TYPE, CHANGE_FROM, CHANGE_TO, MAX_USAGE, FACILITY
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Foreign keys: EQP_PROCESS_USAGES_FK_FAC: FACILITY REFERENCES FPSINPUT.GEN_FACILITIES (FACILITY)
|
Column |
Type |
Nullable |
Comment |
|---|---|---|---|
|
EQP_TYPE |
VARCHAR2(50) |
N |
the eqp type for this process max usages |
|
TOOL |
VARCHAR2(16) |
N |
the tool id for this process max usages; if this is used for entire eqp-type, then populate NA |
|
ENTITY_TYPE |
VARCHAR2(12) |
N |
the entity type for this process max usages. only allow chamber, tool |
|
UNIT_TYPE |
VARCHAR2(12) |
N |
the unit type for this process max usages. only allow job, wafer, lot, second |
|
CHANGE_TYPE |
VARCHAR2(64) |
N |
the change for this process max usages. only allow setup, recipe, recipe_family, recipe_group |
|
CHANGE_FROM |
VARCHAR2(100) |
N |
the value the process max usagess from |
|
CHANGE_TO |
VARCHAR2(100) |
N |
the value the process max usagess to |
|
MAX_USAGE |
NUMBER(9) |
N |
the max usage for change_from before it change to the new value |
|
FACILITY |
VARCHAR2(6) |
N |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES) |
|
CHANGE_COST |
NUMBER(9) |
the cost it need to budget to have this change |
|
|
CHANGE_SEC |
NUMBER(9) |
the time it takes to have this change |
|
|
DESCRIPTION |
VARCHAR2(256) |
the description for this process max usages |