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FPSBASE.SCH_C_CFG_EQP_TYPES

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> FPSBASE.SCH_C_CFG_EQP_TYPES

Table FPSBASE.SCH_C_CFG_EQP_TYPES"

This table is to store the basic configuration for each eqp type. Please note that this table has data for older config_id values and therefore does not have a foreign key on FPSINPUT.EQP_TYPES although the current config_id should typically only have values in EQP_TYPES.

  • Schema: FPSBASE

  • Tablespace: FPSDATA

  • Primary key: FACILITY, SCHED_GROUP, EQP_TYPE, CONFIG_ID

  • Referenced by: FPSAPP.SCH_C_CFG_EQP_TYPES_SETTINGS (FACILITY, SCHED_GROUP, EQP_TYPE, CONFIG_ID)


Column

Type

Nullable

Comment

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

SCHED_GROUP

VARCHAR2(36)

N

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* from FPSINPUT.RTG_PROCESS_GROUPS)

EQP_TYPE

VARCHAR2(50)

N

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)