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FPSADMIN.WIP_WAFER_HIST

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Table FPSADMIN.WIP_WAFER_HIST"

History of wafer begins and ends, most likely on chambers but could be on main tool as well. This table essentially has two primary keys, both including inst and logged_entity. The first adds event which means we cannot log the same event for multiple wafers at the same time. The second adds lot and wafer which means we cannot log multiple events for the same wafer at the same time. The main purpose of this table is for throughput. Ultimately for non-batch tools we need to calculate the unit interval and the first unit times. The ideal way to calculate this is using (last wafer end - first wafer end) / (qty - 1) as the unit interval and (first wafer end - first wafer begin) as the first unit time. Last wafer end should be job end and first wafer time should be job begin so the key event is first wafer end. If we do not have wafer information then we approximate unit interval as job end - prev job end and first unit as (job end - job beg - unit interval * (qty - 1)) so having the real wafer times helps out throughput be more accurate.

  • Schema: FPSADMIN

  • Tablespace: FPSDATAHIST

  • Primary key: INST, LOT, WAFER, LOT_SEQ_WITHIN_SEC


Column

Type

Nullable

Comment

INST

DATE

N

Time when the event occurred. (* from FPSINPUT.WIP_EVENT_HIST)

LOT

VARCHAR2(32)

N

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

WAFER

VARCHAR2(32)

N

Field that uniquely identifies a wafer.

LOT_SEQ_WITHIN_SEC

NUMBER(2)

N

For rows with identical timestamps, sequence records to get proper sequence (* from FPSINPUT.WIP_EVENT_HIST)

ACTUAL_DURABLE_USED

VARCHAR2(129)

Actual durable used as logged by the tool during processing of the lot. This can be a comma delimited string if multiple durables are used. (* from FPSINPUT.WIP_EVENT_HIST)

ACTUAL_MACHINE_RECIPE

VARCHAR2(100)

Machine recipe used to process the lot as logged during processing by the tool. (* from FPSINPUT.WIP_EVENT_HIST)

ETP_BEG_ACTION

VARCHAR2(24)

This is the action passed to the UPDATE_ETP_STATUS_BEG procedure and is useful for debugging ETP to see what action this event triggered.

EVENT

VARCHAR2(48)

N

This is the event registered in the MES. This is for the historical record and display only. Each event is mapped to an FPS event_type and the event_type is what is used by FPS applications. (* from FPSINPUT.WIP_EVENTS)

EVENT_COMMENT

VARCHAR2(512)

Comment associated with the event. (* from FPSINPUT.WIP_HOLD_FUTURE)

EVENT_INST1

DATE

User-defined field which can store any instant relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_INST2

DATE

User-defined field which can store any instant relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_INST3

DATE

User-defined field which can store any instant relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_PARM1

VARCHAR2(128)

User-defined parameter which can store any value relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_PARM2

VARCHAR2(128)

User-defined parameter which can store any value relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_PARM3

VARCHAR2(128)

User-defined parameter which can store any value relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_TYPE

VARCHAR2(12)

Event Type (* from FPSINPUT.EQP_SCHED_EVENTS_MANUAL)

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

INSERTED_TIME

TIMESTAMP(6)

Timestamp field set by trigger storing SYSTIMESTAMP when record was inserted in the table. (* from FPSINPUT.WIP_EVENT_HIST)

JOB_ID

VARCHAR2(64)

Automatically set by trigger when the first lot of a job logs an event to the tool. (* from FPSBASE.WIP_LOT_HIST)

LOGGED_ENTITY

VARCHAR2(36)

Entity to which event is logged in the MES. This could be a main tool, subtool, entity, or port. In MNT tables this could be a vehicle or durable as well which is why the column width is wider. If main tool or port, we apply the event to all entities. If subtool we apply to all within the subtool. If entity we apply only to the entity. (* from FPSINPUT.EQP_EVENT_HIST)

OPERATOR

VARCHAR2(64)

N

In history tables, this is the username of the person or system who logged the event. In EQP_MNT_FUTURE, this is the username of the person who input the information about the maintenance event. Usernames can be looked up in GEN_USERS to get full names, email address, etc. Please note that the existence of each username in GEN_USERS is optional, meaning that it is never required for the username logged in the operator column to be in GEN_USERS. (* from FPSINPUT.WIP_EVENT_HIST)

OPT_SORT_WITHIN_SEC

NUMBER(21,6)

This number is the order of the event within the same second for the same lot (WEH) or wafer (WWH) or entity (EEH). If the event is logged with a sequence number then this value should be that sequence number (and it is fine if this is an overall sequence number even though it only matters compared to other events in the same second). Otherwise if the event time includes milliseconds then this can be the milliseconds. Otherwise just choose the best sort order. This value does not need to be 1, 2, 3, etc. (* from FPSINPUT.WIP_EVENT_HIST)