FPSADMIN.WIP_STEP_HIST

LOT

VARCHAR2(32)

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

INST

DATE

Time when the event occurred. (* from FPSINPUT.WIP_EVENT_HIST)

LOT_SEQ_WITHIN_SEC

NUMBER(6,2)

For rows with identical timestamps, sequence records to get proper sequence (* from FPSINPUT.WIP_EVENT_HIST)

ABORT_INST

DATE

When a lot has begun processing on a tool and an event with event_type of ABORT is logged, abort_inst captures the time of the abort. If multiple aborts happen to the same lot, the last abort_inst is used. See description of ABORT ect_state for more details.

ACTUAL_CH_USED

VARCHAR2(24)

Here is where we can log the actual_ch_used directly if we know it. We have three ways to determine actual_ch_used in WIP_LOTS_REALTIME which populates WIP_STEP_HIST: 1) Log it directly in this colum for an event where the logged_entity is the main tool. 2) Log events to each of the chambers used in WIP_EVENT_HIST. 3) Log events to each of the chambers used in WIP_WAFER_HIST. (* from FPSINPUT.WIP_EVENT_HIST)

ACTUAL_DURABLE_USED

VARCHAR2(129)

Actual durable used as logged by the tool during processing of the lot. This can be a comma delimited string if multiple durables are used. (* from FPSINPUT.WIP_EVENT_HIST)

ACTUAL_MACHINE_RECIPE

VARCHAR2(100)

Machine recipe used to process the lot as logged during processing by the tool. (* from FPSINPUT.WIP_EVENT_HIST)

BANK

VARCHAR2(36)

N

Lots which are not on a route are considered in a bank and the bank name indicates why the lot is off route. Bank must be NA for lots which are on a route. Our standard filter for active lots is bank = NA. (* from FPSINPUT.RTG_BANKS)

BANK_IN_OR_OUT_INST

DATE

BEG_PROC_INST

DATE

Time when the lot started processing on the main tool.

BEG_PROC_ORDERED_NOT_NULL

DATE

N

BOOLEAN_NOT_USED1

CHAR(1)

BUNCH_ID

VARCHAR2(17)

Chain lots together for Goal Planner (* from FPSINPUT.WIP_LOTS_STATIC)

CANCEL_INST

DATE

Time when tool reservation or dispatch or perhaps even load or ready for the lot at the current step was cancelled. After cancel_inst the lot is available to any qualified tool immediately.

CARRIER

VARCHAR2(32)

RFID of the cassette or FOUP the lot is currently in. (* from FPSINPUT.MHS_CARRIERS)

CARRIERS_IN_JOB

NUMBER(2)

Set to the number of carriers in the job. The value in WIP_EVENT_HIST represents the number of carriers which have started processing in this job *so far*, while the value in WIP_STEP_HIST (written after the job completes processing) represents the total number of carriers in the job. (* from FPSBASE.WIP_LOT_HIST)

CARRIER_INST

DATE

When the carrier was last populated with the event. Since we carry over the previous value of carrier we need to know this to compare to the updated_inst in WIP_LOTS_STATIC and use the newest information for carrier. (* from FPSBASE.WIP_LOT_HIST)

COST_PER_LOT

NUMBER(6)

CREATED_INST

DATE

Time when the lot was created, either lot start or split. (* from FPSINPUT.WIP_LOTS_STATIC)

CURR_PRIORITY

VARCHAR2(7)

N

The priority at the current step. As the lot moves along the route after LAST_STEP_CURR_PRTY it will revert to PLAN_PRIORITY. For example, timelink or sendahead priority is only temporary. (* from FPSINPUT.WIP_LOTS_STATIC)

CURR_PRIORITY_REASON

VARCHAR2(128)

An optional description of why the priority is set as it is. This is typically shown as additional information on pages related to priority lots. (* from FPSINPUT.WIP_LOTS_STATIC)

CURR_RANK

VARCHAR2(1)

Current rank is dynamically calculated based on the permanent rank, temporary rank, external rank, and current conditions like tool status and current setup. Cases when it is greater than permanent rank include when the required setup does not match or when APC thread is not qualified. The only way it could be less are when either the temporary rank or external rank are set. Curr_rank is populated in WIP_EVENT_HIST for each event logged to a tool by trigger with the value from WIP_STEP_FUT_ASSIGNMENTS at the time of the event. (* from FPSBASE.WIP_LOT_HIST)

DELTA_TYPE

VARCHAR2(12)

Delta_type is the reason why the qty changed. It is populated with a value in WIP_DELTA_TYPES (SCRAP, SPLIT, etc.) for all records where qty_delta != 0. It is null for normal moves where is_next = Y and the qty does not change. The logic to populate this is in WIP_STEP_HIST_INSERT_BEF. (* from FPSADMIN.WIP_DELTA_TYPES)

DISPATCHED_BY

VARCHAR2(64)

DISPATCH_INST

DATE

Time when the lot indicated in the MES that it will process on the tool. As opposed to reserve, dispatch cannot be automatically undone.

DISPATCH_ORDERED_NOT_NULL

DATE

N

DUE_INST

DATE

To indicate the due date for this futuer start lot (* from FPSINPUT.WIP_STARTS)

DURABLE_THP_VARIATION

VARCHAR2(64)

When this column is populated that means that we have a choice of durable families and that processing time for the lot/recipe depends on which durable family is chosen. The most common use case is 8 pin and 16 pin probe cards. This will be blank for reticles and other cases where the throughput is not dependent on the durable. This is part of the primary key of our throughput logic where nulls are filled in as NA since PK columns cannot be null. In our first example, we have a recipe WAFER_TEST_1 that we use for a whole bunch of different prds. Each prd requires its own probe card but for throughput purposes we do not care about the prd. We just care about the recipe which is WAFER_TEST_1 and we would set duration_thp_variation to 8pin or 16pin. Then we would group all prds that use WAFER_TEST_1 and ran with an 8 pin probe card together in the same THP record. Our second example is similar to the first but for throughput purposes each prd will be different. We would set duration_thp_variation to the durable family for this case. In our third example, the recipe is different for each prd. In this case, we would set duration_thp_variation to either 8pin and 16pin or to the durable family and get the same result. (* from FPSINPUT.RTG_DURABLE_FAMILIES)

EET_SEC

NUMBER(7)

End-to-end time in seconds (* from FPSBASE.WIP_LOT_HIST)

END_PROC_INST

DATE

Time when the lot finished processing on the main tool.

END_PROC_ORDERED_NOT_NULL

DATE

N

ENGR_COMMENT

VARCHAR2(128)

Special comments made by engineering about this lot. These comments are about the lot in general and not about a specific step. (* from FPSINPUT.WIP_LOTS_STATIC)

EST_CH_USED

VARCHAR2(24)

Estimate of which chambers will used to process this lot based on assignments and status (* from FPSBASE.WIP_LOT_HIST)

EST_DURABLE_USED

VARCHAR2(129)

This field is populated with our estimate of what durable will be used based on information from the MES and/or Recipe Management System combined with the location and status of each durable. (* from FPSBASE.WIP_LOT_HIST)

EST_MACHINE_RECIPE

VARCHAR2(100)

Estimated machine recipe what we estimate will be the machine recipe based on information from the Recipe Management System. It is used in combination with process for throughput calculations and setup change penalty calculations. It is not necessary to estimate for all processes since this is always used in combination however it needs to be NA rather than blank since it is part of the primary key of most THP tables. Hopefully when this is not NA it should match the actual machine recipe logged for each lot during processing. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

EVENT

VARCHAR2(48)

N

This is the event registered in the MES. This is for the historical record and display only. Each event is mapped to an FPS event_type and the event_type is what is used by FPS applications. (* from FPSINPUT.WIP_EVENTS)

EVENT_COMMENT

VARCHAR2(512)

Comment associated with the event. (* from FPSINPUT.WIP_HOLD_FUTURE)

EVENT_TYPE

VARCHAR2(12)

N

Event Type (* from FPSINPUT.EQP_SCHED_EVENTS_MANUAL)

EXPT_ID

VARCHAR2(12)

Experiment identifier which indicates the lot will process differently that normal for its product on at least one step of the route. (* from FPSINPUT.WIP_LOTS_STATIC)

EXPT_INSTRUCTIONS

VARCHAR2(512)

General instructions about the experiment performed on this lot. This is a long string field for display only. (* from FPSINPUT.WIP_LOTS_STATIC)

EXPT_VARIATION

VARCHAR2(12)

Assigned to sibling lots to indicate which variation of the experiment will be performed on the lot. For example, variation 0 might get the normal recipe while variation 1 might get a different recipe then we can compare the different wafers in each split at a following measurement or test step. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS_LOT)

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

FACILITY_ENT_INST

DATE

FACILITY_SEGMENT

VARCHAR2(36)

Facility segment is the parent of common step and is used as the highest level grouping when we show WIP for a route group or the entire facility where we cannot use route segment. We would prefer somewhere between 8 and 20 facility segments. Typically we will have to define these (as opposed to route_segment which we will typically come from the MES). There is no RTG_FACILITY_SEGMENTS table because sorting of facility segments is determined by common_step_sort. A trigger on RTG_COMMON_STEPS ensures that facility segments are contiguous when the entire facility is sorted by common step. (* from FPSINPUT.RTG_COMMON_STEPS)

FACILITY_SEGMENT_ENT_INST

DATE

FIRST_LOT_IN_JOB

VARCHAR2(32)

The first lot in the job determined by the order of events. When this first lot logs the first tool event which is usually a reserve or dispatch then the job_id is created with only this lot. Then subsequent lots join this job. While we use job_id to identify lots that will process or are processing or processed together, first_lot_in_job is still a useful field. (* from FPSBASE.WIP_LOT_HIST)

FIRST_UNIT_SEC

NUMBER(9,3)

Time for one unit to process when the tool starts from a standby state. On a batch tool -- defined as a tool where all units process together and take the same time regardless of qty -- this is the time for the batch. See our complete throughput documentation for more details. (* from FPSINPUT.THP_EXTERNAL)

FIRST_WFR_BEG_INST

DATE

Time when the first wafer of the job started processing.

FIRST_WFR_END_INST

DATE

Time when the first wafer of the job finished processing.

GBL_SORT

NUMBER(38)

Sorting used for dispatching or allocation systems to sort future start lots based on priority, critical ratio, etc. (* from FPSINPUT.WIP_STARTS)

GOAL_BEGIN_INST

DATE

Time when the lot has to complete the current step to remain on schedule.

INSERTED_TIME

TIMESTAMP(6)

Timestamp field set by trigger storing SYSTIMESTAMP when record was inserted in the table. (* from FPSINPUT.WIP_EVENT_HIST)

INTERVAL_SEC

NUMBER(9,3)

Unit_int_sec or batch_int_sec expected for the lot at the time of processing from our THP tables. (* from FPSBASE.WIP_LOT_HIST)

IS_ALREADY_COMP_THIS_OPER

CHAR(1)

IS_DELETE_EVENT

CHAR(1)

If the event results in this lot being deleted then logic in the trigger will set this to Y. This flag indicates that we should delete this lot from WIP_EVENTS_CURR_STEP and WIP_STEP_FUTURE in via subsequent triggers. There are two correct ways to delete a lot. One is to log an event with the qty set to 0 (i.e. merge or scrap or terminate). Two is to log an event where next_facility is set to a facility which is not in GEN_FACILITIES (i.e. ship). Then there is case three where the lot disappears from WIP_LOTS_VERIFY with no event designating this. Case three means the ETL needs to be improved to log the proper event so it becomes case one or two. (* from FPSBASE.WIP_LOT_HIST)

IS_EVENT_AUTO

CHAR(1)

IS_EXPT_STEP

CHAR(1)

N

Flag set to Y if the experiment requires abnormal processing at this step. (* from FPSBASE.WIP_LOT_HIST)

IS_FINISH_EVENT

CHAR(1)

N

IS_HOLD

CHAR(1)

N

This field indicates the lot is on hold after the event is logged. In other words, this will always be Y if is_hold_start is Y and always N if is_hold_end is Y. (* from FPSINPUT.WIP_EVENT_HIST)

IS_IGNORE_MOVES

CHAR(1)

This flag is in both RTG_OPERATION_FAMILIES and RTG_PROCESSES. If the value is Y for the operation family then we do not count moves from those operations as oper moves. If the value is Y for either the operation family or the process then we do not count moves from the route-step as completes even if our normal logic suggests that it should be a complete. This logic can cause confusion so here are a few important notes. 1) Dashboard does not read the is_ignore_moves flag therefore we must set move_type to DSKIP rather than COMP and we must set is_oper_move to N in order to ignore the move. 2) This flag is often used for staging steps but it is independent of the is_staging_step flag so if you want to ignore staging steps then you need to set these flags appropriately. 3) The flag in RTG_PROCESSES does not directly affect the oper moves but it does affect it indirectly if the is_comp_rqd_for_oper_move is set to Y. In that case, if the only move during the operation is for a process which is ignored then we do not have a complete during the operation and therefore will not count the move from the operation as an oper move since a complete is required. (* from FPSINPUT.RTG_OPERATION_FAMILIES)

IS_JUMP_NOT_LAST

CHAR(1)

IS_NEXT

CHAR(1)

N

Indicates record goes into WIP_STEP_HIST (* from FPSBASE.WIP_LOT_HIST)

IS_NONSTD

CHAR(1)

Our column to indicate non-standard processing at the step. For example, an experiment or a chain that is only active at a particular step or set of steps and then goes back to being normal for the route. If an experiment is severe enough that it affects the final product and has to be planned separately then it will be its own prd or planprd. (* from FPSBASE.WIP_LOT_HIST)

IS_OPER_MOVE

CHAR(1)

The critical Dashboard metric we call oper moves is moves according to the specific definition of the site, usually the moves calculation they used prior to installation of the FPS Dashboard. If Y then this step move meets the specific criteria for the site to be counted as an oper move.

IS_REPEAT_CURR_DAY

CHAR(1)

N

IS_REPEAT_CURR_SHIFT

CHAR(1)

N

IS_REWORK_END

CHAR(1)

N

Event ended rework (* from FPSINPUT.WIP_EVENT_HIST)

IS_REWORK_MOVE

CHAR(1)

N

IS_REWORK_START

CHAR(1)

N

Event started rework (* from FPSINPUT.WIP_EVENT_HIST)

IS_REWORK_STEP

CHAR(1)

N

IS_SCRAP_EVENT

CHAR(1)

If the event results in any number of units in the lot to be scrapped then this field is set to Y. It is common to have scrap occur not only from a scrap event but also from a move event where the lot loses some but not all units. Therefore we cannot just look at scrap events and this flag tells what to count as scrap for this particular facility. (* from FPSINPUT.WIP_EVENT_HIST)

IS_SHIP_EVENT

CHAR(1)

This flag tells us what to count as a ship for a particular facility. Related to the ship event is the finish event which is the last event for a facility-prd which either changes facility or changes prd or terminates the lot by changing the qty to 0 without merging. Often the ship event is the same event as the finish event. But when the ship event is different and logged prior to the finish event, we write a record to CTM_FINISHED_LOT_HIST when the ship event is logged with finish_inst blank. This record is include in Dashboard Ships Summary but not in Finished Lot Cycle Time. Then later when the lot finishes, we update the record keeping the ship_inst and populating the finish_inst so it is then including in Finished Lot Cycle Time. Technically this "insert at ship then update at finish" process is the same regardless of how far the ship is before the finish but it is most critical when the the ship is quite some time before the finish, for example, when wafer test is part of the same route but we want to count the ship when the lot finishes the fab steps. (* from FPSINPUT.WIP_EVENT_HIST)

JOB_ID

VARCHAR2(64)

Automatically set by trigger when the first lot of a job logs an event to the tool. (* from FPSBASE.WIP_LOT_HIST)

LAST_PROCESS_TOOL

VARCHAR2(16)

For rework and scrap events we automatically look up the last process tool for the lot. Process tool is determined by the process class of the tool and excludes metrology and support tools. It is likely this was the cause of the rework or scrap although by no means certain. (* from FPSBASE.WIP_LOT_HIST)

LAST_PROCESS_TOOL_BEG_INST

DATE

Time when the lot finished processing on the previous tool (excluding metrology). (* from FPSBASE.WIP_LOT_HIST)

LAST_RELEASE_INST

DATE

Time the lot was previously released from hold.

LAST_STEP_CURR_PRTY

VARCHAR2(256)

The last step where the current lot_priority applies. After this step we assume the lot will return to its plan_priority. (* from FPSINPUT.WIP_LOTS_STATIC)

LAST_TOOL

VARCHAR2(16)

For rework and scrap events we automatically look up the last tool where the lot processed including metrology tools. (* from FPSBASE.WIP_LOT_HIST)

LAST_TOOL_BEG_INST

DATE

Time of the last event on the previous tool (including metrology) for the lot occurred. (* from FPSBASE.WIP_LOT_HIST)

LAST_WFR_BEG_INST

DATE

Time when the last wafer of the job started processing.

LAST_WFR_END_INST

DATE

Time when the last wafer of the job finished processing.

LOCATION

VARCHAR2(32)

Location of a carrier or lot or durable which comes directly from the tracking system used at the site. This could be a port or internal tool location or tool or rack or stocker or zero footprint storage or room or really anywhere. Many non-automated sites allow users to manually enter locations into their system. Therefore unless we know for sure that the source data implements a size limitation, it is recommended to always trim the value in the ETL to 32 characters to fit into the column size and avoid load errors. For ports, location is the full name of the port which is unique across the entire site and usually includes the tool name. Please see the comment in the port column which explains the difference between location and port. Rack locations are similar. (* from FPSINPUT.MHS_RACK_LOCATIONS)

LOGGED_ENT_OF_STEP_EVENT

VARCHAR2(19)

LOGICAL_RECIPE

VARCHAR2(100)

Used for infomational purpose and is populated if known otherwise it will match the recipe. (* from FPSINPUT.WIP_EVENT_HIST)

LOTS_IN_JOB

NUMBER(2)

Set to the number of lots in the job. The value in WIP_EVENT_HIST represents the number of lots which have started processing in this job *so far*, while the value in WIP_STEP_HIST (written after the job completes processing) represents the total number of lots in the job. (* from FPSBASE.WIP_LOT_HIST)

LOT_SUBTYPE

VARCHAR2(8)

This is an optional field to add a level to lot_type. This field is not used in logic but is displayed on hold and scrap pages of Dashboard. (* from FPSINPUT.WIP_LOTS_STATIC)

LOT_TYPE

VARCHAR2(24)

N

Lot_type is the base of the hierarchy that determines lot_family then lot_group. Ideally lot_type will come straight from the MES with little modification. (* from FPSINPUT.WIP_LOT_TYPES)

MADE_CASCADE

CHAR(1)

MAIN_ROUTE

VARCHAR2(256)

Primary route used by the prd. Excludes rework and alternate routing. We allow this column to be null in WIP_LOTS_VERIFY because we may not be certain what the main route is when we fix for missed events. In that event we trust the WIP_EVENT_HIST triggers has loaded the correct information into WIP_EVENTS_CURR_STEP. (* from FPSINPUT.WIP_EVENT_HIST)

MAIN_RT_OPER_ENT_INST

DATE

MAIN_RT_STEP

VARCHAR2(256)

When lot is on a rework or alternate route, this is the step where it will return to the main route. We use this for planning purposes so we can calculate remaining steps. We allow this column to be null in WIP_LOTS_VERIFY because we may not be certain what the main route step is when we fix for missed events. In that event we trust the WIP_EVENT_HIST triggers has loaded the correct information into WIP_EVENTS_CURR_STEP. (* from FPSINPUT.WIP_EVENT_HIST)

MEAS_RESULT

VARCHAR2(1)

Result of measurement. For facilities not using FPS Sampling this value is for display purposes only and can be pass/fail or a number or anything. For facilities using FPS Sampling this field is used to dynamically adjust the sampling rules and must be a letter grade A-F. (* from FPSINPUT.WIP_EVENT_HIST)

MERGE_INTO_PRD

VARCHAR2(64)

This is the prd of the lot into which this lot is merged if that prd is different than the prd of this lot. Typically this is an assembly step. This is important to track the prd flow from individual components into the final shipped prd. (* from FPSINPUT.WIP_EVENT_HIST)

MERGE_LOT_LIST

VARCHAR2(512)

Lot (or list of lots) merged with this lot by this merge event. A value here indicates this was a merge event. (* from FPSINPUT.WIP_EVENT_HIST)

MOVE_TYPE

VARCHAR2(9)

N

Move_type is populated with a value in WIP_MOVE_TYPES (COMP, ISKIP, etc.) for all records where is_next = Y. It is null when the qty changes but is_next = N and these "delta only" records will always have a delta_type. Note that it is possible and not unusual to have both move_type and delta_type when the lot both moves and changes qty with the same event.

MOVE_TYPE_W_CODE

VARCHAR2(10)

MPU

NUMBER(8,4)

MPU is a commonly used abbreviation which stands for minutes per unit. It is often referred to as MPW which for minutes per wafer but MPU is better because the unit is not always wafer. (* from FPSBASE.WIP_LOT_HIST)

NEXT_BANK

VARCHAR2(36)

Event moved the lot to this new bank (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_FACILITY

VARCHAR2(6)

Event moved the lot to this new facility (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_FACILITY_SEGMENT

VARCHAR2(36)

NEXT_MAIN_ROUTE

VARCHAR2(256)

Event moved the lot to this new main route (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_MAIN_RT_STEP

VARCHAR2(256)

Event moved the lot to this new step on the main route (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_OPERATION

VARCHAR2(50)

Operation of the next_step used primarily to determine is_oper_move. Populated by trigger. (* from FPSBASE.WIP_LOT_HIST)

NEXT_PLANPRD

VARCHAR2(64)

If this event results in the planprd of the lot changing the new value is stored here. (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_PRD

VARCHAR2(64)

Event moved the lot to this new prd (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_PROCESS

VARCHAR2(50)

Process of the next step. Populated by trigger. (* from FPSBASE.WIP_LOT_HIST)

NEXT_ROUTE

VARCHAR2(256)

Event moved the lot to this new route (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_ROUTE_SEGMENT

VARCHAR2(36)

NEXT_STEP

VARCHAR2(256)

Event moved the lot to this new step (* from FPSINPUT.WIP_EVENT_HIST)

NUM_DISCS_FOR_JOB

NUMBER(2)

Number of discs used in the job as estimated by our throughput logic. (* from FPSBASE.WIP_LOT_HIST)

NUM_SIBLING_LOTS

NUMBER(2)

A count of other lots that were also split from the same parent. (* from FPSINPUT.WIP_LOTS_STATIC)

NUM_STEPS_JUMPED

NUMBER(3)

Number of steps on route jumped by this move event. Each of these steps will have a JUMP event logged in WIP_STEP_HIST.

NUM_STEPS_MOVED

NUMBER(3)

The sequence number of the next step minus the sequence number of the previous step when moved on the same route. Importantly this is negative if the lot moves backwards. If this is greater than 1 then num_steps_jumped should be one less than this value but these are calculated differently so we record both and this is a reasonable check.

NUM_WFRS_BEG

NUMBER(3)

NUM_WFRS_ENDED

NUMBER(3)

OPERATION

VARCHAR2(50)

Operation is usually the primary level of routing in the MES and the level where the facility typically reports moves. FPS only allows one tool per step so our step is a lower level of routing than operation although both may be the same if the MES only allows one tool per operation. Note that because operation can include multiple steps and therefore multiple process families that we cannot have any association to equipment by operation. (* from FPSINPUT.RTG_OPERATIONS)

OPERATOR

VARCHAR2(64)

N

In history tables, this is the username of the person or system who logged the event. In EQP_MNT_FUTURE, this is the username of the person who input the information about the maintenance event. Usernames can be looked up in GEN_USERS to get full names, email address, etc. Please note that the existence of each username in GEN_USERS is optional, meaning that it is never required for the username logged in the operator column to be in GEN_USERS. (* from FPSINPUT.WIP_EVENT_HIST)

OPER_ENT_INST

DATE

ORDER_ID

VARCHAR2(64)

The customer order to which this lot belongs. (* from FPSINPUT.WIP_LOTS_STATIC)

ORIG_DUE_INST

DATE

Original Due Date of this lot (* from FPSINPUT.WIP_STARTS)

ORIG_PLAN_OUT_INST

DATE

Original plan out date for this lot in the current facility which was set for the lot at its creation or when it entered this facility. (* from FPSINPUT.WIP_LOTS_STATIC)

OVR_IS_QUEUE_ALLOWED

CHAR(1)

We stop lots from starting the first step in a queue timer when WIP is too high but this flag allows this specific lot to start despite this. Use for priority lots or sendahead lots or when we want to trickle lots into the timer. (* from FPSINPUT.WIP_LOTS_STATIC)

PARENT_LOT

VARCHAR2(32)

The parent lot should ideally be the original parent but it could be the most recent parent if multiple splits have occurred. (* from FPSINPUT.WIP_LOTS_STATIC)

PAUSE_INST

DATE

When a lot has begun processing on a tool and an event with event_type of PAUSE is logged, pause_inst captures the time of the pause. If multiple pauses happen to the same lot, the last pause_inst is used. See description of PAUSE ect_state for more details.

PERM_RANK

VARCHAR2(1)

Permanent rank is typically loaded by ETL from a combination of the MES, recipe management system, and existing preference logic already used at the site. Possible values are in FPSADMIN.RTG_PERM_RANKS. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

PLANPRD

VARCHAR2(64)

N

Planning product used for all planning purposes. All lots with the same planprd are interchangeable to ship to the customer regardless of their prd, route, technology, wafer size, etc. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PLANPRDS)

PLAN_OUT_INST

DATE

Current planned out date for this lot in the current facility. (* from FPSINPUT.WIP_LOTS_STATIC)

PLAN_PRIORITY

VARCHAR2(7)

N

Permanent priority of the lot set in the MES generally by planning. (* from FPSINPUT.WIP_EVENT_HIST)

PRD

VARCHAR2(64)

N

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PRDS)

PREV_END_PROC_INST

DATE

End_proc_inst of the previous job on the tool before the job including this lot. Subtracting this from the end_proc_inst of this job gives us the end-to-end time (EET) which is critical for throughput calculations. (* from FPSBASE.WIP_LOT_HIST)

PREV_PROCESS

VARCHAR2(50)

Process of the previous job on the tool before the job including this lot. Used in combination with prev_recipe to determine if this job cascaded and if it required a setup change. (* from FPSBASE.WIP_LOT_HIST)

PREV_QTY

NUMBER(7)

N

PREV_RECIPE

VARCHAR2(100)

Recipe of the previous job on the tool before the job including this lot. Used in combination with prev_process to determine if this job cascaded and if it required a setup change. (* from FPSBASE.WIP_LOT_HIST)

PREV_SEC_QTY

NUMBER(7)

N

PROCESS

VARCHAR2(50)

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

PROC_PORT

VARCHAR2(5)

PROC_PORT_MODE

VARCHAR2(24)

QTY

NUMBER(7)

N

Quantity of units in the lot according the qty_unit defined for the facility. It is required for all lots in each facility to have their qty defined in the same units therefore the change in the unit is critical to defining the facility. For example, a pretest facility might have a sort step in the middle where we learn the qty of die. Prior to this step we know only the wafer qty but after this step we know both wafer and die. Since wafer is the only qty we know throughput the flow then wafer must be defined as the qty unit for this facility. Die can then be populated as sec_qty when it is known. Similarly the wafer saw facility might have a step in the middle where we cut the wafers into die. After this step we no longer know the number of wafers which means that die must be the qty unit for this facility and wafers can be the sec_qty prior to the saw step. Please note that a lot with qty of 0 is allowed but only if the sec_qty is greater than 0. This is unusual but one case is where we know the wafers will be scrapped but cannot be scrapped quite yet. (* from FPSINPUT.WIP_EVENT_HIST)

QTY_DELTA

NUMBER(7)

N

Difference in number of wafers due to an event that changes lot quantity (* from FPSINPUT.WIP_EVENT_HIST)

QTY_IN_JOB

NUMBER(7)

The number of units in the job. For example a batch tool with 5 carriers each with a 25 wafer lot would have 125 in the job. This is also important for non-batch tools where we have multiple lots in a carrier as the job might include all lots or only selected lots. (* from FPSBASE.WIP_LOT_HIST)

QTY_MEAS

NUMBER(7)

Quantity of units measured at this metrology step. This is less than or equal to the qty_in_job. The standard case is where we have a 25 wafer lot so the qty_in_job is 25 but we only measure 3 wafers on the metrology tool so qty_meas is 3. (* from FPSINPUT.WIP_EVENT_HIST)

QUEUE_STATUS

VARCHAR2(8)

Display field showing the current status of this lot within a queue time sequence. (* from FPSINPUT.WIP_LOTS_STATIC)

READY_INST

DATE

Time when the lot was ready to be processed (e.g. after recipe downloaded).

RECIPE_VERSION

VARCHAR2(12)

This field is for historical tracking purposes only and is not used in any FPS calculation. (* from FPSINPUT.WIP_EVENT_HIST)

RESERVE_INST

DATE

Time when the lot was reserved to the tool either by Scheduler or external or manual reservation. As opposed to dispatch, reserve is only in the FPS DWH and therefore can be automatically undone.

RESERVE_SOURCE

VARCHAR2(5)

RESERVE_TOOL

VARCHAR2(16)

ROUTE

VARCHAR2(256)

N

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

ROUTE_SEGMENT

VARCHAR2(36)

Route_segment allows for clear hierarchical segment organization for Segment Summary and Line Viewer on Dashboard. This is often referred to as stage and typically will come from the MES (as opposed to facility_segment which we will typically have to define for our purposes). We recommend that all routes in the same route family have the same route segments in the same order so that the Line Viewer by route family will be consistent but if this is not the case then we approximate the order as best we can. (* from FPSINPUT.RTG_ROUTE_STEPS)

ROUTE_SEGMENT_ENT_INST

DATE

RQD_SETUP

VARCHAR2(100)

Rqd_setup is determined by ovr_rqd_setup in RTG_TOOL_ASSIGNMENTS and use_process_as_rqd_setup and use_est_mach_rcp_as_rqd_setup from EQP_TYPES. The latter two columns allow us to easily specify for an eqp_type that setup times should be calculated by process or est_machine_recipe. For traditional setups that are a group of recipes we use ovr_rqd_setup. (* from FPSBASE.WIP_LOT_HIST)

RT_STEP_BANK_ENT_INST

DATE

If the lot is at a step then this is the time when it entered the current route-step. If the lot is at a bank then this is the time it entered the current bank. (* from FPSBASE.WIP_LOTS_REALTIME)

SAH_CHAMBERS

VARCHAR2(24)

Send ahead chambers (* from FPSINPUT.WIP_LOTS_STATIC)

SAH_TOOL

VARCHAR2(16)

Send ahead tool (* from FPSINPUT.WIP_LOTS_STATIC)

SAH_TYPE

VARCHAR2(8)

Send ahead type is primarily used to set lot_priority. We often want to prioritize a sendahead lot only to the metrology tool so we can get metrology as soon as possible and start processing more lots. (* from FPSINPUT.WIP_SAH_TYPES)

SCRAP_CATEGORY

VARCHAR2(64)

A optional categorization field for scrap events which can be defined for the facility. (* from FPSINPUT.WIP_EVENT_HIST)

SCRAP_MODULE

VARCHAR2(12)

Responsible module for the scrap event. (* from FPSINPUT.WIP_EVENT_HIST)

SCRAP_OWNER

VARCHAR2(48)

Engineer responsible for analyzing and recording this scrap event. (* from FPSINPUT.WIP_EVENT_HIST)

SCRAP_PROCESS_FAMILY

VARCHAR2(50)

SEC_BEG_PROC_INST

DATE

Time when processing on secondary tool started.

SEC_END_PROC_INST

DATE

Time when processing on secondary tool finished.

SEC_QTY

NUMBER(7)

N

Quantity of units in the lot according the sec_qty_unit defined for the facility. See the column comment for the qty column for details and examples. (* from FPSINPUT.WIP_EVENT_HIST)

SEC_QTY_DELTA

NUMBER(7)

N

Difference in number of die due to an event that changes lot quantity (* from FPSINPUT.WIP_EVENT_HIST)

SEC_QTY_EST_TO_ACTUAL_DELTA

NUMBER(7)

SEC_TOOL

VARCHAR2(19)

SMP_REASON

VARCHAR2(256)

Reason for sampling (* from FPSINPUT.WIP_SMP_FUTURE)

SPLIT_LOT_LIST

VARCHAR2(512)

Lot (or list of lots) split along with this lot by this merge event. A value here indicates this was a split event. (* from FPSINPUT.WIP_EVENT_HIST)

STEP

VARCHAR2(256)

N

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

STEP_BLOCK_SEC

NUMBER(9)

N

STEP_DISP_SEC

NUMBER(9)

N

STEP_DOWN_SEC

NUMBER(9)

N

STEP_ENDED_SEC

NUMBER(9)

N

STEP_ENT_INST

DATE

N

Time when the lot entered the step. (* from FPSBASE.WIP_LOT_HIST)

STEP_FOR_LOT_INFO

VARCHAR2(256)

STEP_HOLD_SEC

NUMBER(9)

N

STEP_HOLD_SEC_CURR_DAY

NUMBER(8)

N

STEP_HOLD_SEC_CURR_SHIFT

NUMBER(8)

N

Time on hold at the current step during the current shift

STEP_NUM_HOLDS

NUMBER(2)

STEP_PROC_SEC

NUMBER(9)

N

STEP_SEC_DEBUG_NOTE

VARCHAR2(128)

N

STEP_SHUTD_SEC

NUMBER(9)

N

STEP_TOTAL_SEC

NUMBER(9)

N

STEP_WAIT_SEC

NUMBER(9)

N

TCT_SEC

NUMBER(7)

Theoretical cycle time in seconds (* from FPSBASE.WIP_LOT_HIST)

THP_IGNORE_REASON_WEH

VARCHAR2(12)

TOOL

VARCHAR2(16)

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

TW_BAD_QTY

NUMBER(7)

Only applicable to TW lots. This is the number of test wafers in the lot which are considered BAD. (* from FPSINPUT.WIP_LOTS_STATIC)

TW_GOOD_QTY

NUMBER(7)

Only applicable to TW lots. This is the number of test wafers in the lot which are considered GOOD. (* from FPSINPUT.WIP_LOTS_STATIC)

TW_RECYCLE_COUNT

NUMBER(4)

Only applicable to TW lots. This is the number of times the test wafers have been reused (* from FPSINPUT.WIP_LOTS_STATIC)