FPSAPP.ETP_ENTITY_SHIFT_HIST

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

ENTITY

VARCHAR2(19)

N

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* from FPSINPUT.EQP_STATUS_VERIFY)

ETP_STATE

VARCHAR2(48)

N

If entity is down then use eqp_state directly. If entity is up then determine etp_state from proc_state and sby_state. (* from FPSBASE.ETP_STATUS)

START_SHIFT

DATE

N

Shifts can be of any length and it is important that all queries get the shift length based on start_shift and end_shift rather than assuming a set number of hours. (* from FPSINPUT.CAL_SHIFTS)

SECONDS

NUMBER(9,3)

N