Data Dictionary
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FPSBASE Views
> FPSBASE.WIP_WAFER_HIST_LOOP
View FPSBASE.ETP_APD_ENTITY_E10_SHIFT_HIST
See detailed comments in EQP_APD_TOOL_E10_SHIFT_HIST IMPORTANT NOTE: The major difference between all of the ExP_APD_y_E10_z_HIST views are: entity vs. tool, ETP vs. EQP, and shift-based vs. plan-based Entity vs. tool has important logical differences, but, ETP vs. EQP and shift-based vs. plan-based are nearly identical. When making changes, just edit one of the two then it is safe to find/replace EQP and ETP for the first three sections only with three exceptions. EQP_UNITS_plan_day_HIST and ETP_MNT_EPISODE_HIST are table names in both views plus column is_eqp_related_event is in both. Fortunately those will error if you find/replace so it is actually fine to find/replace everything in these first three sections and then fix errors on these two tables and one column. Everything below that starting with episode_sums is identical in both views and should be copied directly. All EQP/ETP must stay.
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Column |
Comment |
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FACILITY |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES) |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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ENTITY |
The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY) |
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START_SHIFT |
Shifts can be of any length and it is important that all queries get the shift length based on start_shift and end_shift rather than assuming a set number of hours. (* inherited from FPSINPUT.CAL_SHIFTS) |
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END_SHIFT |
End of shift must be equal to the start of the next shift. Please note that the exact time which is both of the end of the previous shift and the start of the next shift is included in the next shift. In other words, start_shift <= inst < end_shift. (* inherited from FPSINPUT.CAL_SHIFTS) |
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SHIFT |
Name of shift must be unique and can be in any format as long as it is display friendly since this is what we show everywhere. We prefer that other tables should reference start_shift rather than shift in case we want to change the naming convention for the shift. (* inherited from FPSINPUT.CAL_SHIFTS) |
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MTBF_U |
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MFD_U |
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E_MTBF_U |
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MTBF_P |
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MFD_P |
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E_MTBF_P |
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ATU |
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AOU |
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E_AOU |
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E_AOSDT |
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E_AOUDT |
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MTTPM |
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MTTR |
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E_MTTR |
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MTOL |
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TFR |
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IT |
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UTU |
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UOU |
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AMU |
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MTTI |
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MTTQ |
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MUBF |
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E_MUBF |
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E10_TOTAL |
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E10_TOTAL_ENTITIES |
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E10_NST |
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E10_UDT |
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E10_UDT_WO_WAITS |
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E10_E_UDT |
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E10_UDT_ENTITIES |
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E10_E_UDT_ENTITIES |
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E10_UDT_WO_WAITS_ENTITIES |
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E10_UDT_QUAL_ENTITIES |
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E10_SDT |
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E10_SDT_WO_WAITS |
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E10_E_SDT |
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E10_SDT_ENTITIES |
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E10_E_SDT_ENTITIES |
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E10_SDT_PM_ENTITIES |
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E10_SDT_QUAL_ENTITIES |
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E10_ENG |
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E10_PRD |
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E10_SBY |
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E10_MFG |
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E10_EQP_UP |
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E10_EQP_DOWN |
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E10_OPER |
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E10_E_OPER |
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N_UDT_EPISODES |
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N_E_UDT_EPISODES |
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N_UDT_P_EPISODES |
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N_E_UDT_P_EPISODES |
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N_UDT_EPISODES_ENTITIES |
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N_E_UDT_EPISODES_ENTITIES |
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N_UDT_P_EPISODES_ENTITIES |
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N_SDT_EPISODES |
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N_E_SDT_EPISODES |
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N_SDT_P_EPISODES |
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N_SDT_EPISODES_ENTITIES |
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N_SDT_P_EPISODES_ENTITIES |
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N_E_SDT_EPISODES_ENTITIES |
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N_PM_EPISODES_ENTITIES |
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N_CDT_EPISODES |
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N_CDT_EPISODES_ENTITIES |
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N_ONLY_ALARMS |
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N_ONLY_QUALS |
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N_QUALS |
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UNITS |