Data Dictionary
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FPSINPUT Views
> FPSINPUT.WIP_WAFER_HIST_LOOP
View FPSBASE.ETP_APD_ENTITY_E10_WEEK_HIST
See detailed comments in EQP_APD_TOOL_E10_SHIFT_HIST
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Column |
Comment |
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START_WEEK |
Work weeks must be 7 days in duration and the start of the work week must be the start of one of the work days. (* inherited from FPSINPUT.CAL_WORK_WEEKS) |
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END_WEEK |
It is critical that this field equal the start_week of the next work work. (* inherited from FPSINPUT.CAL_WORK_WEEKS) |
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WORK_WEEK |
Name of work week must be unique and can be in any format as long as it is display friendly since this is what we show everywhere. (* inherited from FPSINPUT.CAL_WORK_WEEKS) |
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FACILITY |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES) |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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ENTITY |
The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY) |
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MTBF_U |
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MFD_U |
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E_MTBF_U |
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MTBF_P |
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MFD_P |
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E_MTBF_P |
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ATU |
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AOU |
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E_AOU |
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E_AOSDT |
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E_AOUDT |
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MTTPM |
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MTTR |
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E_MTTR |
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MTOL |
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TFR |
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IT |
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UTU |
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UOU |
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AMU |
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MTTI |
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MTTQ |
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MUBF |
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E_MUBF |
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E10_TOTAL |
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E10_TOTAL_ENTITIES |
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E10_NST |
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E10_UDT |
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E10_UDT_WO_WAITS |
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E10_E_UDT |
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E10_UDT_ENTITIES |
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E10_E_UDT_ENTITIES |
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E10_UDT_WO_WAITS_ENTITIES |
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E10_UDT_QUAL_ENTITIES |
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E10_SDT |
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E10_SDT_WO_WAITS |
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E10_E_SDT |
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E10_SDT_ENTITIES |
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E10_E_SDT_ENTITIES |
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E10_SDT_PM_ENTITIES |
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E10_SDT_QUAL_ENTITIES |
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E10_ENG |
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E10_PRD |
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E10_SBY |
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E10_MFG |
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E10_EQP_UP |
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E10_EQP_DOWN |
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E10_OPER |
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E10_E_OPER |
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N_UDT_EPISODES |
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N_E_UDT_EPISODES |
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N_UDT_P_EPISODES |
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N_E_UDT_P_EPISODES |
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N_UDT_EPISODES_ENTITIES |
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N_E_UDT_EPISODES_ENTITIES |
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N_UDT_P_EPISODES_ENTITIES |
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N_SDT_EPISODES |
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N_E_SDT_EPISODES |
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N_SDT_P_EPISODES |
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N_SDT_EPISODES_ENTITIES |
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N_SDT_P_EPISODES_ENTITIES |
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N_E_SDT_EPISODES_ENTITIES |
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N_PM_EPISODES_ENTITIES |
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N_CDT_EPISODES |
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N_CDT_EPISODES_ENTITIES |
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N_ONLY_ALARMS |
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N_ONLY_QUALS |
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N_QUALS |
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UNITS |