FPSINPUT.EQP_CH_ALLOWED_STATUS

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

CH_ALLOWED

VARCHAR2(24)

N

List of chambers allowed using the single character CH from EQP_CHAMBERS. While the concepts of cap_entity (capacity entity) and ch_type are important to our logic we agreed that there is no RMS or EI or MES on the planet that understands these concepts. All of these systems go by tool and chambers allowed and therefore our input tables must do the same. We list all chambers that can run and then calculate subsets of these chambers based on CH_TYPE. If all chambers are the same type then we assume you can run on any one or more of the chambers allowed. If the chambers are different types then we assume that at least one chamber of each type is required to run. If you populate either RTG_TOOL_ASGN_LOT_xxx_PATH table then you can leave ch_allowed blank since it will not be used. However there is nothing wrong with populating ch_allowed as a backup plan. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

RQD_SETUP_OR_NA

VARCHAR2(100)

N

CH_ALLOWED_EST_CH_USED

VARCHAR2(24)

CH_ALLOWED_NONMFG_E10_STATES

VARCHAR2(15)

CH_ALLOWED_NONMFG_MSG

VARCHAR2(1000)

CH_ALLOWED_PENDING_MSG

VARCHAR2(1000)