FPSINPUT.SCH_P_CURR_TOOL_ZONES

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

ZONE

A zone belongs to a main tool similar to a chamber but unlike a chamber a zone does not have a state. Instead zones are only used for lot-based tool assignments based on the ZONES_ALLOWED column. Zones are mostly commonly used on furnaces which typically have either four or six zones (also referred to as boats) and some sensitive recipes can be inhibited from processing on certain zones due to optimal temperature requirements. Similar to the CH column in EQP_CHAMBERS, each zone must be a single character for easy parsing of the ZONES_ALLOWED column. (* inherited from FPSINPUT.EQP_ZONES)

DESCRIPTION

Tool desciption. This value is only used to display in the Dashboard. (* inherited from FPSINPUT.EQP_TOOLS)