FPSADMIN.MSOUI_P_RULES_CHANGE_HIST

PARENT_TRANSACTION_ID

TRANSACTION_INST

TRANSACTION_TYPE

TRANSACTION_ID

SMP_RULE_ID

The tag condition that corresponds with the specified sample rule. This must already be defined in MSO_EXTL_TAG_CONDITIONS. (* inherited from FPSINPUT.MSO_EXTL_RULE_TAG_COND)

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

SMP_RULE_NAME

User friendly name of the sample rule. Always tied to the Rule ID but can be modified if the user wants to change the name. (* inherited from FPSBASE.MSO_RULES)

SMP_RULE_TYPE

Set what type of sample rule this is (Percent, Time or Event). (* inherited from FPSBASE.MSO_RULES)

RULE_GROUP

Unique name for the group. (* inherited from FPSBASE.MSO_RULE_GROUPS)

SMP_RULE_CONDITION

Number indicating when to tag lots for the rule based on the type selected. (* inherited from FPSBASE.MSO_RULES)

DECISIONS_TO_SEND

Define what decisions are sent to the MES. Possible values are SKIP, TAG, or ALL. If you only want the rule to send TAG decision, then setting this to TAG would keep SKIP decisions from being sent to the MES. (* inherited from FPSBASE.MSO_RULES)

EXPIRY_DEACTIVATE_INST

Date column that automatically sets the tag condition to inactive once the date is past. (* inherited from FPSBASE.MSO_TAG_CONDITIONS)

EXPIRY_WARN_INST

Time to warn the creator of the rule that the rule is about to expire. (* inherited from FPSBASE.MSO_RULES)

IS_ACTIVE

Flag to enable or disable the tag condition. (* inherited from FPSBASE.MSO_TAG_CONDITIONS)

CHAMBER_EACH_NA

Define what chambers will be tracked in the MSO_RULE_COUNTER_HIST tables. (* inherited from FPSBASE.MSO_RULES)

LOT_GROUP_EACH_NA

Define what lot groups will be tracked in the MSO_RULE_COUNTER_HIST tables. (* inherited from FPSBASE.MSO_RULES)

LOT_PARM_NAME

Lots that have this MES parameter set with its corresponding value will be tagged or never tagged, depending on the condition type that is selected. If the value is NULL the check is ignored. (* inherited from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

LOT_PARM_VALUE

Lots that have this MES parameter value will be tagged or never tagged, depending on the condition type that is selected. If the value is NULL the check is ignored. (* inherited from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

PLAN_PRIORITY_NA

Lots that are of the defined plan priority will be tagged or never tagged, depending on the condition type that is selected. If the value is NA the check is ignored. (* inherited from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

PRD_EACH_NA

Define what Prds will be tracked in the MSO_RULE_COUNTER_HIST tables. (* inherited from FPSBASE.MSO_RULES)

PRD_MSO_GROUP_EACH_NA

Define what PRD_MSO_GROUPS will be tracked in the MSO_RULE_COUNTER_HIST tables. (* inherited from FPSBASE.MSO_RULES)

ROUTE_EACH_NA

Define what routes will be tracked in the MSO_RULE_COUNTER_HIST tables. (* inherited from FPSBASE.MSO_RULES)

ROUTE_MSO_GROUP_EACH_NA

Define what ROUTE_MSO_GROUPS will be tracked in the MSO_RULE_COUNTER_HIST tables. (* inherited from FPSBASE.MSO_RULES)

TOOL_EACH_NA

Define what tools will be tracked in the MSO_RULE_COUNTER_HIST tables. Note this value can and TOOL_MSO_GROUP_EACH_NA can not both be NA when setting up an EVENT type rule. (* inherited from FPSBASE.MSO_RULES)

TOOL_MSO_GROUP_EACH_NA

Define what TOOL_MSO_GROUPS will be tracked in the MSO_RULE_COUNTER_HIST tables. Note this value can and TOOL_EACH_NA can not both be NA when setting up an EVENT type rule. (* inherited from FPSBASE.MSO_RULES)

CHAMBER_MSO_GROUP_EACH_NA

Define what chambers mso groups will be tracked in the MSO_RULE_COUNTER_HIST tables. (* inherited from FPSBASE.MSO_RULES)

USER_ID

The user Id that initiated the last move of this carrier (* inherited from FPSINPUT.MHS_CARRIERS)

WRITE_DECISION_TO_EXTL_SOURCE

MAX_CONSEC_SKIP_TRG_MES_ACTION

Maximum number of consecutive skip decisions that are allowed for a PERCENT/TIME rule before MES action is triggered by MSO. This limit will not automatically set lots to tag, rather tell the MSO system to initiate a message to the MES (i.e. log tools down) (* inherited from FPSBASE.MSO_RULES)

MAX_LAR_TRIGGER_MES_ACTION

Maximum number of consecutive lots at risk for a PERCENT/TIME rule before MES action is triggerd by MSO. This limit will not automatically set lots to tag, rather tell the MSO system to initiate a message to the MES (i.e. log tools down) (* inherited from FPSBASE.MSO_RULES)

MIN_CON_SKIP_ALLOW_TAG_OVR

Minumum number of consecutive skip decisions that must occur for a PERCENT/TIME rule before the next lot that process will be tagged to measure, regardless of the sample rate. In certain cases we do not want lots that run back to back at the main process step be selected to measure at Metrology. (* inherited from FPSBASE.MSO_RULES)

MAX_CON_SKIP_TAG_NEXT_LOT_OVR

Maximum number of consecutive skip decisions that are allowed for a PERCENT/TIME rule before the next lot that process will be tagged to measure, regardless of the sample rate. In cases where rule interaction may tag multiple lots we do not want to skip many lots until the sample rate drops. (* inherited from FPSBASE.MSO_RULES)

NUM_LOTS_HIST_CUTOFF_OVR

Number of lots to keep in the sampling decision history. Based on the history is how the MSO makes a decision to sample, calculate the sample rate and counters. This only applies for a PERCENT rule. (* inherited from FPSBASE.MSO_RULES)

LOT_MSO_GROUP_EACH_NA

Define what lot mso groups will be tracked in the MSO_RULE_COUNTER_HIST tables. (* inherited from FPSBASE.MSO_RULES)

MAX_CONSECUTIVE_SKIP_WARN

Value to be used in reporting and for alerts when the maximum number of skips is getting high for the rule. This value does not impact actual sampling decisions. (* inherited from FPSBASE.MSO_RULES)

MAX_LAR_WARN

Value to be used in reporting and for alerts when the maximum number of lots at risk is getting high for the rule. This value does not impact actual sampling decisions. (* inherited from FPSBASE.MSO_RULES)

MAX_CONSEC_SKIP_MES_PARAMETER

Configurable parameter that will be sent to the MES if the maximum consecutive skip trigger mes action limit is exceeded. (* inherited from FPSBASE.MSO_RULES)

MAX_LAR_MES_PARAMETER

Configurable parameter that will be sent to the MES if the maximum lots at risk trigger mes action limit is exceeded. (* inherited from FPSBASE.MSO_RULES)

RULE_CONDITION_MIN

Allows user to define a recommended min value for the rule condition. When user is updating a rule, this will give them values to keep the condition within. It will not actually restrict the value though. (* inherited from FPSBASE.MSO_RULES)

RULE_CONDITION_MAX

Allows user to define a recommended max value for the rule condition. When user is updating a rule, this will give them values to keep the condition within. It will not actually restrict the value though. (* inherited from FPSBASE.MSO_RULES)

RULE_DESCRIPTION

Allows the user to give the rule a description that is more detailed than the rule name. (* inherited from FPSBASE.MSO_RULES)

MES_ACTION_COMMENT

User can store a comment value by rule that can be sent to the MES when logging a tool down. (* inherited from FPSBASE.MSO_RULES)

RULE_OWNER

Configurable text field to assign a rule owner. (* inherited from FPSBASE.MSO_RULES)

RULE_OWNER_EMAIL

Configurable text field to assign a rule owner email. (* inherited from FPSBASE.MSO_RULES)

RULE_GROUP_MIN_CONDITION_OVR

Minimum value allowed for rule group to override the sample condition. If toolstatus condition dynamically moves the sample condition below this value, then this will cap it. Rule Group dynamic sampling will not be allowed to go lower than this threshold. (* inherited from FPSBASE.MSO_RULES)

IS_QUEUE_SKIP_ENABLED

Flag set to allow lots to be automatically skipped if a lot that was run later on the main processing tool is already at metrology or has already run through metrology. (* inherited from FPSBASE.MSO_RULES)

FILTER

The name of the filter to be defined in the UI. The filter can be used by multiple rules. (* inherited from FPSBASE.MSO_FILTER_PARAM_VALUES)