FPSAPP.CTR_P_WIP_STEP_HIST

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

LOT

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

PRD

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* inherited from FPSINPUT.RTG_PRDS)

PLANPRD

Planning product used for all planning purposes. All lots with the same planprd are interchangeable to ship to the customer regardless of their prd, route, technology, wafer size, etc. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* inherited from FPSINPUT.RTG_PLANPRDS)

EVENT

This is the event registered in the MES. This is for the historical record and display only. Each event is mapped to an FPS event_type and the event_type is what is used by FPS applications. (* inherited from FPSINPUT.WIP_EVENTS)

EVENT_TYPE

Event Type (* inherited from FPSINPUT.EQP_SCHED_EVENTS_MANUAL)

START_INST

Time when the lot started. (* inherited from FPSINPUT.WIP_STARTS)

FIRST_STEP_ENT_INST

LAST_STEP_MOVE_INST

FINISHED_INST

IS_FINISH_EVENT

NEXT_DISPLAY

FINISHED_PERIOD

PERIOD_SORT_ORDER

This column is only to sort the periods in the FLCT application. Normally this will match the period_start_inst but when sites has multiple period types like months and years then it is nice to be able to control the sort order. (* inherited from FPSINPUT.WIP_CTM_FORECAST)

PERIOD_TYPE

START_PERIOD

END_PERIOD

BEG_PROC_INST

time when the lot started processing on the main tool. (* inherited from FPSINPUT.WIP_STEP_HIST_MANUAL)

END_PROC_INST

time when the lot finished processing on the main tool. (* inherited from FPSINPUT.WIP_STEP_HIST_MANUAL)

WAFER_SIZE

If the facility only has one wafer size then this column should be null in both RTG_PRDS and EQP_TYPES. If the facility has more than one wafer size then a value of null in EQP_TYPES means that those tools can run all wafer sizes. See column IS_ANY_WAFER_SIZE for details. (* inherited from FPSINPUT.GEN_WAFER_SIZES)

ROUTE_FAMILY

Route_family indicates that all routes within the family have similar or even identical steps and have the same segments. At facilities where various prds share the same route it is likely that the route will be the route_family. This is sometimes referred to as the main process flow. It is used on Segment Summary and Line Viewer to group similar routes. (* inherited from FPSINPUT.RTG_ROUTE_FAMILIES)

ROUTE_GROUP

Route_group is the parent of route_family. Route_group is used on the Dashboard and other applications as a large grouping for filtering. At many sites this is referred to as technology. (* inherited from FPSINPUT.RTG_ROUTE_GROUPS)

LOT_OR_PARENT

LOT_SEQ_WITHIN_SEC

For rows with identical timestamps, sequence records to get proper sequence (* inherited from FPSINPUT.WIP_EVENT_HIST)

BANK

Lots which are not on a route are considered in a bank and the bank name indicates why the lot is off route. Bank must be NA for lots which are on a route. Our standard filter for active lots is bank = NA. (* inherited from FPSINPUT.RTG_BANKS)

STEP

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

ROUTE

Route that has threading requirements (* inherited from FPSINPUT.RTG_STEP_THREADING)

MAIN_ROUTE

Primary route used by the prd. Excludes rework and alternate routing. We allow this column to be null in WIP_LOTS_VERIFY because we may not be certain what the main route is when we fix for missed events. In that event we trust the WIP_EVENT_HIST triggers has loaded the correct information into WIP_EVENTS_CURR_STEP. (* inherited from FPSINPUT.WIP_EVENT_HIST)

MAIN_RT_STEP

When lot is on a rework or alternate route, this is the step where it will return to the main route. We use this for planning purposes so we can calculate remaining steps. We allow this column to be null in WIP_LOTS_VERIFY because we may not be certain what the main route step is when we fix for missed events. In that event we trust the WIP_EVENT_HIST triggers has loaded the correct information into WIP_EVENTS_CURR_STEP. (* inherited from FPSINPUT.WIP_EVENT_HIST)

IS_MAIN_ROUTE

Y indicates the route is the main processing route for PRD. N indicates it is a rework or alternate route. (* inherited from FPSBASE.RTG_ACTIVE_PRD_ROUTES_BASE)

LOT_TYPE

Lot_type is the base of the hierarchy that determines lot_family then lot_group. Ideally lot_type will come straight from the MES with little modification. (* inherited from FPSINPUT.WIP_LOT_TYPES)

LOT_FAMILY

Lot_family is a grouping of lot_type which is mainly use for goal planning. We set goals by family and are allowed to switch goals for different lots of different types within the family. We also report goal performance by family. (* inherited from FPSINPUT.WIP_LOT_FAMILIES)

LOT_GROUP_AT_STEP

LOT_GROUP

Lot_group is a grouping of lot_family and is the highest grouping in the lot type hierarchy. There should be only a few values for lot_group, i.e. Prod, Dev, TW. We group WIP and moves by lot_group on the dashboard and we group cycle time calculations by lot_group so this is an important field. (* inherited from FPSINPUT.WIP_LOT_GROUPS)

CURR_PRIORITY

The priority at the current step. As the lot moves along the route after LAST_STEP_CURR_PRTY it will revert to PLAN_PRIORITY. For example, timelink or sendahead priority is only temporary. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

CURR_PRIORITY_DISPLAY

PLAN_PRIORITY

Permanent priority of the lot set in the MES generally by planning. (* inherited from FPSINPUT.WIP_EVENT_HIST)

QTY

Quantity of units in the lot according the qty_unit defined for the facility. It is required for all lots in each facility to have their qty defined in the same units therefore the change in the unit is critical to defining the facility. For example, a pretest facility might have a sort step in the middle where we learn the qty of die. Prior to this step we know only the wafer qty but after this step we know both wafer and die. Since wafer is the only qty we know throughput the flow then wafer must be defined as the qty unit for this facility. Die can then be populated as sec_qty when it is known. Similarly the wafer saw facility might have a step in the middle where we cut the wafers into die. After this step we no longer know the number of wafers which means that die must be the qty unit for this facility and wafers can be the sec_qty prior to the saw step. Please note that a lot with qty of 0 is allowed but only if the sec_qty is greater than 0. This is unusual but one case is where we know the wafers will be scrapped but cannot be scrapped quite yet. (* inherited from FPSINPUT.WIP_EVENT_HIST)

QTY_DELTA

Difference in number of wafers due to an event that changes lot quantity (* inherited from FPSINPUT.WIP_EVENT_HIST)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

PROCESS_DISPLAY

The name of the process displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the process. (* inherited from FPSINPUT.RTG_PROCESSES)

PROCESS_MODULE

WIP_MODULE is used to credit moves and set goals. See comments on the module column in GEN_MODULES for info on this column and how it relates to eqp_module and mnt_module. (* inherited from FPSBASE.RTG_ROUTE_STEPS_PLUS)

PROCESS_MODULE_DISPLAY

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

SEQ_NUM

Sequence number of step in route (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

MAIN_RT_SEQ_NUM

OPERATION

Operation is usually the primary level of routing in the MES and the level where the facility typically reports moves. FPS only allows one tool per step so our step is a lower level of routing than operation although both may be the same if the MES only allows one tool per operation. Note that because operation can include multiple steps and therefore multiple process families that we cannot have any association to equipment by operation. (* inherited from FPSINPUT.RTG_OPERATIONS)

OPERATION_DISPLAY

All xxx_display columns are used in place of the column xxx for display purposes. The values of these columns can be changed at any time without having to worry about other tables referencing it. (* inherited from FPSINPUT.RTG_OPERATIONS)

STEP_ENT_INST

Time when the lot entered the step. (* inherited from FPSBASE.WIP_LOT_HIST)

INST

Time when the event occurred. (* inherited from FPSINPUT.WIP_EVENT_HIST)

IS_SHIP_EVENT

This flag tells us what to count as a ship for a particular facility. Related to the ship event is the finish event which is the last event for a facility-prd which either changes facility or changes prd or terminates the lot by changing the qty to 0 without merging. Often the ship event is the same event as the finish event. But when the ship event is different and logged prior to the finish event, we write a record to CTM_FINISHED_LOT_HIST when the ship event is logged with finish_inst blank. This record is include in Dashboard Ships Summary but not in Finished Lot Cycle Time. Then later when the lot finishes, we update the record keeping the ship_inst and populating the finish_inst so it is then including in Finished Lot Cycle Time. Technically this "insert at ship then update at finish" process is the same regardless of how far the ship is before the finish but it is most critical when the the ship is quite some time before the finish, for example, when wafer test is part of the same route but we want to count the ship when the lot finishes the fab steps. (* inherited from FPSINPUT.WIP_EVENT_HIST)

IS_OPER_MOVE

The critical Dashboard metric we call oper moves is moves according to the specific definition of the site, usually the moves calculation they used prior to installation of the FPS Dashboard. If Y then this step move meets the specific criteria for the site to be counted as an oper move. (* inherited from FPSBASE.WIP_STEP_HIST)

IS_OPER_COMP

COMMIT_STEP_SEC_TO_EOL

TARGET_STEP_SEC_TO_EOL

ACTUAL_DAYS_SINCE_START

ACTUAL_DAYS_TO_FINISH

COMMIT_DAYS_TO_FINISH

TARGET_DAYS_TO_FINISH

COMMIT_DAYS_SINCE_START

TARGET_DAYS_SINCE_START

86400

PROC_SEC

86400

STEP_SEC

Step Sec (* inherited from FPSAPP.SCH_W_H_S_LOTS)

LAST_TOOL

For rework and scrap events we automatically look up the last tool where the lot processed including metrology tools. (* inherited from FPSBASE.WIP_LOT_HIST)

LAST_TOOL_INST

LAST_PROCESS_TOOL_INST

LAST_PROCESS_TOOL

For rework and scrap events we automatically look up the last process tool for the lot. Process tool is determined by the process class of the tool and excludes metrology and support tools. It is likely this was the cause of the rework or scrap although by no means certain. (* inherited from FPSBASE.WIP_LOT_HIST)

LAST_RELEASE_INST

Time the lot was previously released from hold. (* inherited from FPSBASE.WIP_STEP_HIST)

DUE_INST

To indicate the due date for this futuer start lot (* inherited from FPSINPUT.WIP_STARTS)

STEP_HOLD_SEC

FIRST_HOLD_TYPE

FIRST_HOLD_COMMENT

DISPATCH_INST

Time when the lot indicated in the MES that it will process on the tool. As opposed to reserve, dispatch cannot be automatically undone. (* inherited from FPSBASE.WIP_STEP_HIST)

DISPATCHED_BY

READY_INST

Time when the lot was ready to be processed (e.g. after recipe downloaded). (* inherited from FPSBASE.WIP_STEP_HIST)

PREV_END_PROC_INST

End_proc_inst of the previous job on the tool before the job including this lot. Subtracting this from the end_proc_inst of this job gives us the end-to-end time (EET) which is critical for throughput calculations. (* inherited from FPSBASE.WIP_LOT_HIST)

FIRST_WFR_BEG_INST

Time when the first wafer of the job started processing. (* inherited from FPSBASE.WIP_STEP_HIST)

FIRST_WFR_END_INST

Time when the first wafer of the job finished processing. (* inherited from FPSBASE.WIP_STEP_HIST)

LAST_WFR_BEG_INST

Time when the last wafer of the job started processing. (* inherited from FPSBASE.WIP_STEP_HIST)

LAST_WFR_END_INST

Time when the last wafer of the job finished processing. (* inherited from FPSBASE.WIP_STEP_HIST)

GOAL_BEGIN_INST

Time when the lot has to complete the current step to remain on schedule. (* inherited from FPSBASE.WIP_STEP_HIST)

CREATED_INST

Time when the lot was created, either lot start or split. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

ORIG_DUE_INST

Original Due Date of this lot (* inherited from FPSINPUT.WIP_STARTS)

PLAN_OUT_INST

Current planned out date for this lot in the current facility. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

ORIG_PLAN_OUT_INST

Original plan out date for this lot in the current facility which was set for the lot at its creation or when it entered this facility. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

COMMIT_STEP_SEC

TARGET_STEP_SEC

CTM_SERIES

This is a grouping across facilities for our Finished Lot Cycle Time application indicating prds which make up the same or similar final product to be shipped. Prds are allowed to be in multiple series - for example when a generic prd A is assembled together with various specific prds B1, B2, B3. (* inherited from FPSINPUT.RTG_PRD_CTM_SERIES)

CTM_SERIES_SEQ_IN_FAC