FPSBASE.MHS_ALL_POSSIBLE_LOCATIONS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

LOCATION

Location of a carrier or lot or durable which comes directly from the tracking system used at the site. This could be a port or internal tool location or tool or rack or stocker or zero footprint storage or room or really anywhere. Many non-automated sites allow users to manually enter locations into their system. Therefore unless we know for sure that the source data implements a size limitation, it is recommended to always trim the value in the ETL to 32 characters to fit into the column size and avoid load errors. For ports, location is the full name of the port which is unique across the entire site and usually includes the tool name. Please see the comment in the port column which explains the difference between location and port. Rack locations are similar. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

STATION

The rack, bay, building, tool, cart, or stocker which has alternately acceptable stations (* inherited from FPSINPUT.MHS_STATION_ALTERNATES)

BAY

A bay is a physical area within the building. The bay is important for estimating travel time for a carrier to reach its destination as we usually store these estimates as a matrix of bay-to-bay and assume that the estimated time from any location within one bay to any location within another bay is approximately the same. (* inherited from FPSINPUT.MHS_BAYS)

BUILDING

Building is the top of our MHS hierarchy at each site. It is independent of facility which is at the top of our EQP/RTG hierarchy. It is possible for a building to include multiple facilities and for a facility to include multiple buildings but we do not even need to define these relationships because EQP_TOOLS determines this by the combination of the facility and bay columns (since bay points to building). (* inherited from FPSINPUT.MHS_BUILDINGS)

SHORT_LOCATION

PORT

Port is the short name of the port on the tool like P1 or LLA. This field is unique within the given tool and is used to save space when we already know the tool, for example in the dashboard tool hover where we show the status of each port. This column is in contrast to the location field which is the full name of the port. Location is unique within the entire facility and almost always includes the tool name like ET99P1 or ET99LLA. In addition, location is usually available from the MES or AMHS as this must be an exact match with the location in MHS_CARRIERS if this gets set when a carrier is placed on the port. On the other hand, the shorter port column is often not available in the MES so we either populate manually or with some complex if-then logic in the ETL based on the naming standards. (* inherited from FPSINPUT.EQP_PORTS)

PORT_MODE

PORT_MODE is the port equivalent to EQP_STATE. Examples might be AUTOMATIC, MANUAL, SEMI-AUTOMATIC, or DOWN. If configured in GEN_FACILITIES, the view DASH_P_TOOL_PORTS can overlay whether the port is occupied along with its carrier and the WIP processing states over the port modes as long as the port mode has is_up set to Y. Therefore it is not necessary to reflect occupied or empty when developing the ETL logic to populate the EQP_PORTS table. (* inherited from FPSINPUT.EQP_PORT_MODES)

LOCATION_TYPE

STATION_TYPE

DESCRIPTION

Tool desciption. This value is only used to display in the Dashboard. (* inherited from FPSINPUT.EQP_TOOLS)

MNT_FAMILY

MNT_FAMILY is assigned to each EQP_TYPE. Tools in the same MNT_FAMILY are similar and share the same maintenance schedule. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

MNT_MODULE

MNT_MODULE is the module responsible for maintaining the tool and is a property of MNT_FAMILY. See comments on the module column in GEN_MODULES for how it relates to eqp_module and mnt_module. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

CAST_CAPACITY

Maximum number of cassettes that can be stored. We define cassette as a carrier for a lot. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

BARE_WFR_CAPACITY

Maximum number of bare wafers that can be stored. Bare wafers are lots which are not in a cassette. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

POD_CAPACITY

Maximum number of pods that can be stored. We define pod as a carrier for a durable. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

BARE_DRBL_CAPACITY

Maximum number of bare durables that can be stored. Bare durables are durables which are not in a pod. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

COORD_X

This is the x coordinate position of the location within its station, in other words horizontal position. The maximum coord_x is the width of the station. This is optional and is often used for racks and sometimes for carts so we can determine the exact position of the carrier to make it easier to find. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

COORD_Y

This is the y coordinate position of the location within its station, in other words vertical position or shelf number. The maximum coord_y is the height of the station. This is optional and is often used for racks and sometimes for carts so we can determine the exact position of the carrier to make it easier to find. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

COORD_Z

This is the z coordinate position of the location within its station, in other words front-to-back position. This is usually 1. The maximum coord_z is the depth of the station. This is optional and is often used for racks and sometimes for carts so we can determine the exact position of the carrier to make it easier to find. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

IS_AMHS

This field indicates if the stocker is part of the Automated Material Handling System. (* inherited from FPSINPUT.MHS_STOCKERS)

IS_OUTPUT_FOR_BAY

This flag indicates if this rack qualifies as an output rack for the bay for NextMove. (* inherited from FPSINPUT.MHS_RACKS)

STATION_DISPLAY

IS_DISPLAY_SLOT

Identifies slot on smart rack where the tablet is positioned, so a lot is unable to be stored there. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

CHECK_FOR_DUPLICATES