FPSADMIN.SCH_P_CURR_LOTS_A

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

LOT

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

CARRIER

RFID of the cassette or FOUP the lot is currently in. (* inherited from FPSINPUT.MHS_CARRIERS)

IS_CURR

Boolean flag where Y indicates this row is for the current main route or product. Same as flush_seq_num = 1. (* inherited from FPSBASE.WIP_FLUSH)

SCHED_STATE

PRD

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* inherited from FPSINPUT.RTG_PRDS)

MAIN_ROUTE_GROUP

Route group of main route. Often referred to as technology. (* inherited from FPSBASE.WIP_FLUSH)

ROUTE

Route that has threading requirements (* inherited from FPSINPUT.RTG_STEP_THREADING)

STEP

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

EST_SMP_PCT

Smp_pct tells you what percentage of the lots complete on a tool. Some sites skip steps by jumping over them so we see the lot move from step 3 to step 5 and we only know that it jumped step 4 because step 4 is on the route between 3 and 5. Other sites skip steps by moving lots into them and then moving them out a second later so we see a move from 3 to 4 at 11:11:11 and a move from 4 to 5 at 11:11:12. We do not care how it is done but just that the lot did not process at step 4 -- and to be more specific that no tool capacity is required to process this lot at step 4 and no cycle time is accumulated at step 4. (* inherited from FPSBASE.WIP_GOAL_LOT_SHIFT)

SEQ_NUM

Sequence number of step in route (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

NUM_STEPS_AWAY

Number of steps away not including steps which we know will be skipped nor those which we estimate will be skipped at least x pct of the time. This x value is configurable in GEN_FACILITIES using the smp_pct_for_num_steps_away column. (* inherited from FPSBASE.WIP_STEP_FUTURE)

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

PROCESS_GROUP

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

OPERATION

Operation is usually the primary level of routing in the MES and the level where the facility typically reports moves. FPS only allows one tool per step so our step is a lower level of routing than operation although both may be the same if the MES only allows one tool per operation. Note that because operation can include multiple steps and therefore multiple process families that we cannot have any association to equipment by operation. (* inherited from FPSINPUT.RTG_OPERATIONS)

OPERATION_ENT_INST

Enter time for this operation (* inherited from FPSAPP.SCH_W_H_S_LOTS)

STEP_BEG_LOCATION

STEP_BEG_STATION

STEP_BEG_BAY

STEP_BEG_INST

EARLIEST_STEP_BEG_INST

LOT_DAYS_LATE

STEP_DUE_INST

STEP_GOAL_INST

QTY

Quantity of units in the lot according the qty_unit defined for the facility. It is required for all lots in each facility to have their qty defined in the same units therefore the change in the unit is critical to defining the facility. For example, a pretest facility might have a sort step in the middle where we learn the qty of die. Prior to this step we know only the wafer qty but after this step we know both wafer and die. Since wafer is the only qty we know throughput the flow then wafer must be defined as the qty unit for this facility. Die can then be populated as sec_qty when it is known. Similarly the wafer saw facility might have a step in the middle where we cut the wafers into die. After this step we no longer know the number of wafers which means that die must be the qty unit for this facility and wafers can be the sec_qty prior to the saw step. Please note that a lot with qty of 0 is allowed but only if the sec_qty is greater than 0. This is unusual but one case is where we know the wafers will be scrapped but cannot be scrapped quite yet. (* inherited from FPSINPUT.WIP_EVENT_HIST)

CURR_PRIORITY

The priority at the current step. As the lot moves along the route after LAST_STEP_CURR_PRTY it will revert to PLAN_PRIORITY. For example, timelink or sendahead priority is only temporary. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

CURR_PRIORITY_DISPLAY

IS_HIGHLIGHTED_PRTY

This flag indicates if this priority should be highlighted on the dashboard. When we sort all priorities by priority_sort all Y should be first followed by all N. (* inherited from FPSINPUT.WIP_PRIORITIES)

IS_STAGING_STEP

We expect large amounts of WIP and long cycle times at staging steps. We still calculate cycle time like any other step but the important difference is that lots currently at a staging step are not counted as normal coming lots to future steps. Instead we show them in a special column labeled From Staging. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

SCHED_RANK

SCHED_RANK_DISPLAY

LOT_RANK

LINE_BALANCE_RATIO

DRUM_RATE

CUSTOM_TARGET

IS_HOLD

This field indicates the lot is on hold after the event is logged. In other words, this will always be Y if is_hold_start is Y and always N if is_hold_end is Y. (* inherited from FPSINPUT.WIP_EVENT_HIST)

COULD_CHANGE_SETUP

SHOULD_SCHEDULE

Indicates if it should force scheduler to schedule this step or not. Setting this value to Y also forces a TAKE decision for this step in WIP_STEP_FUTURE. (* inherited from FPSINPUT.WIP_STEP_FUTURE_OVR)

DISPATCH_ENABLED

IS_SCHED_BLOCKED

to indicate if there is any preceding steps UNSCHED (* inherited from FPSAPP.SCH_W_H_S_LOTS)

SCHED_IS_RESERVED

SCHED_JOB_ID

SCHED_PRE_BATCH_ID

SCHED_TOOL

the tool from the first lot that scheduled (* inherited from FPSAPP.SCH_W_SCHED_DURABLE_INSPECT)

SCHED_CH_TO_USE

Please note that the Scheduler often populates this with M which indicates the main tool therefore we often should filter out a value of M when using this value since that it not a valid chamber combination. When this is populated with any value other than M then we use this as est_ch_used rather than calculating with GET_CH_ALLOWED_STATUS or GET_CH_PATH_STATUS. (* inherited from FPSBASE.WIP_STEP_FUTURE_SCHED)

SCHED_DURABLE

SCHED_CARRIER

SCHED_POD_KIT_START_INST

SCHED_POD_KIT_READY_INST

SCHED_POD_FIRST_DISP_INST

SCHED_DISP_INST

SCHED_START

The first start time for the durable to be used (* inherited from FPSBASE.RTG_DURABLE_FUTURE_SCHED)

SCHED_END

SCHED_SCORE

SCHED_SCORE_DETAILS

SCHED_COMMENT

CURR_LOCATION

store the curr location of the lot (* inherited from FPSAPP.SCH_W_H_S_LOTS)

CURR_STATION

See column comment on STATION in FPSINPUT.MHS_STATION_ALTERNATES for more information. (* inherited from FPSINPUT.MHS_DELIVERY_NEXT)

CURR_TOOL

CURR_DISPATCH_INST

CURR_PROC_BEG_INST

CURR_PROC_END_INST

EST_CURR_PROC_END_INST

CURR_SETUP

The current setup of the entity. This can be set by a lot processing event from WIP_EVENT_HIST or by an event on the entity from EQP_EVENT_HIST. For example if an Implant tool processes a Boron lot then the curr_setup will be Boron. Or if an event is logged to the tool that says the setup changed to Boron then the curr_setup will be Boron. Please note that the curr_setup value populated in EQP_EVENT_HIST must match exactly with the rqd_setup value in RTG_TOOL_ASSIGNMENTS in order for the setup penalty logic to apply correctly. (* inherited from FPSINPUT.EQP_EVENT_HIST)

CURR_RECIPE

The current/last used recipe for the scheduler, incorporating the ignore capability from EQP_PROCESS_CHG_TO_IGNORE (* inherited from FPSBASE.ETP_STATUS)

IS_QUEUE_ALLOWED

RESERVE_TOOL

RESERVE_JOB_ID

IS_WIP_STOPPED

WAIT_SEC_TO_SCHED

The lot may be scheduled but must not be allowed to dispatch or start until this number of seconds has elapsed. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

SCHED_SORT_ON_TOOL