FPSADMIN.RTG_PRD_STEP_EQPTYPES

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

PRD

VARCHAR2(64)

N

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PRDS)

ROUTE

VARCHAR2(256)

N

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

STEP

VARCHAR2(256)

N

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

PROCESS

VARCHAR2(50)

N

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

EQP_TYPE

VARCHAR2(50)

N

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)

BATCH_INT_SEC

NUMBER(6)

EFFECTIVE_PASSES

NUMBER(7,5)

EST_MACHINE_RECIPE

VARCHAR2(100)

N

Estimated machine recipe what we estimate will be the machine recipe based on information from the Recipe Management System. It is used in combination with process for throughput calculations and setup change penalty calculations. It is not necessary to estimate for all processes since this is always used in combination however it needs to be NA rather than blank since it is part of the primary key of most THP tables. Hopefully when this is not NA it should match the actual machine recipe logged for each lot during processing. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

EST_REWORK_PCT

NUMBER(5,3)

N

Estimated percentage of lots completing this step which will go to rework. This is used for capacity modeling. (* from FPSINPUT.RTG_ROUTE_STEPS)

EST_SMP_PCT

NUMBER(5,2)

N

Smp_pct tells you what percentage of the lots complete on a tool. Some sites skip steps by jumping over them so we see the lot move from step 3 to step 5 and we only know that it jumped step 4 because step 4 is on the route between 3 and 5. Other sites skip steps by moving lots into them and then moving them out a second later so we see a move from 3 to 4 at 11:11:11 and a move from 4 to 5 at 11:11:12. We do not care how it is done but just that the lot did not process at step 4 -- and to be more specific that no tool capacity is required to process this lot at step 4 and no cycle time is accumulated at step 4. (* from FPSBASE.WIP_GOAL_LOT_SHIFT)

EST_USE_PCT

NUMBER(5,2)

N

Estimated use percentage is the percentage of units of this route-step that we expect to run on this eqp_type. Normally we use historical data to calculate this for the Capacity Model but entering a value in the OVR table manually overrides that historical number. (* from FPSINPUT.RTG_ROUTE_STEP_EQPTYPE_OVR)

EST_USE_PCT_REASON

VARCHAR2(12)

This field explains which level of fill-in was used to calculate the est_use_pct.

FIRST_UNIT_SEC

NUMBER(9,3)

Time for one unit to process when the tool starts from a standby state. On a batch tool -- defined as a tool where all units process together and take the same time regardless of qty -- this is the time for the batch. See our complete throughput documentation for more details. (* from FPSINPUT.THP_EXTERNAL)

IS_BATCH_THP

CHAR(1)

N

This is a critical value for throughput calculations. Throughput for batch tools is the same regardless of the qty in the batch. Throughput for non-batch tools varies based on the qty in the job. Usually this is Y when max_batch_size_carriers > 1 but not always. We can have tools who load multiple carriers together but whose throughput is calculated per unit. We can also have tools who load only single carriers but whose throughput is calculated per batch. (* from FPSINPUT.EQP_TYPES)

IS_CAP_ENT_BY_CH

CHAR(1)

N

IS_THP_BY_CH

CHAR(1)

N

LINE_YIELD_PCT_TO_EOL

NUMBER(6,3)

N

Line yield percentage to end of line is the percentage of units expected to successfully complete the remaining steps on the route. Normally we multiply the line yield of all remaining steps for the Capacity Model but entering a value in this OVR table manually overrides that calculated number. (* from FPSINPUT.RTG_ROUTE_STEP_EQPTYPE_OVR)

LOGICAL_RECIPE

VARCHAR2(100)

Used for infomational purpose and is populated if known otherwise it will match the recipe. (* from FPSINPUT.WIP_EVENT_HIST)

MPU

NUMBER(8,4)

N

MPU is a commonly used abbreviation which stands for minutes per unit. It is often referred to as MPW which for minutes per wafer but MPU is better because the unit is not always wafer. (* from FPSBASE.WIP_LOT_HIST)

NLOTS_BY_PRD

NUMBER(10)

PROD_QTY

NUMBER(10)

N

SPEC_ID

VARCHAR2(36)

This column references the name of the specification used to process lots at this step. Unlike script_id, this column is not used for any FPS purpose other than reference and display. (* from FPSINPUT.RTG_ROUTE_STEPS)

THP_FILLIN_GROUP

VARCHAR2(30)

TOTAL_QTY

NUMBER(10)

N

UNIT_INT_SEC

NUMBER(9,3)

UPH

NUMBER(9,3)

N

UPH is a commonly used abbreviation which stands for units per hour. It is often referred to as WPH which for wafers per hour but UPH is better because the unit is not always wafer. (* from FPSBASE.RTG_PROCESS_RCP_EQPTYPES)