FPSBASE.DASH_P_DURABLES

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

DURABLE

Durables are either reticles for Litho or probe cards for Wet or Sort. A durable can either be in a carrier or at a location without a carrier. (* inherited from FPSINPUT.RTG_DURABLES)

DURABLE_FAMILY

Durable_family indicates what durable is required by the process. When multiple durables are in a family any of them can be used. Typically there is only one reticle per family and therefore the durable and durable_family are the same. The exception would be a high running product with backup reticles. However for probe cards it is common to have several cards for each product so we have several durables with the same family. (* inherited from FPSINPUT.RTG_DURABLE_FAMILIES)

CARRIER

RFID of the cassette or FOUP the lot is currently in. (* inherited from FPSINPUT.MHS_CARRIERS)

DURABLE_STATE

Durable state indicates the current state of the durable The value must be one of those defined by FPS in FPSADMIN.MHS_CARRIER_STATES. This is a short list of simple states like OK or WARN or DOWN in contrast to the complex options available for equipment states. This would be used as a filter/sort on what durables could be used for scheduling. For example, if there are two durables in the durable_family and one is OK and the other is DOWN then we schedule using the OK durable. But if there is only one durable in the family then we cannot schedule any lots which require this family if that lone durable is DOWN. (* inherited from FPSINPUT.RTG_DURABLES)

LOCATION

Location of a carrier or lot or durable which comes directly from the tracking system used at the site. This could be a port or internal tool location or tool or rack or stocker or zero footprint storage or room or really anywhere. Many non-automated sites allow users to manually enter locations into their system. Therefore unless we know for sure that the source data implements a size limitation, it is recommended to always trim the value in the ETL to 32 characters to fit into the column size and avoid load errors. For ports, location is the full name of the port which is unique across the entire site and usually includes the tool name. Please see the comment in the port column which explains the difference between location and port. Rack locations are similar. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

BAY

A bay is a physical area within the building. The bay is important for estimating travel time for a carrier to reach its destination as we usually store these estimates as a matrix of bay-to-bay and assume that the estimated time from any location within one bay to any location within another bay is approximately the same. (* inherited from FPSINPUT.MHS_BAYS)

BUILDING

Building is the top of our MHS hierarchy at each site. It is independent of facility which is at the top of our EQP/RTG hierarchy. It is possible for a building to include multiple facilities and for a facility to include multiple buildings but we do not even need to define these relationships because EQP_TOOLS determines this by the combination of the facility and bay columns (since bay points to building). (* inherited from FPSINPUT.MHS_BUILDINGS)

STATION

The rack, bay, building, tool, cart, or stocker which has alternately acceptable stations (* inherited from FPSINPUT.MHS_STATION_ALTERNATES)

CARR_CATEGORY

Carrier category is used when lots in a certain of the line require a carrier in the specific category. This is usually required due to potential contamination. One example might be that an entire route is Copper and all lots at all steps on the routes must be in Copper carriers. Another example might be front-end-of-line (FEOL) and back-end-of-line (BEOL) where the first half of the route must use a FEOL carrier and the second half of the route might be a BEOL carrier. Whenever a route is split then there has to be a carrier transfer step on the route in between the sections which require each category. To define this, each route-step has a required carr_category and each carrier has a carr_category. (* inherited from FPSINPUT.MHS_CARRIERS)