FPSADMIN.RTG_DURABLE_FAMILIES

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

DURABLE_FAMILY

VARCHAR2(64)

N

Durable_family indicates what durable is required by the process. When multiple durables are in a family any of them can be used. Typically there is only one reticle per family and therefore the durable and durable_family are the same. The exception would be a high running product with backup reticles. However for probe cards it is common to have several cards for each product so we have several durables with the same family.

DURABLE_GROUP

VARCHAR2(64)

Durable group is the parent of family and the child of class and its only use is to track the time to change durables. In many cases, group will be the same as class. An example where group would be different than class is where we have different reticles for different stepper manufacturers so the durable_group would be Nikon or Canon or ASML while the durable_class would be DURABLE. (* from FPSINPUT.RTG_DURABLE_GROUPS)

DURABLE_THP_VARIATION

VARCHAR2(64)

When this column is populated that means that we have a choice of durable families and that processing time for the lot/recipe depends on which durable family is chosen. The most common use case is 8 pin and 16 pin probe cards. This will be blank for reticles and other cases where the throughput is not dependent on the durable. This is part of the primary key of our throughput logic where nulls are filled in as NA since PK columns cannot be null. In our first example, we have a recipe WAFER_TEST_1 that we use for a whole bunch of different prds. Each prd requires its own probe card but for throughput purposes we do not care about the prd. We just care about the recipe which is WAFER_TEST_1 and we would set duration_thp_variation to 8pin or 16pin. Then we would group all prds that use WAFER_TEST_1 and ran with an 8 pin probe card together in the same THP record. Our second example is similar to the first but for throughput purposes each prd will be different. We would set duration_thp_variation to the durable family for this case. In our third example, the recipe is different for each prd. In this case, we would set duration_thp_variation to either 8pin and 16pin or to the durable family and get the same result.