FPSBASE.RTG_PROCESS_RCP_T_UNIONS

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

PROCESS

VARCHAR2(50)

N

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

EST_MACHINE_RECIPE

VARCHAR2(100)

N

Estimated machine recipe what we estimate will be the machine recipe based on information from the Recipe Management System. It is used in combination with process for throughput calculations and setup change penalty calculations. It is not necessary to estimate for all processes since this is always used in combination however it needs to be NA rather than blank since it is part of the primary key of most THP tables. Hopefully when this is not NA it should match the actual machine recipe logged for each lot during processing. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

EQP_TYPE

VARCHAR2(50)

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)

EXP_CASCADE_BATCHES

NUMBER(2)

Expected cascade batches is only for cascading batch tools. It is used in throughput calculations to determine how many batch_intervals to count after each first_unit_sec. If this is not populated we assume the batch tool does not cascade. This value could also be used in dispatching/scheduling to specify how many batches should be cascaded before a setup change is allowed. Historical data should be compared to this value regularly to verify it. (* from FPSINPUT.EQP_TYPES)

EXP_CASCADE_QTY

NUMBER(3)

Expected number of wafers in a cascade is only for cascading tools which are not batch tools. It is used in throughput calculations to determine how many unit_intervals to count after each first_unit_sec. If this is not populated we use the exp_qty_per_carr_for_wph as the default meaning we cascade just one carrier. This value could also be used in dispatching/scheduling to specify how many wafers should be cascaded before a setup change is allowed. Historical data should be compared to this value regularly to verify it. (* from FPSINPUT.EQP_TYPES)

EXP_QTY_PER_JOB

NUMBER(7)

If populated this value is used for the EET/TCT calculation for this eqp type instead of avg_qty_per_carr_for_wph which is the default for the facility. (* from FPSINPUT.EQP_TYPES)

FIXED_CARRIER_SEC

NUMBER(4)

Seconds between units in two different carriers in additional to the normal unit interval. This time is added to the EET, MPU, and UPH. (* from FPSINPUT.EQP_TYPES)

IS_BATCH_THP

CHAR(1)

N

This is a critical value for throughput calculations. Throughput for batch tools is the same regardless of the qty in the batch. Throughput for non-batch tools varies based on the qty in the job. Usually this is Y when max_batch_size_carriers > 1 but not always. We can have tools who load multiple carriers together but whose throughput is calculated per unit. We can also have tools who load only single carriers but whose throughput is calculated per batch. (* from FPSINPUT.EQP_TYPES)

IS_REAL_TOOL

CHAR(1)

N

Flag indicating whether tool physically exists. An example where this is not set would be lot start or visual inspect. (* from FPSINPUT.EQP_TYPES)

LOAD_SEC

NUMBER(4)

N

For throughput purposes, we would like the begin event to be logged when the first wafer of the lot enters the tool so that we can accurately track theoretical cycle time (TCT) which starts at this point. If the tool logs as desired then this column will be 0 and it usually is. But some tools do not log the begin event until some amount of time later, for example after the pumping time. This column exists to account for this delay and it is the number of seconds from when the first wafer enters until the begin is logged. We simply add this time to the processing time to get the TCT. This is by eqp_type as we estimate that all recipes of all tools in the same eqp_type will be consistent in this behavior. Please note that unload_sec is similar for any time after the end event until the lot can be unloaded. (* from FPSINPUT.EQP_TYPES)

NUM_LOTS_ASSIGNED

NUMBER(6)

OVR_PROCESS_FAMILY

VARCHAR2(50)

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* from FPSINPUT.EQP_TOOLS)

OVR_PROCFAM_BY_TOOL_ASGN

VARCHAR2(50)

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* from FPSINPUT.EQP_TOOLS)

PERM_RANK

VARCHAR2(1)

Permanent rank is typically loaded by ETL from a combination of the MES, recipe management system, and existing preference logic already used at the site. Possible values are in FPSADMIN.RTG_PERM_RANKS. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

PERM_RANK_SORT

NUMBER(3)

N

PREFERRED_EQP_MODULE

VARCHAR2(12)

The EQP_MODULE of a tool is automatically calculated based on the module of its primary process family. It is highly discouraged to have tools that are commonly used with multiple process families, but if this case exists you can prefer one module by setting this field. This should normally be blank. Please note this column has nothing to do with the MNT_MODULE for this tool which is assigned in EQP_MNT_FAMILIES, and is always uniquely specified by tool -> eqp_type -> mnt_family -> mnt_module. (* from FPSINPUT.EQP_TOOLS)

PREFERRED_PROCESS_FAMILY

VARCHAR2(50)

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* from FPSINPUT.EQP_TOOLS)

PRI_DURABLE_FAMILY

VARCHAR2(64)

PROC_STATE_IF_WAIT

VARCHAR2(5)

N

PROD_QTY

NUMBER(10)

RCP_EXP_QTY_PER_BATCH

NUMBER(3)

RCP_LABOR_ROLE

VARCHAR2(36)

RCP_LABOR_SEC_PER_BATCH

NUMBER(8,3)

RCP_LABOR_SEC_PER_CARR

NUMBER(8,3)

RCP_LABOR_SEC_PER_UNIT

NUMBER(8,3)

RCP_MAX_BATCH_SIZE_CARRIERS

NUMBER(2)

RCP_MAX_BATCH_SIZE_LOTS

NUMBER(2)

RCP_MAX_BATCH_SIZE_UNITS

NUMBER(7)

RQD_SETUP

VARCHAR2(100)

Rqd_setup is determined by ovr_rqd_setup in RTG_TOOL_ASSIGNMENTS and use_process_as_rqd_setup and use_est_mach_rcp_as_rqd_setup from EQP_TYPES. The latter two columns allow us to easily specify for an eqp_type that setup times should be calculated by process or est_machine_recipe. For traditional setups that are a group of recipes we use ovr_rqd_setup. (* from FPSBASE.WIP_LOT_HIST)

SPECIFIC_ROUTE

VARCHAR2(256)

TOTAL_QTY

NUMBER(10)