Data Dictionary
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FPSINPUT Views
> FPSINPUT.WIP_WAFER_HIST_LOOP
View FPSAPP.DASH_P_GANTT_ENTITY_STATE
This view includes entity state info and adds lot info if available which we include in the hover message. Note that this view uses either eqp_state or etp_state depending on the setting of use_etp_for_web in GEN_GLOBAL. Example query like: select * from fpsapp.dash_p_gantt_entity_state where facility = 'F' and tool = 'T' and to_inst > data_date - 1;
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Column |
Comment |
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FACILITY |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES) |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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ENTITY |
The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY) |
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GANTT_FROM_INST |
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TO_INST |
Time to which this state was active. (* inherited from FPSINPUT.GEN_FACILITY_SHUTDOWNS) |
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STATE_DISPLAY_CH |
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STATE_CHG_INST |
Time when the eqp_state changed for the entity. (* inherited from FPSINPUT.EQP_STATUS_VERIFY) |
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STATE_CHG_EVENT |
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JOB_PROC_STATE_DISPLAY |
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EQP_STATE_FOR_ETP |
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EQP_STATE_CHG_INST_FOR_ETP |
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TOOL_PCT |
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INC_BATCH_PCT |
Percentage of the full batch size processed. For tool performance calculations, TOOL_PCT percentage productivity is calculated using INC_BATCH_PCT to factor in that the batch size is not fully utilized. (* inherited from FPSBASE.WIP_LOT_HIST) |
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PROC_STATE |
Current processing state of each entity. Updated by a trigger on WIP_EVENT_HIST. (* inherited from FPSBASE.ETP_STATUS) |
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BEG_PROC_JOB_ID |
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BEG_PROC_PROCESS |
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BEG_PROC_RECIPE |
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BEG_PROC_CH_USED |
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BEG_PROC_RQD_SETUP |
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BEG_PROC_INST |
time when the lot started processing on the main tool. (* inherited from FPSINPUT.WIP_STEP_HIST_MANUAL) |
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MISS_CASC_INST |
Time when the last cascade was missed or the current cascade will be missed. (* inherited from FPSBASE.ETP_STATUS) |
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OPPORTUNITY_STATE_DISPLAY_CH |
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OPPORTUNITY_STATE_BG_COLOR_CH |
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L6_STATE_BG_COLOR_CH |
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OVERALL_SORT_ORDER_CH |