FPSAPP.EQP_UNITS_PLAN_DAY_HIST

START_PLAN_DAY

DATE

N

Plan days must be 24 hours in length and the start of the plan day must be the start of one of the shifts. Contrast this to plan day which is independent of shift. (* from FPSINPUT.CAL_PLAN_DAYS)

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

ENTITY

VARCHAR2(19)

N

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* from FPSINPUT.EQP_STATUS_VERIFY)

PRD

VARCHAR2(64)

N

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PRDS)

END_PLAN_DAY

DATE

N

It is critical that this field equal the start_plan_day of the next plan day. (* from FPSINPUT.CAL_PLAN_DAYS)

NON_TW_UNITS

NUMBER(7)

N

The number of non-test units that ran on the given shift and entity. (* from FPSBASE.EQP_UNITS_SHIFT_HIST)