FPSBASE.SCH_B_MODULE_PROCESS_GROUPS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

MODULE

Modules are departments of people who manage certain areas of the fab. The modules are assigned ownership of a set of tools to operate and maintain as well as steps on the route that they are responsible for executing. Since many of our tables include tool and step information together, we must distinguish between the owner of the step (WIP_MODULE), the owner of the operation of the tool (EQP_MODULE), and the owner of the maintenance of the tool (MNT_MODULE). WIP_MODULE is used to credit moves and set goals. Each route-step is assigned to a process family and then its wip_module is defined by the process family. EQP_MODULE is used to group tools particularly for tool performance reporting. Similar to WIP, each tool is dynamically assigned to a process family based on its assignments and then its eqp_module is defined by the process family. MNT_MODULE is usually the same as EQP_MODULE but unlike EQP_MODULE is not dependent on assignments but only on the EQP hierarchy. Each tool is assigned to an eqp_type and each eqp_type is assigned to a mnt_family and each mnt_family is assigned to a mnt_module. (* inherited from FPSINPUT.GEN_MODULES)

PROCESS_GROUP

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)