FPSBASE.THP_VALUES_LOOKUP

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

PROCESS

VARCHAR2(50)

N

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

INPUTS_TO_GET_THP_LOGIC

VARCHAR2(4000)

N

CALC_TYPE

VARCHAR2(5)

CH_TYPE_CNT

VARCHAR2(128)

This value is a summarizing of ch_used which we use for grouping of throughput. The assumption is that throughput will be the same if the same number of chambers of the same type are used. (* from FPSINPUT.THP_EXTERNAL)

COMMENT_TRUSTED

VARCHAR2(256)

CTC_MULTIPLIER

NUMBER(4,2)

DURABLE_THP_VARIATION

VARCHAR2(64)

When this column is populated that means that we have a choice of durable families and that processing time for the lot/recipe depends on which durable family is chosen. The most common use case is 8 pin and 16 pin probe cards. This will be blank for reticles and other cases where the throughput is not dependent on the durable. This is part of the primary key of our throughput logic where nulls are filled in as NA since PK columns cannot be null. In our first example, we have a recipe WAFER_TEST_1 that we use for a whole bunch of different prds. Each prd requires its own probe card but for throughput purposes we do not care about the prd. We just care about the recipe which is WAFER_TEST_1 and we would set duration_thp_variation to 8pin or 16pin. Then we would group all prds that use WAFER_TEST_1 and ran with an 8 pin probe card together in the same THP record. Our second example is similar to the first but for throughput purposes each prd will be different. We would set duration_thp_variation to the durable family for this case. In our third example, the recipe is different for each prd. In this case, we would set duration_thp_variation to either 8pin and 16pin or to the durable family and get the same result. (* from FPSINPUT.RTG_DURABLE_FAMILIES)

ENDED_SEC

NUMBER(6)

FIRST_UNIT_CV

NUMBER(*,3)

FIRST_UNIT_SEC

NUMBER(9,3)

Time for one unit to process when the tool starts from a standby state. On a batch tool -- defined as a tool where all units process together and take the same time regardless of qty -- this is the time for the batch. See our complete throughput documentation for more details. (* from FPSINPUT.THP_EXTERNAL)

FIRST_UNIT_SEC_LCL

NUMBER(9,3)

Lower control limit for first unit seconds used in our Throughput monitoring. Obviously this must be less than the manual first unit value. (* from FPSINPUT.THP_MANUAL)

FIRST_UNIT_SEC_UCL

NUMBER(9,3)

Upper control limit for first unit seconds used in our Throughput monitoring. Obviously this must be greater than the manual first unit value. (* from FPSINPUT.THP_MANUAL)

INTERVAL_SEC

NUMBER(9,3)

Unit_int_sec or batch_int_sec expected for the lot at the time of processing from our THP tables. (* from FPSBASE.WIP_LOT_HIST)

INTERVAL_SEC_LCL

NUMBER(9,3)

Lower control limit for interval seconds used in our Throughput monitoring. Obviously this must be less than the manual interval value. (* from FPSINPUT.THP_MANUAL)

INTERVAL_SEC_UCL

NUMBER(9,3)

Upper control limit for interval seconds used in our Throughput monitoring. Obviously this must be greater than the manual interval value. (* from FPSINPUT.THP_MANUAL)

IS_BATCH_THP

CHAR(1)

This is a critical value for throughput calculations. Throughput for batch tools is the same regardless of the qty in the batch. Throughput for non-batch tools varies based on the qty in the job. Usually this is Y when max_batch_size_carriers > 1 but not always. We can have tools who load multiple carriers together but whose throughput is calculated per unit. We can also have tools who load only single carriers but whose throughput is calculated per batch. (* from FPSINPUT.EQP_TYPES)

IS_VALID

CHAR(1)

We consider a lot valid for our finished lot calculations when the lot moved through the first step and the last step on the main route for its product. There are some variations such as the lot moved through the first step on an older version of the route or finished with an event specifically marked as a ship event or the route did not have any steps. (* from FPSBASE.ECT_FINISHED_LOT_HIST)

MEMO

VARCHAR2(512)

MPU_CV

NUMBER(*,3)

MPU_LCL

NUMBER(8,4)

Lower control limit for MPU used in our Throughput monitoring. Obviously this must be less than the manual MPU value. (* from FPSINPUT.THP_MANUAL)

MPU_MANUAL

NUMBER(8,4)

MPU_UCL

NUMBER(8,4)

Upper control limit for MPU seconds used in our Throughput monitoring. Obviously this must be greater than the manual MPU value. (* from FPSINPUT.THP_MANUAL)

NUM_DISCS_FOR_JOB

NUMBER(2)

Number of discs used in the job as estimated by our throughput logic. (* from FPSBASE.WIP_LOT_HIST)

NUM_JOBS

NUMBER(6)

THP_FILLIN_GROUP

VARCHAR2(30)

UNIT_INT_CV

NUMBER(*,3)