data-dictionary

FPSBASE.EQP_REF_TOOLS_MPCT_STATE

Data Dictionary

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View FPSBASE.EQP_REF_TOOLS_MPCT_STATE

MPCT (Multi-Path Cluster Tool) state is the most representative overall state of the tool so these values are used in applications where we need to show just one state of a tool with multiple chambers.

Column

Comment

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

MFG_GROUP

TOOL_MPCT_STATE

TOOL_MPCT_STATE_DISPLAY

TOOL_MPCT_STATE_BG_COLOR

TOOL_MPCT_STATE_TEXT_COLOR

TOOL_MPCT_SHORT_DISPLAY

TOOL_MPCT_STATE_CHG_INST

TOOL_ETP_STATE_HTML_TEXT_COLOR