Data Dictionary
>
FPSAPP Views
> FPSAPP.WIP_WAFER_HIST_LOOP
View FPSBASE.BLD_EQP_CLUSTER_DIAG
This view allows us to do research on the tool_pct returned by our cluster tool calculations. This view should almost always be queried with filters on multiple num_xxx columns. For example, to see examples where the cluster tool had at least one chamber processing and at least one chamber unscheduled and no chambers in engineering then you would do this query: select * from fpsbase.bld_eqp_cluster_diag where num_prd > 0 and num_udt > 0 and num_eng = 0;
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Column |
Comment |
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FACILITY |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES) |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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EQP_FROM_INST |
Time when the eqp_state changed for any entity on this main tool. (* inherited from FPSBASE.ETP_STATUS) |
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SEQ |
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ENTITY |
The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY) |
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CH_TYPE |
This column is critical for sequential chamber tools where a wafer goes through multiple chambers. It identifies the type of chamber so two chambers with the same ch_type are identical and wafers can use either one. See comment on mfg_pct_per_ch column for an example. For independent chamber tools where all chambers are the same and each wafer goes to only one chamber then ch_type should be set to the default value CH so that ch_type_cnt is 1CH, 2CH, 3CH, etc. (* inherited from FPSINPUT.EQP_CHAMBERS) |
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EQP_E10_STATE |
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EQP_TOOL_PCT |
Percentage contribution of this entity to the full tool using cluster tool calculations for eqp_state built in to DWH. This adds to 100 for all entities on a tool at each eqp_inst. (* inherited from FPSBASE.ETP_STATUS) |
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NUM_PRD |
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NUM_SBY |
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NUM_ENG |
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NUM_UDT |
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NUM_SDT |
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NUM_NST |