FPSADMIN.SCH_P_CURR_EQP_PATTERN_HIST

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

UNIT_TYPE

the unit type for this process max usages. only allow job, wafer, lot, second (* inherited from FPSINPUT.EQP_PROCESS_USAGES)

PROCESS_CHANGE_TYPE

defines what change type each value in the sequence represents. setup/recipe/recipe_family/recipe_group. note: cannot mix change_types (* inherited from FPSINPUT.EQP_PATTERN_MATCH)

CURR_PATTERN

the comma delimited history of process sequences run on the tool. see table comments for ground rules (* inherited from FPSINPUT.EQP_CURR_PATTERN)

PATTERN_START_INST

the point in time where the pattern should start to be considered. any wsh entry that has started is considered as part of the existing pattern (* inherited from FPSINPUT.EQP_CURR_PATTERN)