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FPSINPUT.MSO_EQP_EVENT_COUNTERS

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FPSINPUT Tables

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Table FPSINPUT.MSO_EQP_EVENT_COUNTERS"

This table contains the number of lots tagged for measure after a given event. This is populated only while the counter is less than the sampling condition value specified for the event rule.

  • Schema: FPSINPUT

  • Tablespace: FPSDATA

  • Primary key: FACILITY, SMP_RULE_ID, TOOL, CHAMBER


Column

Type

Nullable

Comment

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

SMP_RULE_ID

NUMBER(9)

N

The tag condition that corresponds with the specified sample rule. This must already be defined in MSO_EXTL_TAG_CONDITIONS. (* from FPSINPUT.MSO_EXTL_RULE_TAG_COND)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

CHAMBER

VARCHAR2(19)

N

Chambers belong to a main tool, have a state which is independent of the main tool and other chambers on the same tool, and can have events logged against it. The difference between a chamber and a port is that a chamber processes lots while port is just a location. (* from FPSINPUT.EQP_CHAMBERS)

EVENT

VARCHAR2(128)

N

This is the event registered in the MES. This is for the historical record and display only. Each event is mapped to an FPS event_type and the event_type is what is used by FPS applications. (* from FPSINPUT.WIP_EVENTS)

EVENT_CHG_INST

DATE

RQD_LOTS_TO_TAG

NUMBER(3)

TAGGED_LOT_COUNT

NUMBER(3)