data-dictionary

FPSADMIN.EQP_APD_ENTITY_WEEK_HIST

Data Dictionary

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View FPSBASE.EQP_APD_ENTITY_WEEK_HIST

Adds row for next week not added to EQP_ENTITY_WEEK_HIST. This can be called at any time and repeatedly because if the previous week is already in the table then no rows are returned. This table does not have the cluster tool calculations so this table should not be summed over a tool or any grouping of tools. For that use EQP_TOOL_SHIFT_HIST. This is only to be used for an individual entity. We debated whether to write grouping columns like eqp_type and mnt_family with their values at the end of the week but decided that we will usually use the current values and we can look up in CHGLOG if we want the values at the time.

Column

Comment

START_WEEK

Work weeks must be 7 days in duration and the start of the work week must be the start of one of the work days. (* inherited from FPSINPUT.CAL_WORK_WEEKS)

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

ENTITY

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY)

EQP_STATE

Client equipment state taken directly from their MES or from their existing tool state model. For EQP_MNT_FUTURE, this is the state that we estimate the entity will be in during the maintenance which is often set to a generic PM state if we do not have detailed information. (* inherited from FPSINPUT.EQP_L6_DETAILED_STATES)