data-dictionary

FPSADMIN.DASH_P_TOOL_EVENT_HIST

Data Dictionary

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FPSADMIN Views

> FPSADMIN.WIP_WAFER_HIST_LOOP

View FPSAPP.DASH_P_TOOL_EVENT_HIST

This view originally included both WIP and EQP events for each tool but now it has only events from EQP_EVENT_HIST and is used in the Maintenance Dashboard. For the Recent Events table on the Operations Tool page which has both WIP and EQP events we use DASH_P_TOOL_LAST_FIFTY.

Column

Comment

INST

Time when the event occurred. (* inherited from FPSINPUT.WIP_EVENT_HIST)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

LOGGED_ENTITY

Entity to which event is logged in the MES. This could be a main tool, subtool, entity, or port. In MNT tables this could be a vehicle or durable as well which is why the column width is wider. If main tool or port, we apply the event to all entities. If subtool we apply to all within the subtool. If entity we apply only to the entity. (* inherited from FPSINPUT.EQP_EVENT_HIST)

EVENT

This is the event registered in the MES. This is for the historical record and display only. Each event is mapped to an FPS event_type and the event_type is what is used by FPS applications. (* inherited from FPSINPUT.WIP_EVENTS)

EQP_STATE

Client equipment state taken directly from their MES or from their existing tool state model. For EQP_MNT_FUTURE, this is the state that we estimate the entity will be in during the maintenance which is often set to a generic PM state if we do not have detailed information. (* inherited from FPSINPUT.EQP_L6_DETAILED_STATES)

STATE_HTML_BG_COLOR

STATE_NAME

CURR_SETUP

The current setup of the entity. This can be set by a lot processing event from WIP_EVENT_HIST or by an event on the entity from EQP_EVENT_HIST. For example if an Implant tool processes a Boron lot then the curr_setup will be Boron. Or if an event is logged to the tool that says the setup changed to Boron then the curr_setup will be Boron. Please note that the curr_setup value populated in EQP_EVENT_HIST must match exactly with the rqd_setup value in RTG_TOOL_ASSIGNMENTS in order for the setup penalty logic to apply correctly. (* inherited from FPSINPUT.EQP_EVENT_HIST)

OPERATOR

In history tables, this is the username of the person or system who logged the event. In EQP_MNT_FUTURE, this is the username of the person who input the information about the maintenance event. Usernames can be looked up in GEN_USERS to get full names, email address, etc. Please note that the existence of each username in GEN_USERS is optional, meaning that it is never required for the username logged in the operator column to be in GEN_USERS. (* inherited from FPSINPUT.WIP_EVENT_HIST)

EVENT_COMMENT

Comment associated with the event. (* inherited from FPSINPUT.WIP_HOLD_FUTURE)

SEQ_WITHIN_SEC

SOURCE_TABLE

LOT_LIST

PROCESS_DISPLAY

The name of the process displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the process. (* inherited from FPSINPUT.RTG_PROCESSES)

ACTUAL_MACHINE_RECIPE

Machine recipe used to process the lot as logged during processing by the tool. (* inherited from FPSINPUT.WIP_EVENT_HIST)