FPSINPUT.MSOUI_P_RULE_TOOL_WVR_CHG_HIST

PARENT_TRANSACTION_ID

TRANSACTION_INST

TRANSACTION_TYPE

TRANSACTION_ID

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

WAIVER_ID

Unique ID for waiver. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

SMP_RULE_ID

The tag condition that corresponds with the specified sample rule. This must already be defined in MSO_EXTL_TAG_CONDITIONS. (* inherited from FPSINPUT.MSO_EXTL_RULE_TAG_COND)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

CHAMBER

Chambers belong to a main tool, have a state which is independent of the main tool and other chambers on the same tool, and can have events logged against it. The difference between a chamber and a port is that a chamber processes lots while port is just a location. (* inherited from FPSINPUT.EQP_CHAMBERS)

IS_PRESET

Used by MSOUI to determine what waivers are done through the UI preset option. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

WAIVER_TYPE

EXPIRE_INST

Time when the waiver is expired. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

IS_EXPIRED_ON_NEXT_TAG

Defines if the waiver will expire when the next lot is tagged or not. If the flag is set to Y the waiver expires and is deleted even if the tagged lot is before the expiration time defined for the waiver. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

IS_EXPIRED_ON_NEXT_MEASURE

Defines if the waiver will expire once a lot is measured at Metrology. If the falg is set to Y the waiver will espire and is deleted even if the scan happens prior to the expiration time defined for the waiver. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

MAX_CONSECUTIVE_SKIP_WARN_WVR

The warning value consecutive skips for the defined rule and tool waiver. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

MAX_CON_SKIP_TRG_MES_ACTN_WVR

When the consecutive skips count reaches this limit, MES action will be triggered for the defined rule and tool waiver. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

MAX_CON_SKIP_TAG_NEXT_LOT_WVR

When the consecutive skips count reaches this limit, MSO will tag the next available lot for the defined rule and tool waiver. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

MIN_CON_SKIP_ALLOW_TAG_WVR

When the consecutive skips count reaches this limit, MSO will begin to allow tagging lots if the sampling criteria is met for the defined rule and tool waiver. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

MAX_LAR_TRIGGER_MES_ACTN_WVR

When the lots at risk value reaches this limit, MES action will be triggered for the defined rule and tool waiver. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

MAX_LAR_WARN_WVR

The warning value of lots at risk for the defined rule and tool waiver. (* inherited from FPSBASE.MSO_RULE_TOOL_SKIP_WAIVERS)

USER_ID

The user Id that initiated the last move of this carrier (* inherited from FPSINPUT.MHS_CARRIERS)

DESCRIPTION

Tool desciption. This value is only used to display in the Dashboard. (* inherited from FPSINPUT.EQP_TOOLS)