FPSINPUT.MHS_STATIONS

STATION

The rack, bay, building, tool, cart, or stocker which has alternately acceptable stations (* inherited from FPSINPUT.MHS_STATION_ALTERNATES)

BAY

A bay is a physical area within the building. The bay is important for estimating travel time for a carrier to reach its destination as we usually store these estimates as a matrix of bay-to-bay and assume that the estimated time from any location within one bay to any location within another bay is approximately the same. (* inherited from FPSINPUT.MHS_BAYS)

BUILDING

Building is the top of our MHS hierarchy at each site. It is independent of facility which is at the top of our EQP/RTG hierarchy. It is possible for a building to include multiple facilities and for a facility to include multiple buildings but we do not even need to define these relationships because EQP_TOOLS determines this by the combination of the facility and bay columns (since bay points to building). (* inherited from FPSINPUT.MHS_BUILDINGS)

STATION_TYPE

DESCRIPTION

Tool desciption. This value is only used to display in the Dashboard. (* inherited from FPSINPUT.EQP_TOOLS)

MNT_FAMILY

MNT_FAMILY is assigned to each EQP_TYPE. Tools in the same MNT_FAMILY are similar and share the same maintenance schedule. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

MNT_MODULE

MNT_MODULE is the module responsible for maintaining the tool and is a property of MNT_FAMILY. See comments on the module column in GEN_MODULES for how it relates to eqp_module and mnt_module. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

CAST_CAPACITY

Maximum number of cassettes that can be stored. We define cassette as a carrier for a lot. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

BARE_WFR_CAPACITY

Maximum number of bare wafers that can be stored. Bare wafers are lots which are not in a cassette. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

POD_CAPACITY

Maximum number of pods that can be stored. We define pod as a carrier for a durable. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

BARE_DRBL_CAPACITY

Maximum number of bare durables that can be stored. Bare durables are durables which are not in a pod. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

STATION_WIDTH

STATION_HEIGHT

STATION_DEPTH

IS_AMHS

This field indicates if the stocker is part of the Automated Material Handling System. (* inherited from FPSINPUT.MHS_STOCKERS)

IS_OUTPUT_FOR_BAY

This flag indicates if this rack qualifies as an output rack for the bay for NextMove. (* inherited from FPSINPUT.MHS_RACKS)

STATION_DISPLAY

UNBLOCK_AFTER_ABORT

After a lot aborts processing it has the process state BLOCK and cannot be scheduled. This allows the operator to put on hold or send to rework or otherwise take the appropriate action. Normally this lasts for the period specified in wait_sec_to_sch_after_abort in GEN_FACILITIES. But at many sites if a lot arrives back in a stocker or on certain storage racks then it should no longer be blocked. This flag enables this behavior. It is set for each stocker or rack but most likely will be set to Y for all stockers and/or all input racks if this behavior is desired at the site. Any lot at a location with this flag set to Y will no longer be blocked after abort. Instead it will have process state of WAIT and will be available to schedule on any tool. (* inherited from FPSINPUT.MHS_STOCKERS)

REQUIRE_LOCATION_SCAN

This flag indicates if the rack requires a location scan (* inherited from FPSINPUT.MHS_RACKS)