FPSINPUT.SCH_C_TOOLS

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

DEFAULT_CAST_PORT_DOWN_SEC

NUMBER(6)

the default wait seconds to sched when the port is down

ENABLE_RESERVATION

CHAR(1)

IS_IGNORE_MAIN_ENTITY_STATE

CHAR(1)

is used to determine on the chamber tool to know if it should ignore the main entity state and make it always UP?

MAX_WAIT_TIME_EXTRA_LOTS_RQD

NUMBER(3)

to indicate how many more lots this priority is willing to wait to batch, this need to work with max_wait_time_pct; by default, 999 meaning not going to way, but the minimum is 1, additional lot required to wait

MAX_WAIT_TIME_PCT

NUMBER(3)

to indicate how much time this priority is willing to wait for the coming lots to batch, this need to work with max_wait_time_extra_lots_rqd; if value is 0, then it means not going to wait at all

WAIT_SEC_TO_RELEASE_DURABLE

NUMBER