FPSINPUT.RTG_PROCESS_GROUPS

FACILITY

VARCHAR2(6)

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

PROCESS_GROUP

VARCHAR2(36)

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group.

BOTTLENECK_TIER

NUMBER(1)

This field is used for scheduling to determine which group should be scheduled first.

CRITICAL_TOOL_HOURS

NUMBER(5)

to determine how many hours to calculate the critical tool score; when set to 6 ours, then the scheduler will only look into how many tool are available within 6 hours and how many lots will be able to run within 6 hours

DEFAULT_BATCH_INT_SEC

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_DURABLE_CHG_EXPENSE

NUMBER(4)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_DURABLE_CHG_SEC

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_FIRST_UNIT_SEC

NUMBER(9,3)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_LOAD_SEC

NUMBER(4)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_MIN_DISP_SEC

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_RECIPE_CHG_EXPENSE

NUMBER(4)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_RECIPE_CHG_SEC

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_SETUP_CHG_EXPENSE

NUMBER(4)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_SETUP_CHG_SEC

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_UNAVAILABLE_SEC

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_UNIT_INT_SEC

NUMBER(9,3)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DEFAULT_UNLOAD_SEC

NUMBER(4)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DISPATCH_CAPACITY

NUMBER(4)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

DISPATCH_NUM_STEPS_AWAY

NUMBER(2)

used to determine how many steps away for the coming lots to become eligible to dispatch

DISPATCH_SEC

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

IS_IN_KIT

CHAR(1)

used to determine if this process group will show in kitting page

IS_USE_SETUP_CHG_FINAL

CHAR(1)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

IS_USE_TOOL_ASGN_OVR_ONLY

CHAR(1)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

MAX_SEC_TO_KEEP_POD

NUMBER(6)

used to determine how long will keep the pod on the tool before to switch another pod. by default, it should be 0 which means it allows to switch the pod without any restriction.

MAX_WAIT_TIME_EXTRA_LOTS_RQD

NUMBER(3)

to indicate how many more lots this priority is willing to wait to batch, this need to work with max_wait_time_pct; by default, 999 meaning not going to way, but the minimum is 1, additional lot required to wait.

MAX_WAIT_TIME_PCT

NUMBER(3)

to indicate how much time this priority is willing to wait for the coming lots to batch, this need to work with max_wait_time_extra_lots_rqd; if value is 0, then it means not going to wait at all.

ONLY_KEEP_POD_IF_1_PORT_AVAIL

CHAR(1)

used to determine if it will only run the pod switch rule when only 1 port available

OVR_IS_LOT_ASGN_RQD_FOR_SCH

CHAR(1)

This requires lot rank for this process group even when the value of IS_LOT_ASGN_RANK_RQD_FOR_SCH in GEN_FACILITIES is set to N. Note that Y for facility cannot be overriden with N here because that is a risk of doing this incorrectly. If the facility has a mix - for example, process groups like sorters and inspection tools might not have lot assignments - then we have to set to N for facility and Y for all process groups that have lot assignments.

PREFER_TO_JOIN_BATCH

CHAR(1)

When set to Y, the scheduler will prefer to add a lot to an already started batch over starting a new batch, even if the score for starting a new batch would be higher

PROCESS_CLASS

VARCHAR2(12)

Top-level grouping of process groups with same general purpose (i.e. Process or Metrology or Nonwafer). Allowed values are defined by FPS and are listed in FPSADMIN.RTG_PROCESS_CLASSES. This field can also be defined in EQP_TOOLS using the ovr_process_class field if we do not know it for the process group.

REQUIRE_ALL_CH_FOR_SCHED

CHAR(1)

This is set to Y only if we are using the FPS Scheduler for chamber tools where ch_type is not yet set properly. In this case we must use all chambers in the ch_allowed provided to us and cannot schedule if any of these chambers is not available.

RESERVE_SEC_DURABLE

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

RESERVE_SEC_LOT

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

RESERVE_SEC_PRTY_DURABLE

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

RESERVE_SEC_PRTY_LOT

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

RESERVE_STEPS_DURABLE

NUMBER(4)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

RESERVE_STEPS_LOT

NUMBER(4)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

RESERVE_STEPS_PRTY_DURABLE

NUMBER(4)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

RESERVE_STEPS_PRTY_LOT

NUMBER(4)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.

SCHED_GROUP

VARCHAR2(36)

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together.

SHOULD_RESERVE_BACK_TO_BACK

CHAR(1)

to determine if need to schedule back-to-back steps

SHOULD_USE_EXTL_RSRV_TOOL

CHAR(1)

This flag determines if the scheduler should use the column extl_reserve_tool or not

UPDATED_INST

DATE

Time when the record was updated according to the source data. Note this is not the time when the record was actually updated in this table - it will almost always be earlier. (* from FPSINPUT.GEN_FACILITIES)

USE_AUTO_EXTL_RSRV

CHAR(1)

If this flag is Y then the NMV_AUTO_EXTL_RESERVATIONS procedure will reserve lots to the best available allowed tool for NextMove demo purposes.

WAIT_FOR_LARGER_BATCH

CHAR(1)

This flag determines if the scheduler should always wait for an eligible larger batch for tools under this process group

WAIT_SEC_TO_ALLOW_DOWN_RESERVE

NUMBER(6)

This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details.