data-dictionary

FPSBASE.EQP_OVR_MINS_UNTIL_SCHED

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Table FPSBASE.EQP_OVR_MINS_UNTIL_SCHED"

Our default values for minutes_until_sched and remaining_mins_until_sched are configured for each eqp_state in EQP_L6_DETAILED_STATES but entries in this table override these defaults for a specific eqp_type and eqp_state. For example, the time for a qual is different for Diffusion furnaces than it is for Litho cells.

  • Schema: FPSBASE

  • Tablespace: FPSDATA

  • Primary key: FACILITY, EQP_TYPE, EQP_STATE


Column

Type

Nullable

Comment

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

EQP_TYPE

VARCHAR2(50)

N

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)

EQP_STATE

VARCHAR2(48)

N

Client equipment state taken directly from their MES or from their existing tool state model. For EQP_MNT_FUTURE, this is the state that we estimate the entity will be in during the maintenance which is often set to a generic PM state if we do not have detailed information. (* from FPSINPUT.EQP_L6_DETAILED_STATES)

MINUTES_UNTIL_SCHED

NUMBER(7)

N

This value should be set only for NONMFG states and represents the number of minutes from the time when the eqp state changed until we will schedule lots to a tool in this state as long as that time is no earlier than remaining_mins_until_sched from now. The default value in EQP_L6_DETAILED_STATES can be overridden by an entry in EQP_OVR_MINS_UNTIL_SCHED for a specific eqp_type and eqp_state. If the value is EQP_L6_DETAILED_STATES is null then we will not schedule. For example, the current time is 10:00, the current state is SCH-SERVICE, state changed at 02:00, minutes_until_sched is 600, and remaining_mins_until_sched is 90. 02:00 + 600 minutes is 10:00 which is more than 90 minutes away therefore we schedule lots to this tool starting at 10:00. But once the clock passes 08:30 then the original estimate of 10:00 is less than 90 minutes away then we perpetually estimate that the tool will be up in 90 minutes. So at 08:35 we schedule starting at 10:05 then at 08:40 we schedule starting at 10:10 and so on. (* from FPSINPUT.EQP_L6_DETAILED_STATES)

REMAINING_MINS_UNTIL_SCHED

NUMBER(7)

N

See comment for MINUTES_UNTIL_SCHED column. (* from FPSINPUT.EQP_L6_DETAILED_STATES)