FPSAPP.NMV_P_TOOL_QUALS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

LOGGED_ENTITY

Entity to which event is logged in the MES. This could be a main tool, subtool, entity, or port. In MNT tables this could be a vehicle or durable as well which is why the column width is wider. If main tool or port, we apply the event to all entities. If subtool we apply to all within the subtool. If entity we apply only to the entity. (* inherited from FPSINPUT.EQP_EVENT_HIST)

EARLY_INST

Earliest time when maintenance can be started. (* inherited from FPSINPUT.EQP_MNT_FUTURE)

DUE_INST

To indicate the due date for this futuer start lot (* inherited from FPSINPUT.WIP_STARTS)

START_INST

Time when the lot started. (* inherited from FPSINPUT.WIP_STARTS)

MNT_NAME

Name identifying the scheduled maintenance event which is unique for the `logged_entity`. For example, daily qual or weekly PM. (* inherited from FPSINPUT.EQP_MNT_FUTURE)

IS_CHAMBER_QUAL