FPSADMIN.RM_P_ENTITIES

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_GROUP

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

TOOL_TYPE

the tool type from the first lot that scheduled (* inherited from FPSAPP.SCH_W_SCHED_DURABLE_INSPECT)

ENTITY

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY)

CH

A single character to identify the chamber which must be unique with the tool. We concatenate the CH to get the string for CH_USED so it is helpful for diagnostic purposes if this single character is representative of the chamber (i.e. A for ET12CHA or 1 for MD27C1) because then the CH_USED string makes sense. However it is not required and if the chamber naming is inconsistent we might get use 1, 2, 3, etc. for the CH. (* inherited from FPSINPUT.EQP_CHAMBERS)

CH_TYPE

This column is critical for sequential chamber tools where a wafer goes through multiple chambers. It identifies the type of chamber so two chambers with the same ch_type are identical and wafers can use either one. See comment on mfg_pct_per_ch column for an example. For independent chamber tools where all chambers are the same and each wafer goes to only one chamber then ch_type should be set to the default value CH so that ch_type_cnt is 1CH, 2CH, 3CH, etc. (* inherited from FPSINPUT.EQP_CHAMBERS)

BAY

A bay is a physical area within the building. The bay is important for estimating travel time for a carrier to reach its destination as we usually store these estimates as a matrix of bay-to-bay and assume that the estimated time from any location within one bay to any location within another bay is approximately the same. (* inherited from FPSINPUT.MHS_BAYS)

BG_COLOR_HTML

TEXT_COLOR_HTML

EQP_STATE

Client equipment state taken directly from their MES or from their existing tool state model. For EQP_MNT_FUTURE, this is the state that we estimate the entity will be in during the maintenance which is often set to a generic PM state if we do not have detailed information. (* inherited from FPSINPUT.EQP_L6_DETAILED_STATES)

EQP_STATE_DISPLAY

Display name for the equipment state which will be displayed on all Dashboards and reports. (* inherited from FPSINPUT.EQP_L6_DETAILED_STATES)

EQP_STATE_CHG_INST

Time when the eqp_state changed for this particular entity. If another entity on the same main tool changes state, eqp_inst will change for all entities on the tool even those whose state does not change. Therefore if eqp_inst is after state_chg_inst that means another entity changed state at eqp_inst but this entity has not changed since state_chg_inst. (* inherited from FPSBASE.ETP_STATUS)

RESERVE_STEPS

RESERVE_SEC

WAIT_SEC_TO_SCHED

The lot may be scheduled but must not be allowed to dispatch or start until this number of seconds has elapsed. (* inherited from FPSINPUT.WIP_LOTS_STATIC)