FPSINPUT.DASH_P_GANTT_TOOL_STATE

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

MODULE

Modules are departments of people who manage certain areas of the fab. The modules are assigned ownership of a set of tools to operate and maintain as well as steps on the route that they are responsible for executing. Since many of our tables include tool and step information together, we must distinguish between the owner of the step (WIP_MODULE), the owner of the operation of the tool (EQP_MODULE), and the owner of the maintenance of the tool (MNT_MODULE). WIP_MODULE is used to credit moves and set goals. Each route-step is assigned to a process family and then its wip_module is defined by the process family. EQP_MODULE is used to group tools particularly for tool performance reporting. Similar to WIP, each tool is dynamically assigned to a process family based on its assignments and then its eqp_module is defined by the process family. MNT_MODULE is usually the same as EQP_MODULE but unlike EQP_MODULE is not dependent on assignments but only on the EQP hierarchy. Each tool is assigned to an eqp_type and each eqp_type is assigned to a mnt_family and each mnt_family is assigned to a mnt_module. (* inherited from FPSINPUT.GEN_MODULES)

MNT_MODULE

MNT_MODULE is the module responsible for maintaining the tool and is a property of MNT_FAMILY. See comments on the module column in GEN_MODULES for how it relates to eqp_module and mnt_module. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

AS