FPSAPP.DASH_P_TOOLS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

EQP_TYPE

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

PROCESS_GROUP

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_CLASS

Top-level grouping of process groups with same general purpose (i.e. Process or Metrology or Nonwafer). Allowed values are defined by FPS and are listed in FPSADMIN.RTG_PROCESS_CLASSES. This field can also be defined in EQP_TOOLS using the ovr_process_class field if we do not know it for the process group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_CLASS_SORT_ORDER

MODULE

Modules are departments of people who manage certain areas of the fab. The modules are assigned ownership of a set of tools to operate and maintain as well as steps on the route that they are responsible for executing. Since many of our tables include tool and step information together, we must distinguish between the owner of the step (WIP_MODULE), the owner of the operation of the tool (EQP_MODULE), and the owner of the maintenance of the tool (MNT_MODULE). WIP_MODULE is used to credit moves and set goals. Each route-step is assigned to a process family and then its wip_module is defined by the process family. EQP_MODULE is used to group tools particularly for tool performance reporting. Similar to WIP, each tool is dynamically assigned to a process family based on its assignments and then its eqp_module is defined by the process family. MNT_MODULE is usually the same as EQP_MODULE but unlike EQP_MODULE is not dependent on assignments but only on the EQP hierarchy. Each tool is assigned to an eqp_type and each eqp_type is assigned to a mnt_family and each mnt_family is assigned to a mnt_module. (* inherited from FPSINPUT.GEN_MODULES)

MODULE_DISPLAY

The name of the module displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the module. (* inherited from FPSINPUT.GEN_MODULES)

MODULE_SORT_ORDER

MNT_FAMILY

MNT_FAMILY is assigned to each EQP_TYPE. Tools in the same MNT_FAMILY are similar and share the same maintenance schedule. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

MNT_MODULE

MNT_MODULE is the module responsible for maintaining the tool and is a property of MNT_FAMILY. See comments on the module column in GEN_MODULES for how it relates to eqp_module and mnt_module. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

MNT_MODULE_DISPLAY

MNT_MODULE_SORT_ORDER

BAY

A bay is a physical area within the building. The bay is important for estimating travel time for a carrier to reach its destination as we usually store these estimates as a matrix of bay-to-bay and assume that the estimated time from any location within one bay to any location within another bay is approximately the same. (* inherited from FPSINPUT.MHS_BAYS)

MAX_CARRIERS_TO_RESERVE

Maximum number of carriers the tool is allowed to reserve. This is tool specific and the process might have a different restriction and we take the min. (* inherited from FPSINPUT.EQP_TOOLS)

MANUFACTURER

Manufacturer of the tool used for display purposes only. (* inherited from FPSINPUT.EQP_TYPES)

TOOL_OWNER_NAME

Name of the engineer who is responsible for the tools of this type (* inherited from FPSINPUT.EQP_TYPES)

PLAN_AVAIL

Planned availability used in goal planner and capacity model. Plan_avail + plan_sched + plan_unsched = 100. (* inherited from FPSINPUT.EQP_TYPES)

PLAN_UTIL

Planned utilization used in goal planner and capacity model. Must be less than plan_avail. (* inherited from FPSINPUT.EQP_TYPES)

PLAN_UNSCHED

Planned unscheduled downtime used in goal planner and capacity model. (* inherited from FPSINPUT.EQP_TYPES)

PLAN_SCHED

Planned scheduled downtime used in goal planner and capacity model. (* inherited from FPSINPUT.EQP_TYPES)

MFG_GROUP

MAX_BATCH_SIZE_CARRIERS

Maximum number of carriers which can be loaded together in a batch. This column must be populated and is used for ETP and for scheduling to determines whether the tool loads in batches. Non-batch tools will have a value of 1 and batch tools limited by units will be populated according to the comment in max_batch_size_units. This is not used for throughput calculation because we can have tools which load multiple carriers at once but whose throughput is calculated per unit. (* inherited from FPSINPUT.EQP_TYPES)

LOAD_SEC

For throughput purposes, we would like the begin event to be logged when the first wafer of the lot enters the tool so that we can accurately track theoretical cycle time (TCT) which starts at this point. If the tool logs as desired then this column will be 0 and it usually is. But some tools do not log the begin event until some amount of time later, for example after the pumping time. This column exists to account for this delay and it is the number of seconds from when the first wafer enters until the begin is logged. We simply add this time to the processing time to get the TCT. This is by eqp_type as we estimate that all recipes of all tools in the same eqp_type will be consistent in this behavior. Please note that unload_sec is similar for any time after the end event until the lot can be unloaded. (* inherited from FPSINPUT.EQP_TYPES)

UNLOAD_SEC

Seconds after the end is logged until the lot is available to be unloaded. This will often be 0. Unload_sec is added to the first_wafer_sec in throughput calculations. (* inherited from FPSINPUT.EQP_TYPES)

IS_REAL_TOOL

Flag indicating whether tool physically exists. An example where this is not set would be lot start or visual inspect. (* inherited from FPSINPUT.EQP_TYPES)

WAFER_SIZE

If the facility only has one wafer size then this column should be null in both RTG_PRDS and EQP_TYPES. If the facility has more than one wafer size then a value of null in EQP_TYPES means that those tools can run all wafer sizes. See column IS_ANY_WAFER_SIZE for details. (* inherited from FPSINPUT.GEN_WAFER_SIZES)

TOOL_ETP_STATE_HTML_TEXT_COLOR

COORD_X

This is the x coordinate position of the location within its station, in other words horizontal position. The maximum coord_x is the width of the station. This is optional and is often used for racks and sometimes for carts so we can determine the exact position of the carrier to make it easier to find. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

COORD_Y

This is the y coordinate position of the location within its station, in other words vertical position or shelf number. The maximum coord_y is the height of the station. This is optional and is often used for racks and sometimes for carts so we can determine the exact position of the carrier to make it easier to find. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

FILTER_FROM_EQP_SUMMARIES

If this is Y then tools in this MNT_FAMILY will not be included in the EQP/ETP state summary bar charts on the facility and module level. This applies to bar charts on the Operations, Equipment, and Performance tabs of the Dashboard. EQP/ETP state summaries will still be available for these tools on the process family and tool level. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

TOOL_MPCT_STATE

TOOL_MPCT_STATE_DISPLAY

TOOL_MPCT_SHORT_DISPLAY

TOOL_MPCT_STATE_CHG_INST

TOOL_MPCT_STATE_BG_COLOR

TOOL_MPCT_STATE_TEXT_COLOR

MODEL_NUMBER

Model of tool provided by manufacturer. This value is only used to display in the Dashboard. (* inherited from FPSINPUT.EQP_TOOLS)

SOFTWARE_VERSION

Software version the tool is running. This value is only used to display in the Dashboard. (* inherited from FPSINPUT.EQP_TOOLS)

FIRMWARE_VERSION

Firmware/Hardware version the tool us running. This value is only used to display in the Dashboard. (* inherited from FPSINPUT.EQP_TOOLS)

DESCRIPTION

Tool desciption. This value is only used to display in the Dashboard. (* inherited from FPSINPUT.EQP_TOOLS)

SERIAL_NUMBER

Tool serial number. This value is only used to display in the Dashboard. (* inherited from FPSINPUT.EQP_TOOLS)

ALPHA_NUM_SORT_TOOL

HIDE_IN_DASH

Set to Y to hide this tool from the Dashboard and most other reports. (* inherited from FPSINPUT.EQP_TOOLS)

SHOW_TOOL

PRI_STKR_LIST

SEC_STKR_LIST

EMRG_STKR_LIST

OUT_STKR_LIST

TOOL_MSO_GROUP

TOOL_MSO_GROUP is the grouping of tools used for Metrology Sampling Optimizer. This grouping is used in the Sampling Dashboard and for assigning event based sampling rules for a tool group. This group is similar to process family but allows a tool grouping specific to the MSO. (* inherited from FPSINPUT.EQP_TOOL_MSO_GROUPS)

TOOL_MSO_MODULE

TOOL_MSO_MODULE is the module responsible for the tool_mso_groups used for the Metrology Sampling Optimizer. The module is used for building the tool hierarchy for the Sampling Dashboard. (* inherited from FPSINPUT.EQP_TOOL_MSO_GROUPS)

TOOL_MSO_MODULE_DISPLAY

HIDE_IN_MSO

Set to Y to hide this tool from the MSO Dashboard and MSO UI. This should be used on tools where no metrology or tracking is required. (* inherited from FPSINPUT.EQP_TOOLS)

DETECTION_SEC_AVG_LOWER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have an average time to detect under the lower limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter. (* inherited from FPSINPUT.EQP_TOOLS)

DETECTION_SEC_AVG_UPPER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have an average time to detect under the upper limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter. (* inherited from FPSINPUT.EQP_TOOLS)

DETECTION_SEC_MAX_LOWER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have a max time to detect under the lower limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter. (* inherited from FPSINPUT.EQP_TOOLS)

DETECTION_SEC_MAX_UPPER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have a max time to detect under the upper limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter. (* inherited from FPSINPUT.EQP_TOOLS)

LOTS_AT_RISK_AVG_LOWER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have an average lots at risk under the lower limit value. The lots at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset. (* inherited from FPSINPUT.EQP_TOOLS)

LOTS_AT_RISK_AVG_UPPER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have an average lots at risk under the upper limit value. The lots at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset. (* inherited from FPSINPUT.EQP_TOOLS)

LOTS_AT_RISK_MAX_LOWER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have a max lots at risk under the lower limit value. The lots at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset. (* inherited from FPSINPUT.EQP_TOOLS)

LOTS_AT_RISK_MAX_UPPER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have a max lots at risk under the upper limit value. The lots at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset. (* inherited from FPSINPUT.EQP_TOOLS)

WAFERS_AT_RISK_AVG_LOWER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have an average wafers at risk under the lower limit value. The wafers at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset. (* inherited from FPSINPUT.EQP_TOOLS)

WAFERS_AT_RISK_AVG_UPPER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have an average wafers at risk under the upper limit value. The wafers at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset. (* inherited from FPSINPUT.EQP_TOOLS)

WAFERS_AT_RISK_MAX_LOWER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have a max wafers at risk under the lower limit value. The wafers at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset. (* inherited from FPSINPUT.EQP_TOOLS)

WAFERS_AT_RISK_MAX_UPPER_LIMIT