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FPSBASE.RTG_MSO_PROCESSES

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Table FPSBASE.RTG_MSO_PROCESSES"

Contains the list of allowed processes to be used by the Metrology Sampling Optimizer system its UI. These processes are used to define the main process and/or metrology/skip steps in a process flow. RTG_ROUTE_STEPS has a MSO_PROCESS column that refers to the processes defined in this table, but more can be defined here for cases where a particular process is not part of defined flow. This allows the system to identify a processes for test wafer lots or other scans that can clear a main process tool. Users may want to create rules before a flow exists in FPS, keeping the MSO process list here helps facilitate that as well.

  • Schema: FPSBASE

  • Tablespace: FPSDATA

  • Foreign keys: RTG_MSO_PROCESSES_FK_FAC: FACILITY REFERENCES FPSINPUT.GEN_FACILITIES (FACILITY)


Column

Type

Nullable

Comment

FACILITY

VARCHAR2(6)

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

MSO_PROCESS

VARCHAR2(100)

Process definition for this step to be used by the Metrology Sampling Optimizer. MSO process is defined differently to avoid conflict with regular process and common step and because the definition can vary greatly from those concepts. This column can not be NA because NA values are excluded in by the Metrology Sampling Optimizer.

IS_MSO_ALLOWED_SUB

CHAR(1)

Flag indicating whether this step can be used as a process sub in the MSO application. This flag is only used by the UI for filtering purposes. A process sub is a metrology process that we cannot make a skip / take decision on, but can be run to clear counters.

IS_MSO_SKIPPABLE

CHAR(1)

Flag indicating whether this step is allowed to be skipped by the MSO application. This flag controls the options for TO_MSO_PROCESS in the UI and it serves as a last check before sending a skip decision to the MES. Setting the flag to N will keep it from ever being sent as a skip step and will not show it as a Sample step in the UI