FPSINPUT.MSOUI_P_DETECT_TTD_LIMITS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

FROM_PROCESS_TOOL

CHAMBER

Chambers belong to a main tool, have a state which is independent of the main tool and other chambers on the same tool, and can have events logged against it. The difference between a chamber and a port is that a chamber processes lots while port is just a location. (* inherited from FPSINPUT.EQP_CHAMBERS)

MODULE

Modules are departments of people who manage certain areas of the fab. The modules are assigned ownership of a set of tools to operate and maintain as well as steps on the route that they are responsible for executing. Since many of our tables include tool and step information together, we must distinguish between the owner of the step (WIP_MODULE), the owner of the operation of the tool (EQP_MODULE), and the owner of the maintenance of the tool (MNT_MODULE). WIP_MODULE is used to credit moves and set goals. Each route-step is assigned to a process family and then its wip_module is defined by the process family. EQP_MODULE is used to group tools particularly for tool performance reporting. Similar to WIP, each tool is dynamically assigned to a process family based on its assignments and then its eqp_module is defined by the process family. MNT_MODULE is usually the same as EQP_MODULE but unlike EQP_MODULE is not dependent on assignments but only on the EQP hierarchy. Each tool is assigned to an eqp_type and each eqp_type is assigned to a mnt_family and each mnt_family is assigned to a mnt_module. (* inherited from FPSINPUT.GEN_MODULES)

TOOL_MSO_GROUP

TOOL_MSO_GROUP is the grouping of tools used for Metrology Sampling Optimizer. This grouping is used in the Sampling Dashboard and for assigning event based sampling rules for a tool group. This group is similar to process family but allows a tool grouping specific to the MSO. (* inherited from FPSINPUT.EQP_TOOL_MSO_GROUPS)

TIME_TO_DETECT_SEC

RULE_GROUP

Unique name for the group. (* inherited from FPSBASE.MSO_RULE_GROUPS)

RULE_CLASS

Unique name for the class. (* inherited from FPSBASE.MSO_RULE_CLASSES)

RULE_NAME

RULE_ID

LOT

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

FROM_MSO_INST

FROM_START_WEEK

WEEK

FROM_START_SHIFT

SHIFT

Name of shift must be unique and can be in any format as long as it is display friendly since this is what we show everywhere. We prefer that other tables should reference start_shift rather than shift in case we want to change the naming convention for the shift. (* inherited from FPSINPUT.CAL_SHIFTS)

DETECTION_SEC_AVG_LOWER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have an average time to detect under the lower limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter. (* inherited from FPSINPUT.EQP_TOOLS)

DETECTION_SEC_AVG_UPPER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have an average time to detect under the upper limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter. (* inherited from FPSINPUT.EQP_TOOLS)

DETECTION_SEC_MAX_LOWER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have a max time to detect under the lower limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter. (* inherited from FPSINPUT.EQP_TOOLS)

DETECTION_SEC_MAX_UPPER_LIMIT

Tool level limit that is used to highlight in the dashboard how many tools have a max time to detect under the upper limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter. (* inherited from FPSINPUT.EQP_TOOLS)